Nakong ea ts'ebetso ea epitaxy ea mouoane (VPE), karolo ea setebele ke ho tšehetsa substrate le ho netefatsa hore ho futhumatsoa hoa tšoana nakong ea ts'ebetso ea kholo. Mefuta e fapaneng ea lisetebele e loketse maemo a fapaneng a kholo le litsamaiso tsa thepa. Tse latelang ke tse ling tsa mefuta ea lisetebele tse sebelisoang haholo mohatong oa mouoane.epitaxy:
Seteishene sa moqomo
Litšiea tsa libarele li sebelisoa hangata lits'ebetsong tsa epitaxy tsa mouoane tse otlolohileng kapa tse sekameng. Li ka tšoara substrate 'me tsa lumella khase ho phalla holim'a substrate, e leng se thusang ho fihlela kholo e ts'oanang ea epitaxial.
Seteishene se bōpehileng joaloka disk (seteishene se otlolohileng)
Lithako tse bōpehileng joaloka disk li loketse litsamaiso tsa epitaxy tsa mouoane tse otlolohileng, moo substrate e behiloeng ka holimo. Moralo ona o thusa ho fokotsa sebaka sa ho kopana pakeng tsa substrate le susceptor, ka hona ho fokotsa tahlehelo ea mocheso le tšilafalo e ka bang teng.
Sesupa-tsela se otlolohileng
Li-susceptor tse otlolohileng ha li atile haholo ho epitaxy ea mouoane, empa li ka sebelisoa lits'ebetsong tse ling tse itseng tsa kholo ho lumella kholo ea epitaxial ka lehlakoreng le otlolohileng.
Monolithic epitaxial reaction susceptor
Sesupa-tsela sa karabelo ea epitaxial ea monolithic se etselitsoe substrate e le 'ngoe, e ka fanang ka taolo e nepahetseng haholoanyane ea mocheso le ho itšehla thajana hamonate, e loketseng kholo ea likarolo tsa epitaxial tsa boleng bo holimo.
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Nako ea poso: Phupu-30-2024