Munguva yekushandiswa kwechikamu chevapor epitaxy (VPE), basa rechikamu ndechekutsigira chikamu chepor uye kuona kuti chinodziya zvakaenzana panguva yekukura. Mhando dzakasiyana dzezvikamu dzakakodzera mamiriro akasiyana ekukura uye masisitimu ezvinhu. Idzi ndidzo dzimwe dzemhando dzezvikamu dzinoshandiswa zvakanyanya muchikamu chevaporepitaxy:
Chigadziko chebharero
Zvigadziko zvemabharel zvinowanzo shandiswa mumasisitimu epitaxy epitaxy akatambanuka kana kuti akatsveyama. Zvinogona kubata substrate uye kubvumira gasi kuti riyerere pamusoro pe substrate, izvo zvinobatsira kuti epitaxial ikure zvakaenzana.
Chigadziko chakaita sedhisiki (chigadziko chakamira)
Zvigadziko zvakagadzirwa nedhisiki zvakakodzera masisitimu epitaxy epitaxy akamira, umo substrate inoiswa yakamira. Dhizaini iyi inobatsira kuderedza nzvimbo yekubatana pakati pe substrate ne susceptor, nokudaro ichideredza kurasikirwa nekupisa uye kusvibiswa kunogona kuitika.
Chinosimudzira chakarara
Ma "horizontal susceptors" haawanzo kuwanikwa mu "vapor phase epitaxy", asi anogona kushandiswa mune mamwe masisitimu ekukura kuti abvumire kukura kwe "epitaxial" munzira yakatwasuka.
Monolithic epitaxial reaction susceptor
Chinosimudzira kupisa kwe epitaxial reaction chakagadzirwa kuti chive chinhu chimwe chete, chinogona kudzora tembiricha zvakanyatsonaka uye kupatsanurwa kwekupisa kuri nani, zvakakodzera kukura kwe epitaxial layers dzemhando yepamusoro.
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Nguva yekutumira: Chikunguru-30-2024