A lokacin aikin epitaxy na lokacin tururi (VPE), aikin pedestal shine tallafawa substrate da kuma tabbatar da dumama iri ɗaya yayin tsarin girma. Nau'ikan pedestal daban-daban sun dace da yanayi daban-daban na girma da tsarin kayan aiki. Ga wasu daga cikin nau'ikan pedestal da aka saba amfani da su a lokacin tururi.epitaxi:
Tushen ganga
Ana amfani da ƙafafun ganga a cikin tsarin epitaxy na vapor a kwance ko a karkatar. Suna iya riƙe substrate ɗin kuma su bar iskar gas ta gudana a kan substrate ɗin, wanda ke taimakawa wajen cimma ci gaban epitaxial iri ɗaya.
Tushen tushe mai siffar faifan faifai (tushen tushe a tsaye)
Tudun da ke da siffar faifan diski sun dace da tsarin epitaxy na lokacin tururi mai tsaye, inda aka sanya substrate a tsaye. Wannan ƙirar tana taimakawa wajen rage yankin hulɗa tsakanin substrate da susceptor, ta haka ne rage asarar zafi da kuma yiwuwar gurɓatawa.
Maganin da ke kwance
Ba a cika samun masu hana ci gaban epitaxy a cikin yanayin tururi ba, amma ana iya amfani da su a wasu takamaiman tsarin girma don ba da damar ci gaban epitaxial a cikin alkiblar kwance.
Mai hana ɗaukar hoto na monolithic epitaxial reaction
An tsara na'urar hana ɗaukar hoto ta monolithic epitaxial reaction susceptor don wani abu guda ɗaya, wanda zai iya samar da ingantaccen sarrafa zafin jiki da kuma warewar zafi mafi kyau, wanda ya dace da haɓakar yadudduka masu inganci na epitaxial.
Barka da zuwa shafin yanar gizon mu don samun bayanai game da samfura da shawarwari.
Shafin yanar gizon mu: https://www.vet-china.com/
Lokacin Saƙo: Yuli-30-2024