I roto i te tukanga tipu tioata kotahi o te silicon carbide, ko te kawe kohu ā-tinana te tikanga ahumahi matua o nāianei. Mō te tikanga tipu PVT,paura karawiti siliconhe nui te awe ki te tukanga tipu. Ngā tawhā katoa opaura karawiti siliconka pā tika ki te kounga o te tipu tioata kotahi me ngā āhuatanga hiko. I roto i ngā tono ahumahi o nāianei, ko te mea e whakamahia whānuitia anapaura karawiti siliconKo te tukanga hanga he tikanga hanga pāmahana-tiketike e horapa ana i a ia anō.
Ko te tikanga hanga pāmahana-tiketike e whakatōtō ana i a ia anō ka whakamahi i te pāmahana teitei hei hoatu i te wera tuatahi ki ngā matū tauhohe hei tīmata i ngā tauhohenga matū, kātahi ka whakamahi i tōna ake wera tauhohenga matū hei tuku i ngā matū kāore i tauhohe kia haere tonu ki te whakaoti i te tauhohenga matū. Heoi, nā te mea he iti ake te wera e tukuna ana e te tauhohenga matū o te Si me te C, me tāpiri atu ētahi atu matū tauhohenga hei pupuri i te tauhohenga. Nō reira, he maha ngā tohunga kua whakaaro i tētahi tikanga hanga-tiketike kua whakapai ake i runga i tēnei kaupapa, mā te whakauru i tētahi kaiwhakaoho. He ngāwari noa te whakatinana i te tikanga whakatōtō-tiketike, ā, he ngāwari te whakahaere pumau i ngā tawhā hanga maha. Ka tutuki i te hanga-nui ngā hiahia o te ahumahi.
I te tau 1999 anō, i whakamahia e Bridgeport te tikanga whakaputa pāmahana-tiketike e horapa ana ki a ia anō hei whakaputaPaura SiC, engari i whakamahia te ethoxysilane me te phenol resin hei rauemi mata, he utu nui. I whakamahia e Gao Pan me ētahi atu te paura Si tino parakore me te paura C hei rauemi mata hei hangaPaura SiCmā te tauhohenga pāmahana teitei i roto i te hau argon. I whakaritea e Ning Lina he matūriki nuiPaura SiCmā te hanga tuarua.
Ko te oumu whakamahana arataki auau-waenga i whakawhanakehia e te Second Research Institute of China Electronics Technology Group Corporation ka whakaranua kia ōrite te paura silicon me te paura waro i roto i te ōwehenga stoichiometric, ā, ka whakanohoia ki roto i te oko karapiti. Ko teoko paraiheka whakanohoia ki roto i te oumu whakamahana aukume reo-waenga hei whakamahana, ā, ka whakamahia te huringa pāmahana hei hanga me te whakaputa i te hau silicon carbide pāmahana-iti me te pāmahana-tiketike. Nā te mea he iti iho te pāmahana o te tauhohenga hanga β-SiC i te pāmahana-iti i te pāmahana whakakorikori o Si, ka taea e te hanga o te β-SiC i raro i te korehau teitei te whakarite i te horapa-ake. Mā te tikanga whakauru i te hau argon, te hauwai me te HCl ki te hanga o te α-SiC ka ārai i te pirau oPaura SiCi te wāhanga pāmahana teitei, ā, ka taea te whakaiti i te ihirangi hauota i roto i te paura α-SiC.
I hangaia e Shandong Tianyue tētahi oumu whakahiato, mā te whakamahi i te hau silane hei rauemi mata o te silicon me te paura waro hei rauemi mata o te waro. I whakatikatikaina te nui o te hau rauemi mata i whakaurua mā te tikanga whakahiato e rua ngā taahiraa, ā, ko te rahi o te matūriki silicon carbide whakamutunga i hangaia i waenga i te 50 me te 5 000 um.
