Usoro nhazi ntụ ntụ SiC dị elu

N'ime usoro uto kristal silicon carbide otu, mbufe uzuoku anụ ahụ bụ usoro mmepụta ihe a na-ahụkarị ugbu a. Maka usoro uto PVT,ntụ ntụ silicon carbidenwere nnukwu mmetụta na usoro uto.ntụ ntụ silicon carbidena-emetụta kpọmkwem mma nke uto kristal otu na ihe onwunwe eletriki. N'ọrụ ụlọ ọrụ mmepụta ihe ugbu a, a na-ejikarị ya eme ihe n'ọtụtụ ebe.ntụ ntụ silicon carbideusoro mmepụta ihe bụ usoro mmepụta ihe nke na-agbasa onwe ya n'okpomọkụ dị elu.
Usoro njikọta okpomọkụ dị elu nke na-agbasa onwe ya na-eji okpomọkụ dị elu iji nye ndị na-emegharị ahụ okpomọkụ mbụ iji malite mmeghachi omume kemịkalụ, wee jiri okpomọkụ mmeghachi omume kemịkalụ nke ya mee ka ihe ndị na-anaghị emegharị ahụ nọgide na-emezu mmeghachi omume kemịkalụ ahụ. Agbanyeghị, ebe ọ bụ na mmeghachi omume kemịkalụ nke Si na C na-ewepụta obere okpomọkụ, a ga-agbakwunye ndị na-emegharị ahụ ndị ọzọ iji nọgide na-enwe mmeghachi omume ahụ. Ya mere, ọtụtụ ndị ọkà mmụta atụpụtala ụzọ njikọta onwe ka mma na ndabere a, na-ewebata onye na-eme ka ihe rụọ ọrụ. Usoro mgbasa onwe dị mfe itinye n'ọrụ, yana paramita njikọta dị iche iche dị mfe ijikwa nke ọma. Nhazi buru ibu na-egbo mkpa nke mmepụta ihe.

Malite na 1999, Bridgeport jiri usoro mmepụta okpomọkụ dị elu nke na-agbasa onwe ya mee ihe iji mepụtaNtụ ntụ SiC, mana o jiri ethoxysilane na phenol resin mee ihe dị ka ihe eji emepụta ihe, nke dị oke ọnụ. Gao Pan na ndị ọzọ jiri ntụ Si dị ọcha na ntụ C mee ihe dị ka ihe eji emepụta ihe.Ntụ ntụ SiCsite na mmeghachi omume okpomọkụ dị elu n'ime ikuku argon. Ning Lina kwadebere nnukwu mkpụrụ ndụ ihe nketaNtụ ntụ SiCsite na njikọta nke abụọ.

Ọkụ ọkụ ọkụ induction nke etiti ugboro ugboro nke Second Research Institute of China Electronics Technology Group Corporation mepụtara na-agwakọta ntụ ntụ silicon na ntụ ntụ carbon n'otu aka ahụ na stoichiometric ratio ma tinye ha na grafite crucible.ihe mkpuchi graphiteA na-etinye ya n'ime ọkụ ọkụ induction ugboro ole na ole maka ikpo ọkụ, a na-ejikwa mgbanwe okpomọkụ emepụta ma gbanwee usoro okpomọkụ dị ala na usoro okpomọkụ dị elu nke silicon carbide n'otu n'otu. Ebe ọ bụ na okpomọkụ nke mmeghachi omume mmepụta β-SiC n'usoro okpomọkụ dị ala karịa okpomọkụ volatilization nke Si, njikọta nke β-SiC n'okpuru oghere dị elu nwere ike ijide n'aka na mgbasa onwe onye. Usoro nke itinye argon, hydrogen na HCl gas na njikọta nke α-SiC na-egbochi mmebi nkeNtụ ntụ SiCn'oge okpomọkụ dị elu, ọ nwekwara ike ibelata ọdịnaya nitrogen dị na ntụ α-SiC nke ọma.

Shandong Tianyue mepụtara ebe a na-eme ka ọkụ sinetị dị, jiri silane gas mee ihe dị ka silicon raw ma jiri ntụ ntụ carbon mee ihe dị ka carbon raw material. E jiri usoro nhazi nzọụkwụ abụọ gbanwee ọnụọgụ gas e tinyere n'ime ihe ndị a, nha mkpụrụ silicon carbide ikpeazụ e tinyere n'ime ihe ndị a dịkwa n'etiti 50 na 5,000 um.

