Ngesikhathi senqubo yesigaba somusi i-epitaxy (VPE), indima yesisekelo ukusekela isisekelo nokuqinisekisa ukushisa okufanayo ngesikhathi senqubo yokukhula. Izinhlobo ezahlukene zezisekelo zifanele izimo zokukhula ezahlukene kanye nezinhlelo zezinto ezibonakalayo. Okulandelayo ezinye zezinhlobo zezisekelo ezisetshenziswa kakhulu esigabeni somusii-epitaxy:
Isisekelo sebhareli
Izisekelo zemigqomo zivame ukusetshenziswa ezinhlelweni ze-epitaxy zesigaba somphunga ezivundlile noma ezithambekile. Zingabamba i-substrate futhi zivumele igesi ukuthi igeleze phezu kwe-substrate, okusiza ekufinyeleleni ukukhula okufanayo kwe-epitaxial.
Isisekelo esimise okwediski (isisekelo esiqondile)
Izisekelo ezimise okwediski zifanele izinhlelo ze-epitaxy zesigaba somswakama esiqondile, lapho i-substrate ibekwa khona ngokuqondile. Lo mklamo usiza ekunciphiseni indawo yokuxhumana phakathi kwe-substrate ne-susceptor, ngaleyo ndlela kuncishiswe ukulahleka kokushisa kanye nokungcola okungenzeka.
I-susceptor evundlile
Ama-susceptor avundlile awavamile kakhulu kwi-epitaxy yesigaba somswakama, kodwa angasetshenziswa kwezinye izinhlelo ezithile zokukhula ukuze kuvunyelwe ukukhula kwe-epitaxial ohlangothini oluvundlile.
I-Monolithic epitaxial reaction susceptor
I-monolithic epitaxial reaction susceptor yenzelwe i-substrate eyodwa, enganikeza ukulawula izinga lokushisa okunembe kakhudlwana kanye nokuhlukaniswa okungcono kokushisa, okufanelekela ukukhula kwezingqimba ze-epitaxial ezisezingeni eliphezulu.
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Iwebhusayithi yethu: https://www.vet-china.com/
Isikhathi sokuthunyelwe: Julayi-30-2024