1 Ngā āhuatanga whakahaere o te tukanga hanga paura
1.1 Te pānga o te rahi o te matūriki paura ki te tipu o te tioata
He tino pānga nui te rahi o te matūriki o te paura silicon carbide ki te tipu o te tioata kotahi e whai ake nei. Ko te tipu o te tioata kotahi SiC mā te tikanga PVT ka tutukihia mā te whakarerekē i te ōwehenga molar o te silicon me te waro i roto i te wāhanga hau, ā, ko te ōwehenga molar o te silicon me te waro i roto i te wāhanga hau e pā ana ki te rahi o te matūriki o te paura silicon carbide. Ka piki ake te pēhanga katoa me te ōwehenga silicon-waro o te pūnaha tipu me te hekenga o te rahi o te matūriki. Ina heke te rahi o te matūriki mai i te 2-3 mm ki te 0.06 mm, ka piki ake te ōwehenga silicon-waro mai i te 1.3 ki te 4.0. Ina iti ngā matūriki ki tētahi taumata, ka piki ake te pēhanga wāhanga Si, ā, ka hangaia he paparanga kiriata Si ki runga i te mata o te tioata e tipu ana, ka puta te tipu hau-wai-totoka, ka pā ki te polymorphism, ngā hapa ira me ngā hapa rārangi i roto i te tioata. Nō reira, me whakahaere pai te rahi o te matūriki o te paura silicon carbide tino parakore.
Hei tāpiritanga, ina iti te rahi o ngā matūriki paura SiC, ka tere ake te pirau o te paura, ka nui rawa te tipu o ngā tioata takitahi SiC. I tētahi taha, i roto i te taiao pāmahana teitei o te tipu tioata takitahi SiC, ka mahia ngā tukanga e rua o te hanga me te pirau i te wā kotahi. Ka pirau te paura silicon carbide ka hanga waro i roto i te āhua hau me te āhua totoka pērā i te Si, Si2C, SiC2, ka hua ake te whakapūngao nui o te paura polycrystalline me te hanganga o ngā whakaurunga waro i roto i te tioata; i tētahi atu taha, ina tere te pirau o te paura, ka ngāwari te whakarerekē i te hanganga tioata o te tioata takitahi SiC kua whakatipuria, ka uaua ki te whakahaere i te kounga o te tioata takitahi SiC kua whakatipuria.
1.2 Te pānga o te āhua o te tioata paura ki te tipu o te tioata
Ko te tipu o te tioata SiC kotahi mā te tikanga PVT he tukanga whakapūmau-whakapūmau anō i te pāmahana teitei. He pānga nui te āhua tioata o te rauemi mata SiC ki te tipu o te tioata. I roto i te tukanga hanga paura, ko te wāhanga hanga pāmahana-iti (β-SiC) me te hanganga pūtoru o te pūtau kotahi me te wāhanga hanga pāmahana-teitei (α-SiC) me te hanganga hexagonal o te pūtau kotahi ka puta te nuinga. He maha ngā āhua tioata silicon carbide me te awhe whakahaere pāmahana whaiti. Hei tauira, ka huri te 3C-SiC hei polymorph silicon carbide hexagonal, arā, 4H/6H-SiC, i ngā pāmahana neke atu i te 1900°C.
I te wā o te tukanga tipu tioata kotahi, ina whakamahia te paura β-SiC hei whakatipu tioata, ka nui ake te ōwehenga molar silicon-waro i te 5.5, engari ina whakamahia te paura α-SiC hei whakatipu tioata, ko te ōwehenga molar silicon-waro he 1.2. Ina piki te pāmahana, ka puta he whakawhiti āhua i roto i te para. I tēnei wā, ka nui ake te ōwehenga molar i roto i te āhua hau, kāore e pai mō te tipu tioata. Hei tāpiri, ka ngāwari te whakaputa i ētahi atu poke āhua hau, tae atu ki te waro, te silicon, me te silicon dioxide, i roto i te tukanga whakawhiti āhua. Nā te noho mai o ēnei poke ka puta he ngongo iti me he āputaputa i roto i te tioata. Nō reira, me whakahaere tika te āhua o te tioata paura.
