Nā pedestals i hoʻohana pinepine ʻia no ka epitaxy pae mahu

I ka wā o ke kaʻina hana vapor phase epitaxy (VPE), ʻo ke kuleana o ka pedestal ke kākoʻo i ka substrate a hōʻoia i ka hoʻomehana like ʻana i ka wā o ke kaʻina hana ulu. He kūpono nā ʻano pedestal like ʻole no nā kūlana ulu like ʻole a me nā ʻōnaehana mea. Eia kekahi o nā ʻano pedestal i hoʻohana pinepine ʻia i ka wā vapor phaseepitaxy:

Paepae barela

Hoʻohana pinepine ʻia nā pedestal barela i nā ʻōnaehana epitaxy pae mahu ākea a i ʻole i hoʻohuli ʻia. Hiki iā lākou ke hoʻopaʻa i ka substrate a ʻae i ke kinoea e kahe ma luna o ka substrate, kahi e kōkua ai i ka hoʻokō ʻana i ka ulu like ʻana o ka epitaxial.

Paepae ʻano diski (paepae kū)

He kūpono nā pedestal ʻano disc no nā ʻōnaehana epitaxy pae mahu kū pololei, kahi i kau ʻia ai ke substrate i luna. Kōkua kēia hoʻolālā i ka hōʻemi ʻana i ka wahi pili ma waena o ka substrate a me ka susceptor, a laila e hōʻemi ana i ka nalowale o ka wela a me ka haumia hiki.

Mea hoʻopaʻa pālahalaha

ʻAʻole maʻamau ka hoʻohana ʻana i nā susceptors horizontal i ka vapor phase epitaxy, akā hiki ke hoʻohana ʻia i kekahi mau ʻōnaehana ulu kikoʻī e ʻae i ka ulu ʻana o ka epitaxial i kahi kuhikuhi horizontal.

Mea hoʻopaʻa hopena epitaxial monolithic

Ua hoʻolālā ʻia ka monolithic epitaxial reaction susceptor no kahi substrate hoʻokahi, hiki ke hāʻawi i ka kaohi mahana pololei a me ka hoʻokaʻawale thermal maikaʻi aʻe, kūpono no ka ulu ʻana o nā papa epitaxial kiʻekiʻe.

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