Inta lagu jiro habka epitaxy-ga wejiga uumiga (VPE), doorka saldhigga waa inuu taageero substrate-ka iyo inuu hubiyo kuleyl isku mid ah inta lagu jiro habka koritaanka. Noocyada kala duwan ee saldhigyada ayaa ku habboon xaaladaha koritaanka iyo nidaamyada walxaha kala duwan. Kuwa soo socda waa qaar ka mid ah noocyada saldhigga ee si caadi ah loo isticmaalo marxaladda uumiga.epitaxi:
Saldhigga foosto
Saldhigyada foosto waxaa badanaa loo isticmaalaa nidaamyada epitaxy-ga ee wejiga toosan ama janjeera. Waxay hayn karaan substrate-ka waxayna u oggolaan karaan gaaska inuu dul maro substrate-ka, kaas oo gacan ka geysta helitaanka korriin isku mid ah oo epitaxial ah.
Saldad qaab saxan ah (saldad toosan)
Saldhigyada qaabaysan ee saxanka ayaa ku habboon nidaamyada epitaxy-ga wejiga toosan ee uumiga, kaas oo substrate-ka si toosan loo dhigo. Naqshaddani waxay gacan ka geysaneysaa yareynta aagga taabashada ee u dhexeeya substrate-ka iyo susceptor-ka, taasoo yareyneysa luminta kulaylka iyo wasakheynta suurtagalka ah.
Suuxdinta toosan
Susceptors-ka toosan kuma badna epitaxy-ga marxaladda uumiga, laakiin waxaa loo isticmaali karaa nidaamyada koritaanka qaarkood si loogu oggolaado koritaanka epitaxial jihada toosan.
Suuxdinta falgalka epitaxial-ka ee monolithic
Susceptor-ka falgalka epitaxial-ka ee monolithic-ka waxaa loogu talagalay hal substrate, kaas oo bixin kara xakamaynta heerkulka saxda ah iyo kala-soocid heerkul oo wanaagsan, oo ku habboon koritaanka lakabka epitaxial-ka tayada sare leh.
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Boggayaga internetka: https://www.vet-china.com/
Waqtiga boostada: Luulyo-30-2024