1.3 Te pānga o ngā poke paura ki te tipu o te tioata
Ka pā te nui o te paru i roto i te paura SiC ki te whakapūtanga ohorere i te wā e tipu ana te tioata. Ko te nui ake o te paru, ko te iti ake o te tūponotanga ka whakapūtanga ohorere te tioata. Mō te SiC, ko ngā paru konganuku matua ko te B, Al, V, me te Ni, ka uru mai pea ēnei mā ngā taputapu tukatuka i te wā e tukatukahia ana te paura silicon me te paura waro. I roto i ēnei, ko te B me te Al ngā paru matua e tango ana i te taumata pūngao papaku i roto i te SiC, ka heke te ātete SiC. Ka uru mai ētahi atu paru konganuku i ngā taumata pūngao maha, ka hua ake he āhuatanga hiko kore pumau o ngā tioata takitahi SiC i ngā pāmahana teitei, ā, he nui ake te pānga ki ngā āhuatanga hiko o ngā papa tioata takitahi haurua-whakamaroke teitei, inā koa te ātete. Nō reira, me hanga te paura silicon carbide teitei-teitei i te mea ka taea.
1.4 Te pānga o te nui o te hauota i roto i te paura ki te tipu o te tioata
Ko te taumata o te ihirangi hauota e whakatau ana i te ātete o te papa tioata kotahi. Me whakarerekē e ngā kaihanga nui te kukū tāpiri hauota i roto i te rauemi hangai kia rite ki te tukanga tipu tioata pakeke i te wā hanga paura. Ko ngā papa tioata kotahi silicon carbide haurua-whakamaroke teitei te kounga teitei ngā rauemi tino whai hua mō ngā wāhanga hiko matua hōia. Hei whakatipu i ngā papa tioata kotahi haurua-whakamaroke teitei te kounga teitei me te ātete teitei me ngā āhuatanga hiko pai rawa atu, me whakahaere te ihirangi o te hauota poke matua i roto i te papa i te taumata iti. Ko ngā papa tioata kotahi kawe hiko me whakahaere te ihirangi hauota i te kukū teitei.
2 Hangarau whakahaere matua mō te hanga paura
Nā te rerekētanga o ngā taiao whakamahinga o ngā paparanga silicon carbide, he rerekē anō hoki ngā tukanga o te hangarau hanga mō ngā paura tipu. Mō ngā paura tipu tioata kotahi e ārahi ana i te momo-N, me nui te parakore me te wāhanga kotahi; engari mō ngā paura tipu tioata kotahi e ārai-haurua ana, me tino whakahaere te nui o te hauota.
2.1 Te whakahaere i te rahi o te matūriki paura
2.1.1 Te pāmahana hanga
I te pupuri i ngā āhuatanga tukanga kē atu kāore i rerekē, i tangohia ngā tauira me ngā tātaritanga o ngā paura SiC i hangaia i ngā pāmahana hangahanga o te 1900 ℃, 2000 ℃, 2100 ℃, me te 2200 ℃. E ai ki te Pikitia 1, ka kitea ko te rahi o te matūriki he 250~600 μm i te 1900 ℃, ā, ka piki te rahi o te matūriki ki te 600~850 μm i te 2000 ℃, ā, ka tino rerekē te rahi o te matūriki. Ina piki tonu te pāmahana ki te 2100 ℃, ko te rahi o te matūriki o te paura SiC he 850~2360 μm, ā, he ngawari te pikinga. He pumau te rahi o te matūriki o te SiC i te 2200 ℃ i te 2360 μm pea. He pānga pai te pikinga o te pāmahana hangahanga mai i te 1900 ℃ ki te rahi o te matūriki SiC. Ina piki tonu te pāmahana hangahanga mai i te 2100 ℃, kāore e tino rerekē te rahi o te matūriki. Nō reira, ina whakatakotoria te pāmahana whakahiato ki te 2100 ℃, ka taea te whakahiato i tētahi rahi matūriki nui ake me te iti ake o te whakapaunga pūngao.
