Ko te tautoko papa whariki tukanga VET Energy PECVD he mea whakapau matua i hangaia mō te tukanga PECVD (plasma enhanced chemical vapor deposition). He mea hanga tēnei hua mai i te rauemi whariki tino parakore, tino matotoru, he ātete pāmahana teitei, he ātete waikura, he pumau āhua me ētahi atu āhuatanga, ka taea te whakarato i tētahi tūāpapa tautoko pumau mō te tukanga PECVD, hei whakarite i te ōritetanga me te papatahi o te whakatakotoranga kiriata.
Ko te hoahoa "tautoko karāpiti" o te tautoko anga karāpiti VET Energy e kore e taea anake te tautoko i te anga, engari ka whakarato hoki i te pumau wera i roto i te taiao PECVD pāmahana teitei me te pēhanga teitei hei whakarite i te pumau o te tukanga.
Ko ngā āhuatanga o te tautoko papa whariki tukatuka VET Energy PECVD e whai ake nei:
▪Teitei o te parakore:he tino iti te ihirangi poke, kia kore ai e poke te kiriata, kia pai ai te kounga o te kiriata.
▪Teitei o te mātotoru:he kiato teitei, he kaha ā-mīhini teitei, ka taea te tu atu i te pāmahana teitei me te pehanga teitei o te taiao PECVD.
▪Te pumau o ngā āhuatanga:ngā whakarerekētanga iti o te āhua i te pāmahana tiketike hei whakarite i te pumau o te tukanga.
▪Te kawe wera tino pai:ka whakawhiti pai i te wera hei ārai i te wera nui o te wafer.
▪Te ātete kaha ki te waikura:Ka taea te ātete ki te horo o ngā hau waikura me te plasma.
▪Ratonga ritenga:Ka taea te whakarite i ngā tēpu tautoko graphite o ngā rahi me ngā āhua rerekē kia rite ki ngā hiahia o te kiritaki.
Rauemi karāpiti mai i SGL:
| Tawhā noa: R6510 | |||
| Rārangi | Paerewa whakamātautau | Uara | Wāhanga |
| Rahi witi toharite | ISO 13320 | 10 | µm |
| Kīanga papatipu | DIN IEC 60413/204 | 1.83 | karamu/henitimi3 |
| Pūngao tuwhera | DIN66133 | 10 | % |
| Rahi waenga o ngā pūwero | DIN66133 | 1.8 | µm |
| Āheitanga uruhanga | DIN 51935 | 0.06 | henimita/hekona |
| Te pakeketanga o Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Ātete hiko motuhake | DIN IEC 60413/402 | 13 | μΩm |
| Kaha piko | DIN IEC 60413/501 | 60 | MPa |
| Kaha pēhanga | DIN 51910 | 130 | MPa |
| Te modulus a Young | DIN 51915 | 11.5×10³ | MPa |
| Te whakawhanuitanga wera (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Te kawe wera (20℃) | DIN 51908 | 105 | Wm-1K-1 |
He mea hanga motuhake mō te hanga pūtau pūngao rā tino whai hua, hei tautoko i te tukatuka angiangi rahi G12. Mā te hoahoa kawe kua arotauhia ka nui ake te kaha whakaputa, ka taea ai te piki ake o ngā reiti hua me te whakaiti i ngā utu whakaputa.
| Taonga | Momo | Kaikawe tau wafer |
| Waka Grephite PEVCD - Te raupapa 156 | 156-13 poti grephite | 144 |
| 156-19 poti grephite | 216 | |
| 156-21 poti grephite | 240 | |
| 156-23 poti karāhe | 308 | |
| Waka Grephite PEVCD - Te raupapa 125 | Waka grephite 125-15 | 196 |
| 125-19 poti grephite | 252 | |
| 125-21 poti graphite | 280 |
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