 

1 Ihe njikwa nke usoro mmepụta ntụ ntụ

 

1.1 Mmetụta nke nha ntụ ntụ na uto kristal

Nha nke ntụ silicon carbide nwere mmetụta dị oke mkpa na uto kristal otu na-esote. A na-enweta uto nke kristal otu SiC site na usoro PVT site na ịgbanwe oke molar nke silicon na carbon na akụkụ gas, oke molar nke silicon na carbon na akụkụ gas metụtara nha nke ntụ silicon carbide. Nrụgide zuru oke na oke silicon-carbon nke sistemụ uto na-abawanye ka mbelata nke nha nke ihe. Mgbe nha nke ihe ahụ belatara site na 2-3 mm ruo 0.06 mm, oke silicon-carbon na-abawanye site na 1.3 ruo 4.0. Mgbe ihe ndị ahụ dị obere ruo n'ókè ụfọdụ, nrụgide akụkụ Si na-abawanye, a na-emepụta oyi akwa nke ihe nkiri Si n'elu kristal na-eto eto, na-akpali uto gas-mmiri-siri ike, nke na-emetụta polymorphism, ntụpọ isi na ntụpọ ahịrị na kristal. Ya mere, a ga-achịkwa nha nke ntụ silicon carbide dị ọcha nke ọma.

Tinyere nke ahụ, mgbe nha nke ntụ ntụ SiC dị obere, ntụ ntụ ahụ na-agbaze ngwa ngwa, na-ebute oke mmụba nke kristal otu SiC. N'otu aka, n'ọnọdụ okpomọkụ dị elu nke uto kristal otu SiC, a na-eme usoro abụọ nke njikọta na mmebi n'otu oge. Ntụ ntụ silicon carbide ga-agbaze ma mepụta carbon n'oge gas na usoro siri ike dịka Si, Si2C, SiC2, nke na-ebute nnukwu carbonization nke ntụ ntụ polycrystalline na ịmepụta carbon inclusions na kristal; n'aka nke ọzọ, mgbe ọnụego mmebi nke ntụ ntụ ahụ dị ngwa ngwa, nhazi kristal nke kristal otu SiC toro eto na-agbanwekarị, na-eme ka ọ sie ike ijikwa ịdị mma nke kristal otu SiC toro eto.

 

1.2 Mmetụta nke ụdị kristal ntụ ntụ na uto kristal

Mmụba nke kristal otu SiC site na usoro PVT bụ usoro sublimation-recrystallization na okpomọkụ dị elu. Ụdị kristal nke ihe eji emepụta SiC nwere mmetụta dị mkpa na uto kristal. N'usoro mmepụta ntụ ntụ, a ga-emepụta usoro mmepụta okpomọkụ dị ala (β-SiC) nke nwere usoro kubik nke sel otu na usoro mmepụta okpomọkụ dị elu (α-SiC) nke nwere usoro hexagonal nke sel otu. E nwere ọtụtụ ụdị kristal silicon carbide na oke njikwa okpomọkụ dị warara. Dịka ọmụmaatụ, 3C-SiC ga-agbanwe ka ọ bụrụ polymorph silicon carbide hexagonal, ya bụ 4H/6H-SiC, na okpomọkụ karịrị 1900°C.

N'oge usoro uto kristal otu, mgbe ejiri ntụ β-SiC kụọ kristal, oke molar silicon-carbon karịrị 5.5, ebe mgbe ejiri ntụ α-SiC kụọ kristal, oke molar silicon-carbon bụ 1.2. Mgbe okpomọkụ rịrị elu, mgbanwe nkebi na-eme na crucible. N'oge a, oke molar na usoro gas na-abawanye ibu, nke na-adịghị akwalite uto kristal. Na mgbakwunye, ihe ndị ọzọ na-adịghị ọcha nke usoro gas, gụnyere carbon, silicon, na silicon dioxide, na-apụta ngwa ngwa n'oge usoro mgbanwe nkebi. Ọnụnọ nke ihe ndị a na-adịghị ọcha na-eme ka kristal ahụ mụta obere tubes na oghere. Ya mere, a ghaghị ijikwa ụdị kristal ntụ ntụ ahụ nke ọma.

