Ma pedestal omwe amagwiritsidwa ntchito kwambiri pa epitaxy ya gawo la nthunzi

Pa nthawi ya nthunzi epitaxy (VPE), ntchito ya pedestal ndikuthandizira substrate ndikuwonetsetsa kuti kutentha kumafanana panthawi ya kukula. Mitundu yosiyanasiyana ya pedestals ndi yoyenera kukula ndi machitidwe osiyanasiyana. Izi ndi zina mwa mitundu ya pedestals yomwe imagwiritsidwa ntchito kwambiri mu nthunzi.epitaxy:

Chopondapo cha mbiya

Ma potenti a mbiya amagwiritsidwa ntchito kwambiri m'machitidwe opingasa kapena opindika a epitaxy. Amatha kugwira substrate ndikulola mpweya kuyenda pamwamba pa substrate, zomwe zimathandiza kuti epitaxial ikule mofanana.

Chopondapo chooneka ngati diski (chopondapo choyimirira)

Ma pedestal okhala ndi mawonekedwe a disc ndi oyenera machitidwe ozungulira a epitaxy, momwe gawo lapansi limayikidwa molunjika. Kapangidwe kameneka kamathandiza kuchepetsa malo olumikizirana pakati pa gawo lapansi ndi cholumikizira, potero kuchepetsa kutaya kutentha ndi kuipitsidwa komwe kungachitike.

Chogwirizira chopingasa

Ma susceptor opingasa sapezeka kawirikawiri mu epitaxy ya nthunzi, koma angagwiritsidwe ntchito m'machitidwe enaake okula kuti alole kukula kwa epitaxial mbali yopingasa.

Choletsa cha epitaxial reaction cha monolithic

Choletsa kutentha cha monolithic epitaxial reaction susceptor chapangidwa kuti chikhale ndi gawo limodzi lokha, lomwe lingapereke kuwongolera kutentha kolondola komanso kudzipatula bwino kwa kutentha, koyenera kukula kwa zigawo zapamwamba za epitaxial.

Takulandirani patsamba lathu kuti mudziwe zambiri za malonda ndi upangiri.

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