Advanced Porous Ceramic Vacuum Chuck

Inkcazelo emfutshane:

I-VET Energy ngumvelisi oqeqeshiweyo kunye nomthengisi wei-ceramic vacuum chuck eTshayina. Sineqela eliqinileyo le-R&D kunye neetekhnoloji ezinelungelo elilodwa lomenzi wokubonelela abathengi ngomgangatho ophezulu kunye nokuqhubela phambilii-ceramic vacuum chuck. Siyakwamkela ukuba undwendwele umzi-mveliso wethu kunye nebhubhoratri nangaliphi na ixesha, sijonge phambili ukuba liqabane lakho lexesha elide eTshayina.

Igama:Ceramic Vacuum Chuck

Izinto:I-Porous Ceramic

Ixesha lokuzisa:Iintsuku ezingama-30 ngokuxhomekeke kubuninzi

OEM, ODM:Inkxaso

Isatifikethi:IS09001:2015

Iisampulu:Iyafumaneka

Thumela i-imeyile kuthi Khuphela njengePDF

Iinkcukacha zeMveliso

Iithegi zeMveliso

Advanced Porous Ceramic Vacuum Chuck
Porous Ceramic Vacuum Chuckliqonga elithwele umthwalo elisebenzisa umgaqo we-vacuum adsorption ukulungisa izixhobo zokusebenza. Inxalenye ye-vacuum chuck ehambisa i-vacuum yipleyiti ye-ceramic eneporous. I-plate ye-ceramic ye-porous ihlanganiswe kumngxuma wokutshona wesiseko, kwaye i-periphery yayo iboshwe kwaye itywinwe ngesiseko. Isiseko senziwe nge-ceramic echanekileyo okanye izinto zetsimbi. Ngokudibanisa isiseko sesinyithi okanye i-ceramic kunye ne-ceramic ekhethekileyo ye-porous, uyilo lwendlela yomoya echanekileyo yangaphakathi ivumela ukunamathela okugudileyo kunye nokuzinza kwendawo yokusebenza kwikomityi yokufunxa i-vacuum xa iphantsi koxinzelelo olubi.

Ngenxa yemingxuma ecolekileyo kakhulu kwiiseramics ezinabileyo, umphezulu wesixhobo sokusebenza unokuncamathela kwikomityi yokufunxa ivacuum ngaphandle kwezinto ezimbi ezifana nemikrwelo okanye izibonda ezibangelwa luxinzelelo olubi.

Iimpawu zePorous Ceramic Vacuum Chuck:
① Ubume obuxineneyo kunye nobufanayo: Ixhathisa umgubo wesilicon / i-adsorption yokugaya inkunkuma, kulula ukuyicoca.
② Amandla aphezulu kunye nokumelana nokunxiba: Akukho deformation ngexesha lokugaya, kunciphisa i-edge chipping / ukwahlula.
③ Ubomi obude: Ugcino lwemilo yomphezulu ogqwesileyo, umjikelo omde wokunxiba kunye nokususwa okuncinci.
④ Ukugquma okuphezulu: Ukuphelisa umbane ongatshintshiyo.
⑤ Iyasebenziseka kwakhona kwaye kulula ukunxiba: Akukho kuqhekeka / ukuqhekeka ngexesha lokuphinda kufakwe umphezulu, ukusetyenziswa kwakhona okuninzi kunokwenzeka.
⑥ Aluthuli kwaye luzinzile: I-sintered ngokupheleleyo, akukho kukhutshwa kwamasuntswana.
⑦ I-Lightweight: Isakhiwo se-porous sinciphisa kakhulu ubunzima.
⑧ Ukuxhathisa kwiMichiza: Ukwenziwa ngokwezifiso kwindawo ezonakalisayo ngokulawulwa kwezinto / inkqubo.

ICeramic Vacuum iChuck VS indebe yesiNtu yokufunxa isinyithi:

I-Ceramic vacuum chuck kwintsimi ye-semiconductor
Ii-chucks ze-Ceramic vacuum zisebenza njenge-clamping kunye nokuthwala izixhobo kwimveliso ye-wafer ye-semiconductor. Zibonisa ukuphakama okuphezulu kunye nokuhambelana, isakhiwo esixineneyo kunye nesifanayo, amandla aphezulu, ukunyanzeliswa komoya okulungileyo, amandla afanayo adsorption, kunye nokunxiba lula. Ezi mpawu zibenza bafaneleke kwiinkqubo zokwenziwa kwe-wafer ye-semiconductor njengokucolwa, ukusika, ukucola, ukucoca, kunye nokuphatha. Bajongana ngempumelelo nemiceli mngeni efana nokuprintwa kwe-wafer, ukonakaliswa kwe-electrostatic yeechips, kunye nokungcoliseka kwamasuntswana, ukuzuza umgangatho ophezulu wokusetyenzwa kwee-wafers ze-semiconductor kwizicelo ezisebenzayo.

Iphepha leDatha leMathiriyeli yeCeramic

Into	95% iAlumina	99% iAlumina	Zirconia	I-silicon carbide	IsiliconNhamba	AluminiyamNhamba
Umbala	mhlophe	Mthubi okhanyayo	mhlophe	mnyama	mnyama	ngwevu
Ubuninzi (g/cm3)	3.7g/cm3	3.9g/cm3	6.02g/cm3	3.2g/cm3	3.25g/cm3	3.2g/cm3
Ukufunxwa kwamanzi	0%	0%	0%	0%	0%	0%
Ukuqina(HV)	23.7	23.7	16.5	33	20	-
Amandla eFlexural (MPa)	300MPa	400MPa	1100MPa	450MPa	800MPa	310MPa
Amandla oxinzelelo (MPa)	2500MPa	2800MPa	3600MPa	2000MPa	2600MPa	-
Imodyuli eNcinci ye-Elasticity	300GPa	300GPa	320GPa	450GPa	290GPa	310 ~ 350GPa
Umlinganiselo wePoisson	0.23	0.23	0.25	0.14	0.24	0.24
I-Thermal Conductivity	20W/m°C	32W/m°C	3W/m°C	50W/m°C	25W/m°C	150W/m°C
Amandla eDielectric	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm	14KV/mm
Ukuxhathisa uMqulu (25℃)	>1014Ω·cm	>1014Ω·cm	>1014Ω·cm	>105Ω·cm	>1014Ω·cm	>1014Ω·cm

I-VET Energy ngumvelisi oqeqeshiweyo ogxile kwi-R & D kunye nokuveliswa kwezinto eziphezulu eziphezulu ezifana negraphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto eziphathekayo ezifana ne-SiC yokubeka, i-TaC yokugqoka, i-glassy carbon coating, i-pyrolytic ye-carbon coating, njl. Iimveliso zisetyenziswa ngokubanzi kwi-photovoltaic, semiconductor, amandla amatsha, isinyithi, njl.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Izibonelelo zamandla e-VET ziquka:
• Umzi-mveliso ongowakho kunye nelebhu yobungcali;
• Amanqanaba okucoceka ahamba phambili kushishino kunye nomgangatho;
• Ixabiso elikhuphisanayo kunye nexesha lokuhanjiswa ngokukhawuleza;
• Intsebenziswano yamashishini amaninzi kwihlabathi jikelele;

Siyakwamkela ukuba ujonge umzi-mveliso wethu kunye nelabhoratri nangaliphi na ixesha!