Silicon Carbidendi chinthu cholimba chomwe chili ndi silicon ndi carbon, ndipo chimapezeka m'chilengedwe ngati moissanite ya mchere yosowa kwambiri. Tinthu ta silicon carbide titha kulumikizidwa pamodzi pochita sintering kuti tipange zoumba zolimba kwambiri, zomwe zimagwiritsidwa ntchito kwambiri pakugwiritsa ntchito zomwe zimafuna kulimba kwambiri, makamaka mu semiconductor processing.
Kapangidwe ka thupi ka SiC
Kodi SiC Coating ndi chiyani?
Chophimba cha SiC ndi cholimba, chosatha kusweka cha silicon carbide chokhala ndi dzimbiri komanso kutentha kwambiri komanso kutentha kwambiri. Chophimba cha SiC choyera kwambirichi chimagwiritsidwa ntchito makamaka m'mafakitale a semiconductor ndi zamagetsi kuti chiteteze zonyamulira za wafer, maziko ndi zinthu zotenthetsera ku malo owononga komanso owononga. Chophimba cha SiC chimagwiranso ntchito pa uvuni wa vacuum ndi kutentha kwa zitsanzo m'malo otayira vacuum ambiri, otaya mpweya komanso okosijeni.
Kuyera kwambiri kwa SiC pamwamba
Kodi njira yophikira SiC ndi yotani?
Chopondapo cha silicon carbide chimayikidwa pamwamba pa substrate pogwiritsa ntchitoCVD (Kutaya Nthunzi ya Chemical)Kuyika zinthu nthawi zambiri kumachitika kutentha kwa 1200-1300°C ndipo kutentha kwa zinthu za substrate kuyenera kugwirizana ndi chophimba cha SiC kuti kuchepetse kupsinjika kwa kutentha.
Kapangidwe ka kristalo ka filimu ya CVD SIC
Kapangidwe kake ka SiC kamaonekera makamaka chifukwa cha kukana kutentha kwambiri, kuuma kwake, kukana dzimbiri komanso kutentha kwake.
Magawo wamba akuthupi nthawi zambiri amakhala motere:
Kuuma: Chophimba cha SiC nthawi zambiri chimakhala ndi Vickers Hardness pakati pa 2000-2500 HV, zomwe zimapangitsa kuti chisawonongeke kwambiri komanso chisawonongeke kwambiri m'mafakitale.
Kuchulukana: Zophimba za SiC nthawi zambiri zimakhala ndi kuchuluka kwa 3.1-3.2 g/cm³. Kuchuluka kwake kwakukulu kumathandiza kuti chophimbacho chikhale champhamvu komanso cholimba.
Kutentha kwa matenthedwe: Zophimba za SiC zimakhala ndi mphamvu yotenthetsera kutentha kwambiri, nthawi zambiri zimakhala pamtunda wa 120-200 W/mK (pa 20°C). Izi zimapangitsa kuti ikhale ndi mphamvu yotenthetsera kutentha bwino m'malo otentha kwambiri ndipo zimapangitsa kuti ikhale yoyenera kwambiri pazida zochizira kutentha mumakampani opanga ma semiconductor.
Malo osungunuka: silicon carbide ili ndi malo osungunuka pafupifupi 2730°C ndipo imakhala ndi kutentha kolimba kwambiri kutentha kukatentha kwambiri.
Kuchuluka kwa Kutentha kwa Kutentha: Zophimba za SiC zimakhala ndi coefficient yotsika ya expansion ya kutentha (CTE), nthawi zambiri imakhala pakati pa 4.0-4.5 µm/mK (mu 25-1000℃). Izi zikutanthauza kuti kukhazikika kwake kwa dimensional ndikwabwino kwambiri pa kutentha kwakukulu.
Kukana dzimbiri: Zophimba za SiC zimalimbana kwambiri ndi dzimbiri m'malo amphamvu a asidi, alkali ndi okosijeni, makamaka pogwiritsa ntchito ma asidi amphamvu (monga HF kapena HCl), kukana kwawo dzimbiri kumaposa kwambiri kwa zipangizo zachitsulo wamba.