 

1.3 Mmetụta nke ihe ndị na-adịghị ọcha na ntụ ntụ na uto kristal

Ọdịnaya adịghị ọcha dị na ntụ SiC na-emetụta nuklita ahụ n'oge uto kristal. Ka ọdịnaya adịghị ọcha ahụ dị elu, otú ahụ ka ọ na-ebelata ohere na kristal ahụ ga-agbanwe nuklita ahụ ozugbo. Maka SiC, ihe ndị na-adịghị ọcha dị na ígwè bụ isi gụnyere B, Al, V, na Ni, nke enwere ike itinye site na ngwaọrụ nhazi n'oge nhazi ntụ silicon na ntụ carbon. N'ime ha, B na Al bụ ihe ndị na-adịghị ọcha dị na ọkwa ike dị ala na SiC, nke na-ebute mbelata na nguzogide SiC. Ihe ndị ọzọ na-adịghị ọcha dị na ígwè ga-ewebata ọtụtụ ọkwa ike, na-ebute ihe ndị na-adịghị ike nke kristal otu SiC na okpomọkụ dị elu, ma nwee mmetụta ka ukwuu na ihe ndị na-emepụta eletriki nke ihe ndị na-eme ka kristal dị ọcha dị elu, karịsịa nguzogide. Ya mere, a ga-emepụta ntụ silicon carbide dị elu dị ka o kwere mee.

 

1.4 Mmetụta nke ọdịnaya nitrogen na ntụ ntụ na uto kristal

Ọkwa nke ọdịnaya nitrogen na-ekpebi ike iguzogide nke otu kristal. Ndị nrụpụta dị mkpa kwesịrị ịgbanwe ntinye nitrogen na ihe e ji emepụta ihe dịka usoro uto kristal siri dị n'oge mmepụta ntụ ntụ si dị. Ihe mkpuchi silicon carbide nke nwere ọkara-mkpuchi dị elu bụ ihe kacha mma maka ihe ndị agha na-emepụta ihe. Iji mepụta ihe mkpuchi kristal nke nwere ọkara-mkpuchi dị elu nke nwere nnukwu ike iguzogide na ihe onwunwe eletriki dị mma, a ga-achịkwa ọdịnaya nke nitrogen na-adịghị ọcha dị na substrate ahụ na ọkwa dị ala. Ihe mkpuchi kristal nke nwere otu kristal na-eduzi chọrọ ka a chịkwaa ọdịnaya nitrogen na oke ike.

 

2 Teknụzụ njikwa isi maka mmepụta ntụ ntụ

N'ihi ọdịdị dị iche iche nke ihe ndị e ji silicon carbide mee, teknụzụ mmepụta maka ntụ ntụ uto nwekwara usoro dị iche iche. Maka ntụ ntụ uto kristal nke ụdị N-type conductive, ịdị ọcha dị elu na otu usoro dị mkpa; ebe maka ntụ ntụ uto kristal nke ọkara-mkpuchi, achọrọ njikwa siri ike nke ọdịnaya nitrogen.

 

2.1 Njikwa nha ntụ ntụ

2.1.1 Okpomọkụ njikọta

N'agbanyeghị mgbanwe ọnọdụ usoro ndị ọzọ, a nwalere ma nyochaa ntụ ntụ SiC e mepụtara na okpomọkụ mmepụta nke 1900 ℃, 2000 ℃, 2100 ℃, na 2200 ℃. Dịka egosiri na Foto 1, a pụrụ ịhụ na nha mkpụrụ ahụ bụ 250 ~ 600 μm na 1900 ℃, nha mkpụrụ ahụ na-abawanye ruo 600 ~ 850 μm na 2000 ℃, nha mkpụrụ ahụ na-agbanwekwa nke ukwuu. Mgbe okpomọkụ na-aga n'ihu na-arị elu ruo 2100 ℃, nha mkpụrụ nke ntụ SiC bụ 850 ~ 2360 μm, mmụba ahụ na-adịkarịkwa nro. Nha mkpụrụ nke SiC na 2200 ℃ kwụsiri ike na ihe dị ka 2360 μm. Mmụba na okpomọkụ mmepụta site na 1900 ℃ nwere mmetụta dị mma na nha mkpụrụ SiC. Mgbe okpomọkụ mmepụta ahụ na-aga n'ihu na-abawanye site na 2100 ℃, nha mkpụrụ ahụ anaghịzi agbanwe nke ukwuu. Ya mere, mgbe a na-ahazi okpomọkụ mmepụta ahụ na 2100 ℃, enwere ike ịmepụta nnukwu nha ihe na obere oriri ike.

