Ngexesha lenkqubo yesigaba somphunga i-epitaxy (VPE), indima yesiseko kukuxhasa isiseko kunye nokuqinisekisa ukufudumeza okufanayo ngexesha lenkqubo yokukhula. Iindidi ezahlukeneyo zesiseko zifanelekile kwiimeko ezahlukeneyo zokukhula kunye neenkqubo zezinto eziphathekayo. Ezi zilandelayo zezinye zeentlobo zesiseko ezisetyenziswa rhoqo kwisigaba somphunga.i-epitaxy:
Isiseko seebhareli
Izisekelo zeebhareli zisetyenziswa kakhulu kwiinkqubo ze-epitaxy zesigaba somphunga ezithe tye okanye ezithambekileyo. Zingabamba i-substrate kwaye zivumele igesi ukuba ihambe phezu kwe-substrate, nto leyo enceda ekufezekiseni ukukhula okufanayo kwe-epitaxial.
Isiseko esimile okwediski (isiseko esithe nkqo)
Izisekelo ezimile okwediski zifanelekile kwiinkqubo ze-epitaxy zesigaba somphunga othe nkqo, apho i-substrate ibekwa ngokuthe nkqo. Olu yilo lunceda ekunciphiseni indawo yoqhagamshelwano phakathi kwe-substrate kunye ne-susceptor, ngaloo ndlela kunciphisa ukulahleka kobushushu kunye nongcoliseko olunokubakho.
I-susceptor ethe tye
Ii-susceptors ezithe tye azixhaphakanga kakhulu kwi-vapor phase epitaxy, kodwa zingasetyenziswa kwezinye iinkqubo zokukhula ezithile ukuvumela ukukhula kwe-epitaxial kwicala elithe tye.
I-Monolithic epitaxial reaction susceptor
I-monolithic epitaxial reaction susceptor yenzelwe i-substrate enye, enokubonelela ngolawulo lobushushu oluchanekileyo kunye nokwahlulwa okungcono kobushushu, okufanelekileyo ekukhuleni kwee-epitaxial layers ezikumgangatho ophezulu.
Wamkelekile kwiwebhusayithi yethu ukuze ufumane ulwazi ngemveliso kunye nokubonisana.
Iwebhusayithi yethu: https://www.vet-china.com/
Ixesha leposi: Julayi-30-2024