Chophimba cha SiC chogwiritsira ntchito
Chophimba cha SiC nthawi zambiri chimagwiritsidwa ntchito kuonjezera kukana dzimbiri, kukana kutentha kwambiri, komanso kukana kukokoloka kwa nthaka m'madzi a m'magazi. Zinthu zomwe zimagwiritsidwa ntchito nthawi zambiri ndi izi:
| Mtundu wa substrate | Chifukwa chofunsira | Kagwiritsidwe ntchito kawirikawiri |
| Graphite | - Kapangidwe kopepuka, kutentha kwabwino - Koma zimawonongeka mosavuta ndi plasma, zimafuna chitetezo cha SiC coverage | Zipinda za chipinda chotsukiramo mpweya, maboti a graphite, mathireyi odulira plasma, ndi zina zotero. |
| Quartz (Quartz/SiO₂) | - Kuyera kwambiri koma kumawononga mosavuta - Kupaka kumawonjezera kukana kukokoloka kwa madzi a m'magazi | Zigawo za chipinda cha CVD/PECVD |
| Zoumbaumba (monga alumina Al₂O₃) | - Mphamvu yayikulu komanso kapangidwe kokhazikika - Kupaka utoto kumathandiza kuti pamwamba pakhale kukana dzimbiri | Zipinda za chipinda, zomangira, ndi zina zotero. |
| Zitsulo (monga molybdenum, titaniyamu, ndi zina zotero) | - Kutentha kwabwino koma kukana dzimbiri - Kupaka utoto kumathandiza kuti pamwamba pakhale bata | Zigawo zapadera zochitira zinthu |
| Thupi lopangidwa ndi silicon carbide (SiC bulk) | - Malo okhala ndi zofunikira kwambiri pa ntchito zovuta - Kupaka utoto kumawonjezera kuyera ndi kukana dzimbiri | Zigawo zapamwamba za chipinda cha CVD/ALD |
Zinthu zopangidwa ndi SiC zimagwiritsidwa ntchito kwambiri m'malo otsatirawa a semiconductor
Zinthu zopangira utoto wa SiC zimagwiritsidwa ntchito kwambiri pokonza zinthu za semiconductor, makamaka kutentha kwambiri, dzimbiri lalikulu komanso malo amphamvu a plasma. Izi ndi njira zingapo zazikulu zogwiritsira ntchito komanso mafotokozedwe achidule:
| Njira/gawo logwiritsira ntchito | Kufotokozera mwachidule | Ntchito ya Silicon Carbide Yophimba |
| Kudula kwa Plasma (Kudula) | Gwiritsani ntchito mpweya wochokera ku fluorine kapena chlorine potumiza mapatani | Pewani kukokoloka kwa plasma ndipo pewani kuipitsidwa ndi tinthu tating'onoting'ono ndi chitsulo |
| Kuyika nthunzi ya mankhwala (CVD/PECVD) | Kuyika kwa oxide, nitride ndi mafilimu ena owonda | Pewani mpweya wowononga woyambira ndipo onjezerani moyo wa zigawo zake |
| Chipinda chosungira nthunzi (PVD) | Kuphulika kwa tinthu tating'onoting'ono tokhala ndi mphamvu zambiri panthawi yopaka utoto | Kuonjezera kukana kukokoloka kwa nthaka ndi kukana kutentha kwa chipinda chochitirapo kanthu |
| Njira ya MOCVD (monga kukula kwa SiC epitaxial) | Kuchitapo kanthu kwa nthawi yayitali pansi pa kutentha kwakukulu komanso mlengalenga wowononga kwambiri wa haidrojeni | Sungani zida zokhazikika ndikuletsa kuipitsidwa kwa makhiristo omwe akukula |
| Njira yochizira kutentha (LPCVD, kufalikira, kupopera, ndi zina zotero) | Kawirikawiri zimachitika kutentha kwambiri komanso mpweya woipa/mpweya | Tetezani maboti a graphite ndi mathireyi ku okosijeni kapena dzimbiri |
| Chonyamulira cha wafer/chuck (Kusamalira wafer) | Maziko a graphite ogwiritsira ntchito kusamutsa kapena kuthandizira wafer | Chepetsani kutayika kwa tinthu tating'onoting'ono ndipo pewani kuipitsidwa ndi zinthu zomwe zakhudzana ndi zinthuzo |
| Zigawo za chipinda cha ALD | Mobwerezabwereza komanso molondola kuwongolera kuyika kwa atomiki | Chophimbacho chimasunga chipindacho kukhala choyera ndipo chimakhala ndi kukana dzimbiri kwambiri ku zinthu zoyambira |
Chifukwa chiyani muyenera kusankha VET Energy?
VET Energy ndi kampani yotsogola yopanga zinthu zophimba SiC ku China, ndipo zinthu zazikulu zophimba SiC zikuphatikizapochonyamulira cha wafer chokhala ndi chophimba cha SiC, SiC yokutidwacholetsa kutupa cha epitaxial, Mphete ya graphite yokutidwa ndi SiC, Zigawo za theka la mwezi zokhala ndi zokutira za SiC, SiC yokutidwa ndi kaboni-kaboni wopangidwa ndi SiC, Boti la wafer lophimbidwa ndi SiC, Chotenthetsera chokhala ndi SiC, ndi zina zotero. VET Energy yadzipereka kupatsa makampani opanga ma semiconductor njira zabwino kwambiri zothetsera ukadaulo ndi zinthu, ndipo imathandizira ntchito zosintha. Tikuyembekezera mwachidwi kukhala mnzanu wa nthawi yayitali ku China.
Ngati muli ndi mafunso kapena mukufuna zina zowonjezera, chonde musazengereze kulumikizana nafe.
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Nthawi yotumizira: Okutobala-18-2024