 

2.1.2 Oge nhazi

Ọnọdụ usoro ndị ọzọ anaghị agbanwe agbanwe, a na-ahazikwa oge mmepụta ahụ ka ọ bụrụ awa 4, awa 8, na awa 12 n'otu n'otu. E gosiri nyocha ihe nlele ntụ ntụ SiC emepụtara na Foto nke 2. Achọpụtara na oge mmepụta ahụ nwere mmetụta dị ukwuu na nha mkpụrụ nke SiC. Mgbe oge mmepụta ahụ bụ awa 4, a na-ekesakarị nha mkpụrụ ahụ na 200 μm; mgbe oge mmepụta ahụ bụ awa 8, nha mkpụrụ ahụ emepụtara na-abawanye nke ukwuu, nke a na-ekesakarị na ihe dị ka 1 000 μm; ka oge mmepụta ahụ na-aga n'ihu na-abawanye, nha mkpụrụ ahụ na-abawanye, nke a na-ekesakarị na ihe dị ka 2 000 μm.

 

2.1.3 Mmetụta nke nha ihe ndị e ji ihe rụọ

Ka usoro mmepụta ihe silicon dị n'ime ụlọ na-akawanye mma, ịdị ọcha nke ihe silicon na-akawanye mma. Ugbu a, ihe silicon eji eme ihe na njikọta bụ nkewa n'ime silikọn granular na silikọn ntụ ntụ, dịka egosiri na Foto nke 3.

E jiri ihe ndị e ji silicon mee ihe dị iche iche iji mee nnwale mmepụta silicon carbide. E gosiri ntụnyere nke ngwaahịa ndị e ji silicon mee na Foto nke 4. Nyocha na-egosi na mgbe a na-eji ihe ndị e ji silicon mee ihe, ọtụtụ ihe ndị e ji Si mee dị na ngwaahịa ahụ. Mgbe a gwepịachara ihe ndị e ji silicon mee nke ugboro abụọ, ihe Si dị na ngwaahịa ahụ na-ebelata nke ukwuu, mana ọ ka dị. N'ikpeazụ, a na-eji ntụ silicon mee ihe maka mmepụta, naanị SiC dị na ngwaahịa ahụ. Nke a bụ n'ihi na n'usoro mmepụta, silicon granular buru ibu kwesịrị ibu ụzọ mee mmeghachi omume mmepụta elu, a na-emepụtakwa silicon carbide n'elu, nke na-egbochi ntụ Si dị n'ime ka ọ ghara ijikọ ọzọ na ntụ C. Ya mere, ọ bụrụ na ejiri silicon dị ka ihe e ji silicon mee ihe, ọ dị mkpa ka a gwepịa ya wee tinye ya n'usoro mmepụta nke abụọ iji nweta ntụ silicon carbide maka uto kristal.

 

2.2 Njikwa ụdị kristal ntụ ntụ

 

2.2.1 Mmetụta nke okpomọkụ mmepụta

Ijigide ọnọdụ usoro ndị ọzọ agbanweghị agbanwe, okpomọkụ njikọta bụ 1500℃, 1700℃, 1900℃, na 2100℃, a na-enyocha ma nyochaa ntụ ntụ SiC emepụtara. Dịka egosiri na Foto nke 5, β-SiC bụ odo odo nke ụwa, α-SiC dịkwa mfe karịa. Site n'ileba anya na agba na ọdịdị nke ntụ ntụ emepụtara, enwere ike ịchọpụta na ngwaahịa emepụtara bụ β-SiC na okpomọkụ nke 1500℃ na 1700℃. Na 1900℃, agba ahụ na-adị mfe, mkpụrụ hexagonal apụtakwa, na-egosi na mgbe okpomọkụ rịgoro ruo 1900℃, mgbanwe nkebi na-eme, a na-agbanwekwa akụkụ nke β-SiC ka ọ bụrụ α-SiC; mgbe okpomọkụ na-aga n'ihu na-arị elu ruo 2100℃, a chọpụtara na mkpụrụ ndị emepụtara bụ ihe doro anya, α-SiC agbanweela n'ụzọ bụ isi.

 

2.2.2 Mmetụta nke oge mmepụta ihe

Ọnọdụ usoro ndị ọzọ anaghị agbanwe agbanwe, a na-ahazikwa oge mmepụta ahụ ka ọ bụrụ awa 4, awa 8, na awa 12, n'otu n'otu. A na-enyocha ma nyochaa ntụ ntụ SiC emepụtara site na diffractometer (XRD). A na-egosi nsonaazụ ya na Foto nke 6. Oge mmepụta ahụ nwere mmetụta ụfọdụ na ngwaahịa nke ntụ ntụ SiC mepụtara. Mgbe oge mmepụta ahụ bụ awa 4 na awa 8, ngwaahịa mmepụta ahụ bụkarị 6H-SiC; mgbe oge mmepụta ahụ bụ awa 12, 15R-SiC pụtara na ngwaahịa ahụ.

