Kūkaʻikaʻi Porous Ceramic Vacuum Chuck
Porous Ceramic Vacuum ChuckʻO ia kahi paepae haʻahaʻa e hoʻohana ana i ke kumu o ka adsorption vacuum e hoʻoponopono i nā mea hana. ʻO ka ʻāpana o ka pahu ʻūhā e hoʻouna ana i ka momi he pā porous. Hoʻohui ʻia ka pā seramika porous i loko o ka lua kupapaʻu o ke kumu, a hoʻopaʻa ʻia kona ʻaoʻao a hoʻopaʻa ʻia me ke kumu. Hana ʻia ke kumu i ka seramika pololei a i ʻole nā mea metala. Ma ka hoʻohui ʻana i kahi metala a i ʻole kumu seramika me kahi seramika porous kūikawā, ʻo ka hoʻolālā ʻana o ke ala ea pololei i loko e hiki ai ke hoʻopili paʻa a paʻa o ka mea hana i ke kīʻaha hoʻoheheʻe ʻana i ka wā i hoʻokau ʻia i ke kaomi maikaʻi ʻole.
Ma muli o nā pores maikaʻi loa i loko o nā seramika porous, hiki ke hoʻopili ʻia ka ʻili o ka mea hana i ke kīʻaha hoʻoheheʻe ʻana me ka ʻole o nā kumu ʻino e like me nā ʻōpala a i ʻole nā dents i hoʻokumu ʻia e ke kaomi maikaʻi ʻole.
Nā hiʻohiʻona o ka Porous Ceramic Vacuum Chuck:
① ʻO ke ʻano paʻa a me ke ʻano like ʻole: Kūʻē i ka pauka silika/wili ʻōpala adsorption, maʻalahi e hoʻomaʻemaʻe.
② ʻO ka ikaika kiʻekiʻe a me ka pale ʻana i ka lole: ʻAʻohe deformation i ka wā e wili ai, e hōʻemi i ka ʻokiʻoki / ʻāpana.
③ ʻO ke ola lōʻihi: Ka mālama ʻana i ke ʻano o ka ʻili, ka pōʻai lole lōʻihi me ka liʻiliʻi.
④ Hoʻokuʻu kiʻekiʻe: Hoʻopau i ka uila paʻa.
⑤ Hiki ke hoʻohana hou ʻia a maʻalahi hoʻi e ʻaʻahu: ʻAʻohe māhā/ʻokiʻoki i ka wā e hoʻohou hou ai, hiki ke hoʻohana hou ʻia.
⑥ ʻAʻohe lepo a paʻa: Sintered piha, ʻaʻohe mea hoʻokuʻu.
⑦ Māmā: ʻO ka hana porous e hoʻemi nui i ke kaumaha.
⑧ Ke kū'ē kemika: Hiki ke hoʻololi ʻia no nā kaiapuni corrosive ma o ka hoʻokele waiwai / kaʻina hana.
ʻO ke kīʻaha hoʻoheheʻe metala kuʻuna VS Kuʻuna Metala Suction Cup:
ʻO ka pahu ʻūhā seramika ma ke kahua semiconductor
Hoʻohana ʻia nā puʻupuʻu seramika ma ke ʻano he pipili a lawe i nā mea hana i ka hana wafer semiconductor. Hōʻike lākou i ka pālahalaha kiʻekiʻe a me ka parallelism, kahi ʻano paʻa a me ke ʻano like, ka ikaika kiʻekiʻe, ka permeability maikaʻi o ka ea, ka ikaika adsorption like, a me ka lole maʻalahi. ʻO kēia mau hiʻohiʻona e kūpono iā lākou no nā kaʻina hana semiconductor wafer e like me ka thinning, slicing, grinding, cleansing, and handling. Hoʻoponopono maikaʻi lākou i nā pilikia e like me ka wafer imprinting, electrostatic breakdown of chips, and particle contamination, e loaʻa ana i ka maikaʻi o ka hana ʻana no nā wafers semiconductor i nā noi kūpono.
Pepa Ikepili o na Mea Hana Seramika
| 'ikamu | 95% alumina | 99% alumina | Zirconia | Silicon carbide | SilikaNkaʻahele | AluminumNkaʻahele |
| kalakala | keʻokeʻo | Melemele māmā | keʻokeʻo | ʻeleʻele | ʻeleʻele | hinahina |
| ʻO ka mānoanoa (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Hoʻopiʻi wai | 0% | 0% | 0% | 0% | 0% | 0% |
| Paʻakiki (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| ʻO ka ikaika lohi (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Ka ikaika hoʻoemi (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Opio Modulus O Elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Ka ratio o Poisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| ʻO ka hoʻoili wela | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Ka ikaika dielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Kū'ē leo (25 ℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
ʻO ka VET Energy kahi mea hana ʻoihana e kālele ana i ka R&D a me ka hana ʻana i nā mea kiʻekiʻe kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc.
Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.
Loaʻa nā pono o ka VET Energy:
• hale hana ponoi a me ka hale hana oihana;
• nā pae maʻemaʻe alakaʻi alakaʻi a me ka maikaʻi;
• Kūʻai hoʻokūkū & manawa hāʻawi wikiwiki;
• Nā hui ʻoihana lehulehu ma ka honua holoʻokoʻa;
Hoʻokipa mākou iā ʻoe e kipa i kā mākou hale hana a me ka hale hana i kēlā me kēia manawa!
