I-Advanced Porous Ceramic Vacuum Chuck

Umfanekiso oPhambili we-Porous Ceramic Vacuum Chuck

Inkcazo emfutshane:

I-VET Energy ngumvelisi ochwephesha kunye nomthengisi wei-ceramic vacuum chuck eTshayina. Sineqela elinamandla le-R&D kunye netekhnoloji yethu enelungelo elilodwa lomenzi wechiza ukubonelela abathengi ngomgangatho ophezulu kunye nophuculo.i-ceramic vacuum chuckSiyakwamkela ukuba undwendwele umzi-mveliso wethu kunye nelebhu nangaliphi na ixesha, silangazelela ukuba liqabane lakho lexesha elide eTshayina.

Igama:I-Ceramic Vacuum Chuck

Izixhobo:I-Ceramic enemingxuma

Ixesha lokuzisa:Iintsuku ezingama-30 kuxhomekeke kubungakanani

I-OEM, i-ODM:Inkxaso

Isatifikethi:IS09001:2015

Iisampulu:Iyafumaneka

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

I-Advanced Porous Ceramic Vacuum Chuck
I-Ceramic Vacuum Chuck enemingxumaliqonga elithwala umthwalo elisebenzisa umgaqo wokufunxa i-vacuum ukulungisa izinto zokusebenza. Inxalenye ye-vacuum chuck ehambisa i-vacuum yipleyiti ye-ceramic enezimbobo. Ipleyiti ye-ceramic enezimbobo ihlanganiswe kumngxuma wokutshona wesiseko, kwaye umngcele wayo ubotshelelwe kwaye utywinwe ngesiseko. Isiseko senziwe ngezinto ze-ceramic ezichanekileyo okanye zesinyithi. Ngokudibanisa isiseko sesinyithi okanye se-ceramic kunye ne-ceramic ekhethekileyo enezimbobo, uyilo lwendlela yomoya echanekileyo yangaphakathi ivumela ukunamathela okubushelelezi nokuzinzileyo kwesixhobo somsebenzi kwikomityi yokufunxa i-vacuum xa iphantsi koxinzelelo olubi.

Ngenxa yemingxuma emincinci kakhulu kwiiseramikhi ezinemingxuma, umphezulu wento yokusebenza unokunamatheliswa kwikomityi yokufunxa ivacuum ngaphandle kwezizathu ezimbi ezifana nemikrwelo okanye ukuqhekeka okubangelwa luxinzelelo olubi.

Iimpawu ze-Porous Ceramic Vacuum Chuck:
① Isakhiwo sayo sixineneyo nesifanayo: Iyamelana nokufunxwa komgubo we-silicon/ukungcola, kulula ukuyicoca.
② Amandla aphezulu kunye nokumelana nokuguguleka: Akukho kuguquka ngexesha lokusila, kunciphisa ukuqhekeka/ukuqhekeka komphetho.
③ Ixesha elide lokuphila: Igcina imilo yomphezulu kakuhle, umjikelo wokugquma omde kunye nokususwa okuncinci.
④ Ubushushu obuphezulu: Bususa umbane ongashukumiyo.
⑤ Ingasetyenziswa kwakhona kwaye kulula ukuyinxiba: Akukho kuqhekeka/ukuqhekeka ngexesha lokuphinda kufakwe umphezulu, kunokwenzeka ukuba isetyenziswe kwakhona izihlandlo ezininzi.
⑥ Ayinathuli kwaye ayiguquki: Igcwele ngokupheleleyo, akukho kukhutshwa kwamasuntswana.
⑦ Ilula: Ulwakhiwo olunemingxuma lunciphisa ubunzima kakhulu.
⑧ Ukumelana neekhemikhali: Ingenziwa ngokwezifiso kwiindawo ezirhabaxa ngokulawula izinto/inkqubo.

I-Ceramic Vacuum Chuck VS Indebe yokuSusa iMetal yeNdalo:

I-Ceramic vacuum chuck kwintsimi ye-semiconductor
Ii-ceramic vacuum chucks zisebenza njengezixhobo zokubamba nokuthwala kwimveliso ye-semiconductor wafer. Zine-flat ephezulu kunye ne-parallelism, isakhiwo esixineneyo nesilinganayo, amandla aphezulu, umoya ovulekileyo, amandla afanayo okufunxa, kunye nokubotshwa okulula. Ezi mpawu zizenza zilungele iinkqubo zokwenziwa kwe-semiconductor wafer ezifana nokuncitshiswa, ukunqunyulwa, ukugaywa, ukucoca, kunye nokuphathwa. Zijongana ngempumelelo nemingeni efana nokuprintwa kwe-wafer, ukuqhekeka kwee-chips nge-electrostatic, kunye nongcoliseko lwamasuntswana, zifikelela kumgangatho ophezulu kakhulu wokucubungula kwii-semiconductor wafers kwizicelo ezisebenzayo.

Iphepha leDatha leZixhobo zeCeramic

Into	I-95% ye-Alumina	I-99% ye-Alumina	I-Zirconia	I-silicon carbide	I-siliconNi-itride	I-aluminiyamNi-itride
Umbala	mhlophe	Umbala otyheli okhanyayo	mhlophe	mnyama	mnyama	ngwevu
Ubuninzi (g/cm3)	3.7g/cm3	3.9g/cm3	6.02g/cm3	3.2g/cm3	3.25g/cm3	3.2g/cm3
Ukufunxwa kwamanzi	0%	0%	0%	0%	0%	0%
Ubulukhuni (HV)	23.7	23.7	16.5	33	20	-
Amandla okuGuquka (i-MPa)	300MPa	400MPa	1100MPa	450MPa	800MPa	I-310MPa
Amandla okuNciphisa (i-MPa)	2500MPa	2800MPa	3600MPa	2000MPa	2600MPa	-
Imodulus yoBuchule kaYoung	300GPa	300GPa	320GPa	450GPa	290GPa	310~350GPa
Umlinganiselo kaPoisson	0.23	0.23	0.25	0.14	0.24	0.24
Ukuqhuba kweThermal	20W/m°C	32W/m°C	3W/m°C	50W/m°C	25W/m°C	150W/m°C
Amandla eDielectric	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm
Ukumelana koMqulu (25℃)	>1014Ω·cm	>1014Ω·cm	>1014Ω·cm	>105Ω·cm	>1014Ω·cm	>1014Ω·cm

I-VET Energy ngumvelisi ochwephesha ogxile kwi-R&D kunye nemveliso yezinto eziphambili ezifana ne-graphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njl. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.

Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.

Iingenelo ze-VET Energy ziquka:
• Ilabhoratri yakho yomzi-mveliso kunye neyobungcali;
• Amanqanaba ococeko kunye nomgangatho ophambili kushishino;
• Ixabiso elikhuphisanayo kunye nexesha lokuhambisa elikhawulezayo;
• Ubudlelwane obuninzi kushishino kwihlabathi liphela;

Siyakwamkela ukuba undwendwele ifektri yethu kunye nelebhu nangaliphi na ixesha!