2.1.2 Te wā hanga
Kāore anō kia rerekē ngā āhuatanga o te tukanga, ā, kua whakaritea te wā hanga ki te 4 hāora, 8 hāora, me te 12 hāora. Kei te Pikitia 2 te tātari tauira paura SiC i hangaia. I kitea he pānga nui tō te wā hanga ki te rahi o te matūriki o te SiC. Ina 4 hāora te wā hanga, ka tohatoha te rahi o te matūriki ki te 200 μm; ina 8 hāora te wā hanga, ka nui haere te rahi o te matūriki hanga, ka tohatoha te nuinga ki te 1 000 μm; i te piki haere tonu o te wā hanga, ka piki haere tonu te rahi o te matūriki, ka tohatoha te nuinga ki te 2 000 μm.
2.1.3 Te awe o te rahi o te matūriki o ngā rauemi mata
I te mea kei te whakapai haeretia te mekameka hanga rauemi silicon ā-rohe, ka whakapaitia anō hoki te parakore o ngā rauemi silicon. I tēnei wā, ko ngā rauemi silicon e whakamahia ana i roto i te hanganga ka wehea te nuinga ki te silicon granular me te silicon paura, e whakaaturia ana i te Pikitia 3.
I whakamahia ngā rauemi mata silicon rerekē hei whakahaere i ngā whakamātautau hanga silicon carbide. Kei te Pikitia 4 te whakataurite i ngā hua hanga. E whakaatu ana te tātaritanga i te whakamahinga o ngā rauemi mata silicon poraka, he nui ngā huānga Si kei roto i te hua. I muri i te kuru tuarua o te poraka silicon, ka tino heke te huānga Si i roto i te hua hanga, engari kei te noho tonu. Hei whakamutunga, ka whakamahia te paura silicon mō te hanga, ā, ko te SiC anake kei roto i te hua. Nā te mea i roto i te tukanga whakaputa, me uru tuatahi te silicon poraka nui ki te tauhohenga hanga mata, ā, ka hangaia te silicon carbide ki runga i te mata, ka ārai i te paura Si o roto kei te hono atu ki te paura C. Nō reira, ki te whakamahia te silicon poraka hei rauemi mata, me kuru, kātahi ka tukuna ki te tukanga hanga tuarua kia whiwhi ai i te paura silicon carbide mō te tipu tioata.
2.2 Te whakahaere i te āhua o te tioata paura
2.2.1 Te awe o te pāmahana whakahiato
Me te pupuri tonu i ngā āhuatanga o te tukanga, ko te pāmahana hanga he 1500℃, 1700℃, 1900℃, me te 2100℃, ā, ka tātaihia te paura SiC kua hangaia, ka tātarihia. E ai ki te Pikitia 5, he kōwhai oneone te β-SiC, ā, he māmā ake te tae o te α-SiC. Mā te tirotiro i te tae me te āhua o te paura kua hangaia, ka taea te whakatau ko te hua kua hangaia he β-SiC i ngā pāmahana o te 1500℃ me te 1700℃. I te 1900℃, ka māmā ake te tae, ā, ka puta mai ngā matūriki hexagonal, e tohu ana i muri i te pikinga o te pāmahana ki te 1900℃, ka puta he whakawhiti āhua, ā, ka hurihia tetahi wāhanga o te β-SiC ki te α-SiC; ina piki tonu te pāmahana ki te 2100℃, ka kitea he mārama ngā matūriki kua hangaia, ā, kua hurihia te α-SiC.
2.2.2 Te pānga o te wā hanga
Kāore anō kia rerekē ngā āhuatanga o ētahi atu tukanga, ā, kua whakaritea te wā hanga ki te 4 hāora, 8 hāora, me te 12 hāora. Ka tangohia he tauira o te paura SiC kua hangaia, ā, ka tātarihia mā te whakamahi i te diffractometer (XRD). Kei te whakaatuhia ngā hua i te Pikitia 6. He pānga motuhake tō te wā hanga ki te hua i hangaia e te paura SiC. Ina 4 hāora me te 8 hāora te wā hanga, ko te hua hanga ko te 6H-SiC te nuinga; ina 12 hāora te wā hanga, ka puta te 15R-SiC i roto i te hua.
