Mata'utia Porous Ceramic Vacuum Chuck
Porous Ceramic Vacuum Chucko se faʻavae faʻapipiʻiina o loʻo faʻaaogaina le mataupu faavae o le vacuum adsorption e faʻapipiʻi ai mea faigaluega. O le vaega o le vacuum chuck e fa'asalalauina le vacuum o se ipu sima porous. O le ipu sima porous o loʻo faʻapipiʻiina i le pu goto o le faʻavae, ma o lona pito e faʻapipiʻi ma faʻamaufaʻailogaina i le faʻavae. O le fa'avae e faia i mea sa'o sima po'o mea uamea. E ala i le tuʻufaʻatasia o se uʻamea poʻo se sima faʻatasi ma se faʻamea porous faʻapitoa, o le mamanu o le ea saʻo i totonu e mafai ai ona faʻapipiʻi lamolemole ma mautu o le mea faigaluega i le ipu suction vacuum pe a oʻo i le mamafa o le mamafa.
Ona o le sili ona lelei pores i porous ceramics, o le pito i luga o le mea faigaluega e mafai ona pipii atu i le ipu miti miti e aunoa ma ni mea leaga e pei o maosiosia po o tofo e mafua mai le mamafa o le mamafa.
Uiga ole Porous Ceramic Vacuum Chuck:
① Fuafuaga mafiafia ma tutusa: Tetee le pa'u silikoni/oloa otaota adsorption, faigofie ona mama.
② Malosi maualuga & ofuina le tete'e: Leai se deformation a'o olo, fa'aiti'itia pito tipi/vaega.
③ Fa'aumi le ola: Fa'atumauina foliga lelei o luga, ta'amilosaga umi o la'ei ma sina aveese.
④ Insulation maualuga: Fa'ate'aina le eletise.
⑤ Toe fa'aoga & faigofie ona fai: Leai se ta'e/ta'e i le taimi o le toe fa'aluega, e mafai ona toe fa'aoga tele.
⑥ Le pefu & fa'amaumau: Fa'asa'o atoatoa, leai ni mea fa'aoso.
⑦ Māmā: O le fausaga o le paʻu e faʻaitiitia ai le mamafa.
⑧ Tete'e vaila'au: Fa'atonu mo si'osi'omaga pala e ala i mea/fa'atonuga.
Ceramic Vacuum Chuck VS Traditional Metal Suction Cup:
Vacuck vacuck sima i totonu o le fanua semiconductor
E fa'aui ai mea fa'apipi'i ma fe'avea'i mea faigaluega i le gaosiga o le semiconductor wafer. Latou te faʻaalia le maualuga ma le tutusa, o se fausaga mafiafia ma tutusa, maualuga le malosi, lelei le faʻaogaina o le ea, malosi faʻapipiʻi tutusa, ma laei faigofie. O nei uiga e talafeagai mo faiga i le semiconductor wafer gaosiga e pei o le manifinifi, tipi, olo, fufulu, ma le taulimaina. Latou te fa'amalieina lu'itau e pei o le fa'ailoga o le wafer, malepe eletise eletise o tupe meataalo, ma le fa'aleagaina o vaega, ausia ai le maualuga maualuga o le gaosiga o mea'ai mo semiconductor wafers i fa'aoga aoga.
Pepa Fa'amatalaga o Mea Sima
| Aitema | 95% Alumina | 99% Alumina | Zirconia | Silicon carbide | SiliconNalu ese | AluminiNalu ese |
| Lanu | lanu pa'epa'e | Samasama moli | lanu pa'epa'e | lanu uliuli | lanu uliuli | lanu efuefu |
| Malosi (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Suavai | 0% | 0% | 0% | 0% | 0% | 0% |
| Malosi(HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Malosi fa'afoliga (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Malosi fa'amalosi (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Young's Modulus Of Elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Fa'atatau o Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Amioga vevela | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Malosiaga Dielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Tete'e Volume(25℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
VET Energy o se tagata gaosi tomai faʻapitoa e taulaʻi i le R & D ma le gaosiga o mea maualuga maualuga e pei o le graphite, silicon carbide, quartz, faʻapea foʻi ma le togafitiga faʻapitoa e pei o le SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, ma isi.
O la matou 'au fa'atekinisi e sau mai fa'alapotopotoga su'esu'e fa'apitonu'u pito i luga, e mafai ona tu'uina atu fa'afitauli fa'apitoa fa'apitoa mo oe.
VET Malosiaga manuia e aofia ai:
• Lava falegaosimea ma falesuesue fa'apolofesa;
• Tulaga mama ma tulaga lelei e ta'imua i alamanuia;
• Tau fa'atauva'a & Taimi vave tu'uina atu;
• Fa'apa'aga fa'apisinisi tele i le lalolagi atoa;
Matou te faʻafeiloaia oe e asiasi i la matou fale gaosimea ma fale suʻesuʻe i soo se taimi!