 

2.2.3 Mmetụta nke oke ihe eji arụ ọrụ

Usoro ndị ọzọ anaghị agbanwe agbanwe, a na-enyocha ọnụọgụ ihe silicon-carbon, oke ha dịkwa 1.00, 1.05, 1.10 na 1.15 n'otu n'otu maka nnwale njikọta. E gosiri nsonaazụ ya na Foto 7.

Site na XRD spectrum, a pụrụ ịhụ na mgbe oke silicon-carbon karịrị 1.05, oke Si na-apụta na ngwaahịa ahụ, na mgbe oke silicon-carbon erughị 1.05, oke C na-apụta. Mgbe oke silicon-carbon bụ 1.05, a na-ewepụ carbon efu dị na ngwaahịa sịntetik ahụ, ọ dịghịkwa silicon efu apụta. Ya mere, oke ego nke oke silicon-carbon kwesịrị ịbụ 1.05 iji mepụta SiC dị ọcha.

 

2.3 Njikwa obere nitrogen dị na ntụ

2.3.1 Ihe eji emepụta ihe

Ihe eji eme ihe n'ule a bụ ntụ ntụ carbon dị elu na ntụ silicon dị elu nke nwere dayameta etiti nke 20 μm. N'ihi obere nha ha na nnukwu mpaghara elu kpọmkwem, ha dị mfe ịmịkọrọ N2 n'ikuku. Mgbe ha na-emepụta ntụ ntụ ahụ, a ga-ewebata ya n'ụdị kristal nke ntụ ahụ. Maka uto nke kristal ụdị N, ntinye N2 na-adịghị mma na ntụ ahụ na-eduga na iguzogide kristal na ọbụna mgbanwe na ụdị kristal. Ọdịnaya nitrogen nke ntụ ahụ a na-emepụta mgbe etinyere hydrogen dị obere nke ukwuu. Nke a bụ n'ihi na olu nke molekul hydrogen dị obere. Mgbe a na-ekpo ọkụ ma gbazee N2 n'ime ntụ carbon na ntụ silicon site n'elu, H2 na-agbasa nke ọma n'ime oghere dị n'etiti ntụ ntụ ahụ na obere olu ya, na-anọchi ọnọdụ nke N2, N2 na-agbapụkwa site na crucible n'oge usoro vacuum, na-emezu ebumnuche nke iwepụ ọdịnaya nitrogen.

 

2.3.2 Usoro nhazi

N'oge mmepụta nke ntụ silicon carbide, ebe ọ bụ na radius nke atọm carbon na atọm nitrogen yiri nke ahụ, nitrogen ga-anọchi oghere carbon dị na silicon carbide, si otú a na-eme ka ọdịnaya nitrogen dịkwuo elu. Usoro nnwale a na-anabata ụzọ nke itinye H2, H2 na-emekwaghachi omume na ihe carbon na silicon dị na njikọ crucible iji mepụta gas C2H2, C2H, na SiH. Ọdịnaya nke ihe carbon na-abawanye site na nnyefe nke usoro gas, si otú a na-ebelata oghere carbon. Ebumnuche nke iwepụ nitrogen ga-emezu.

 

2.3.3 Njikwa ọdịnaya nitrogen ndabere usoro

Enwere ike iji grafiti crucibles nwere nnukwu porosity dị ka isi iyi C ọzọ iji nabata uzuoku Si na akụkụ nke gas, belata Si na akụkụ nke gas, wee si otú a mee ka C/Si dịkwuo elu. N'otu oge ahụ, grafiti crucibles nwekwara ike imeghachi omume na ikuku Si iji mepụta Si2C, SiC2 na SiC, nke hà nhata na ikuku Si na-eweta isi iyi C site na graphite crucible na ikuku uto, na-amụba oke C, ma na-amụba oke carbon-silicon. Ya mere, enwere ike ịbawanye oke carbon-silicon site na iji grafiti crucibles nwere nnukwu porosity, na-ebelata oghere carbon, na imezu ebumnuche nke iwepụ nitrogen.