2.2.3 Te awe o te ōwehenga rauemi mata
Kāore anō kia rerekē ētahi atu tukanga, ka tātarihia te nui o ngā matū silicon-waro, ā, ko ngā ōwehenga he 1.00, 1.05, 1.10 me te 1.15 mō ngā whakamātautau hanga. Kei te Pikitia 7 ngā hua.
Mai i te whānuitanga XRD, ka kitea ina nui ake te ōwehenga silicon-waro i te 1.05, ka puta te Si nui rawa i roto i te hua, ā, ina iti iho te ōwehenga silicon-waro i te 1.05, ka puta te C nui rawa. Ina 1.05 te ōwehenga silicon-waro, ka ngaro te waro kore utu i roto i te hua hanga, ā, kāore he silicon kore utu e puta. Nō reira, me 1.05 te ōwehenga o te ōwehenga silicon-waro hei hanga i te SiC parakore teitei.
2.3 Te whakahaere i te iti o te hauota i roto i te paura
2.3.1 Ngā rauemi mata hangai
Ko ngā rauemi mata i whakamahia i tēnei whakamātautau ko te paura waro tino parakore me te paura silicon tino parakore me te diameter toharite o te 20 μm. Nā te iti o te rahi o te matūriki me te whānui o te mata motuhake, he ngāwari ki te mimiti i te N2 ki te hau. I te wā e hangaia ana te paura, ka kawea mai ki te āhua tioata o te paura. Mō te tipu o ngā tioata momo-N, ko te tāpiringa kore taurite o te N2 ki roto i te paura ka hua ake he ātete kore taurite o te tioata, tae atu ki ngā huringa o te āhua tioata. He tino iti te ihirangi hauota o te paura i hangaia i muri i te whakaurunga o te hauwai. Nā te mea he iti te rahinga o ngā ngota hauwai. Ina mimitia te N2 e piri ana ki te paura waro me te paura silicon, ka werahia, ka memeha atu i te mata, ka horapa katoa te H2 ki roto i te āputa i waenga i ngā paura me tōna rahinga iti, ka whakakapi i te tūranga o te N2, ā, ka mawhiti te N2 i te para i te wā o te tukanga korehau, ka tutuki ai te kaupapa o te tango i te ihirangi hauota.
2.3.2 Te tukanga hanga
I te wā e hangaia ana te paura silicon carbide, nā te mea he rite te radius o ngā ngota waro me ngā ngota hauota, ka whakakapia e te hauota ngā wāhi waro i roto i te silicon carbide, ā, ka piki ake te ihirangi hauota. Ka whakamahia e tēnei tukanga whakamātautau te tikanga whakauru H2, ā, ka tauhohe te H2 ki ngā huānga waro me te silicon i roto i te ipu hanga hei whakaputa i ngā hau C2H2, C2H, me te SiH. Ka piki ake te ihirangi huānga waro mā te tuku hau, ā, ka whakaitihia ngā wāhi waro. Ka tutuki te kaupapa o te tango hauota.
2.3.3 Te whakahaere i te ihirangi hauota papamuri o te tukanga
Ka taea te whakamahi i ngā ipu karāpiti he nui te porosity hei puna C tāpiri hei mimiti i te kohu Si i roto i ngā wāhanga hau, hei whakaiti i te Si i roto i ngā wāhanga hau, ā, hei whakanui ake i te C/Si. I taua wā anō, ka taea hoki e ngā ipu karāpiti te tauhohe ki te āhuarangi Si hei whakaputa i te Si2C, te SiC2 me te SiC, he rite ki te āhuarangi Si e kawe mai ana i te pūtake C mai i te ipu karāpiti ki te āhuarangi tipu, ka whakanui ake i te ōwehenga C, me te whakanui ake hoki i te ōwehenga waro-silicon. Nō reira, ka taea te whakanui ake i te ōwehenga waro-silicon mā te whakamahi i ngā ipu karāpiti he nui te porosity, te whakaiti i ngā takotoranga waro, me te whakatutuki i te kaupapa o te tango hauota.