 

3 Nyocha na nhazi nke usoro mmepụta ntụ ntụ kristal otu

 

3.1 Ụkpụrụ na nhazi nke usoro mmepụta ihe

Site na nnyocha zuru oke nke e kwuru n'elu gbasara njikwa nha nke ihe ndị dị n'ime ya, ụdị kristal na ọdịnaya nitrogen nke ntụ ntụ ahụ, a na-atụ aro usoro mmepụta. A na-ahọrọ ntụ ntụ C dị ọcha na ntụ Si, a na-agwakọta ha nke ọma ma tinye ha n'ime griitị graphite dịka nha silicon-carbon nke 1.05 si dị. A na-ekewa usoro usoro ahụ n'ime usoro anọ:
1) Usoro denitrification dị ala, iji vacuum mee ka ọ dị 5 × 10-4 Pa, wee tinye hydrogen, mee ka nrụgide nke ụlọ ahụ dị ihe dị ka 80 kPa, na-adịgide ruo nkeji iri na ise, ma na-emegharị ugboro anọ. Usoro a nwere ike iwepụ ihe ndị dị na nitrogen n'elu ntụ ntụ carbon na ntụ silicon.
2) Usoro denitrification dị elu, ịchacha ihe ruru 5 × 10-4 Pa, wee kpoo ọkụ ruo 950 ℃, wee tinye hydrogen, mee ka nrụgide nke ụlọ ahụ dị ihe dị ka 80 kPa, na-adịgide ruo nkeji iri na ise, ma na-emegharị ugboro anọ. Usoro a nwere ike iwepụ ihe ndị dị na nitrogen n'elu ntụ ntụ carbon na ntụ silicon, ma na-akwali nitrogen n'ọhịa okpomọkụ.
3) Nhazi nke usoro okpomọkụ dị ala, gbapụ gaa na 5 × 10-4 Pa, wee kpoo ọkụ ruo 1350℃, debe ya ruo awa 12, wee tinye hydrogen iji mee ka nrụgide ụlọ ahụ dị ihe dị ka 80 kPa, debe ya ruo otu awa. Usoro a nwere ike iwepụ nitrogen gbawara agbawa n'oge usoro mmepụta.
4) Nhazi nke usoro okpomọkụ dị elu, jupụta na oke mmiri gas nke dị ọcha nke hydrogen na gas agwakọtara argon, mee ka nrụgide ụlọ ahụ dị ihe dị ka 80 kPa, bulie okpomọkụ ahụ ruo 2100℃, debe ya ruo awa 10. Usoro a na-emecha mgbanwe nke ntụ silicon carbide site na β-SiC gaa na α-SiC ma mezue uto nke ihe kristal.
N'ikpeazụ, chere ka okpomọkụ ụlọ ahụ jụọ oyi ruo mgbe okpomọkụ ụlọ ahụ dị, jupụta ya ruo mgbe ikuku dị, wee wepụ ntụ ntụ ahụ.

 

3.2 Usoro nhazi ntụ ntụ

Mgbe emechara ntụ ntụ ahụ site na usoro dị n'elu, a ga-eme ya mgbe e mechara iji wepụ ihe ndị na-adịghị ọcha na carbon, silicon na ihe ndị ọzọ dị na ígwè ma kpuchie nha ihe ndị ahụ. Nke mbụ, a na-etinye ntụ ntụ a na-emepụta n'ime igwe ihe eji egwuri egwu maka ịpịpịa, a na-etinyekwa ntụ ntụ silicon carbide a gwepịara egwepịa n'ime ọkụ muffle ma kpoo ya ọkụ ruo 450°C site na oxygen. A na-eme ka carbon efu dị na ntụ ahụ dị oxidize site na okpomọkụ iji mepụta gas carbon dioxide nke na-apụ na ụlọ ahụ, si otú a na-enweta mwepụ nke carbon efu. Mgbe nke ahụ gasịrị, a na-akwadebe mmiri nhicha acidic ma tinye ya n'ime igwe nhicha ihe ndị na-eme ka silicon carbide dị ọcha maka nhicha iji wepụ ihe ndị na-adịghị ọcha na ígwè ndị na-eme n'oge usoro mmepụta. Mgbe nke ahụ gasịrị, a na-asa acid fọdụrụ na mmiri dị ọcha ma kpọọ nkụ. A na-enyocha ntụ ntụ kpọrọ nkụ na ihuenyo na-ama jijiji maka nhọrọ nha ihe maka uto kristal.