3 Te tātari me te hoahoa o te tukanga hanga paura karaihe kotahi
3.1 Te mātāpono me te hoahoa o te tukanga whakahiato
Mā te rangahau whānui kua whakahuatia ake nei mō te whakahaere i te rahi o te matūriki, te āhua tioata me te nui o te hauota o te hanga paura, ka whakaarohia he tukanga hanga. Ka tīpakohia te paura C me te paura Si tino parakore, ā, ka whakaranua kia ōrite, ka utaina ki roto i te ipu karapa i runga i te ōwehenga silicon-waro o te 1.05. E whā ngā wāhanga matua o te tukanga:
1) Te tukanga whakakore i te nitritarization i te pāmahana iti, te whakakore i te hau ki te 5×10-4 Pa, kātahi ka tāpirihia te hauwai, kia tata te pēhanga o te rūma ki te 80 kPa, kia mau tonu mō te 15 meneti, me te whakahoki anō kia whā ngā wā. Ka taea e tēnei tukanga te tango i ngā huānga hauota i runga i te mata o te paura waro me te paura silicon.
2) Te tukanga whakakore i te nitritarization pāmahana teitei, te whakakore i te hau ki te 5×10-4 Pa, kātahi ka whakamahana ki te 950 ℃, kātahi ka tāpirihia te hauwai, kia tata te pēhanga o te rūma ki te 80 kPa, me te pupuri mō te 15 meneti, me te whakahoki anō kia whā ngā wā. Ka taea e tēnei tukanga te tango i ngā huānga hauota i runga i te mata o te paura waro me te paura silicon, me te akiaki i te hauota ki roto i te mara wera.
3) Te hanga i te tukanga pāmahana iti, whakawetohia ki te 5 × 10-4 Pa, kātahi ka whakamahana ki te 1350 ℃, waiho mō ngā haora 12, kātahi ka tāpirihia te hauwai kia eke te pēhanga o te rūma ki te 80 kPa, waiho mō te haora 1. Ka taea e tēnei tukanga te tango i te hauota kua memeha i te wā o te tukanga hanga.
4) Te hanga i tētahi tukanga pāmahana teitei, whakakīia ki tētahi ōwehenga rere o te rōrahi hau o te hauwai parakore teitei me te hau argon kua whakaranua, kia tata ki te 80 kPa te pēhanga o te rūma, kia piki ake te pāmahana ki te 2100℃, kia mau mō ngā hāora 10. Mā tēnei tukanga ka oti te whakawhiti i te paura silicon carbide mai i te β-SiC ki te α-SiC, ā, ka oti te tipu o ngā matūriki tioata.
Hei whakamutunga, tatari kia whakamatao te pāmahana o te rūma ki te pāmahana rūma, whakakīia ki te pēhanga hau, kātahi ka tangohia te paura.
3.2 Te tukanga tukatuka paura
I muri i te hanganga o te paura mā te tukanga o runga ake nei, me tukatukahia i muri mai hei tango i te waro kore utu, te silicon me ētahi atu poke whakarewa, me te tirotiro i te rahi o te matūriki. Tuatahi, ka whakanohoia te paura kua hangaia ki roto i te mira pōro hei kuru, ā, ka whakanohoia te paura silicon carbide kua kuru ki roto i te oumu whakamahana, ka whakamahanahia ki te 450°C mā te hāora. Ka whakahāngaihia te waro kore utu i roto i te paura e te wera hei whakaputa i te hau waro hauhā e puta mai ana i te rūma, ā, ka tutuki te tango i te waro kore utu. Muri iho, ka whakaritea he wai horoi waikawa, ka whakanohoia ki roto i te mīhini horoi matūriki silicon carbide hei horoi hei tango i te waro, te silicon me ngā poke whakarewa toenga i puta i te tukanga hanganga. Whai muri i tēnā, ka horoia te waikawa toenga ki te wai parakore, ā, ka whakamarokehia. Ka tirotirohia te paura maroke ki roto i te mata wiri hei whiriwhiri i te rahi o te matūriki mō te tipu tioata.
Wā tuku: Akuhata-08-2024