Cov Khoom Siv Ceramic Nqus Tsev Chuck
Lub Tshuab Nqus Tsev Uas Muaj Qhov Ntswsyog lub platform uas muaj peev xwm thauj khoom uas siv lub hauv paus ntsiab lus ntawm kev nqus tsev los kho cov khoom ua haujlwm. Ib feem ntawm lub tshuab nqus tsev chuck uas xa cov khoom nqus tsev yog lub phaj ceramic porous. Lub phaj ceramic porous tau sib sau ua ke hauv qhov poob ntawm lub hauv paus, thiab nws cov periphery yog bonded thiab kaw nrog lub hauv paus. Lub hauv paus yog ua los ntawm cov khoom siv ceramic lossis hlau. Los ntawm kev sib xyaw ua ke lub hauv paus hlau lossis ceramic nrog lub ceramic porous tshwj xeeb, kev tsim ntawm sab hauv precision airway tso cai rau kev nplaum du thiab ruaj khov ntawm cov khoom ua haujlwm rau lub khob nqus tsev thaum raug rau qhov siab tsis zoo.
Vim yog cov qhov me me hauv cov khoom siv ceramics uas muaj qhov me me, qhov chaw ntawm cov khoom ua haujlwm tuaj yeem lo rau lub khob nqus tsev yam tsis muaj tej yam tsis zoo xws li khawb lossis lwj los ntawm lub siab tsis zoo.
Cov yam ntxwv ntawm Porous Ceramic Vacuum Chuck:
① Cov qauv ntom thiab sib xws: Tiv taus cov hmoov silicon / cov khib nyiab sib tsoo adsorption, yooj yim los ntxuav.
② Lub zog siab & hnav tsis kam: Tsis muaj kev hloov pauv thaum sib tsoo, txo cov ntug chipping / fragmentation.
③ Lub neej ntev: Kev khaws cia zoo heev ntawm qhov chaw, lub voj voog hnav khaub ncaws ntev nrog kev tshem tawm tsawg kawg nkaus.
④ Kev rwb thaiv tsev siab: Tshem tawm hluav taws xob zoo li qub.
⑤ Siv tau dua & yooj yim hnav: Tsis muaj kev tawg/chipping thaum lub sijhawm rov ua dua tshiab, siv tau ntau zaus.
⑥ Tsis muaj plua plav & ruaj khov: Sintered tag nrho, tsis muaj particle emission.
⑦ Sib dua: Cov qauv porous txo qhov hnyav ntau heev.
⑧ Kev tiv thaiv tshuaj lom neeg: Kho tau rau cov chaw muaj xeb los ntawm kev tswj cov khoom siv / txheej txheem.
Lub Tshuab Nqus Tsev Ua Los Ntawm Tej Hub Uas Muaj Ceramic VS Lub Khob Nqus Tsev Ua Los Ntawm Hlau Ib Txwm Muaj:
Lub tshuab nqus tsev ceramic hauv thaj chaw semiconductor
Cov chucks nqus tsev ua los ntawm cov av nplaum ua haujlwm ua cov cuab yeej clamping thiab nqa hauv kev tsim cov semiconductor wafer. Lawv muaj qhov tiaj tiaj thiab sib luag, cov qauv ntom thiab sib xws, lub zog siab, huab cua zoo permeability, lub zog nqus sib xws, thiab yooj yim hnav. Cov yam ntxwv no ua rau lawv haum rau cov txheej txheem hauv kev tsim cov semiconductor wafer xws li thinning, slicing, grinding, ntxuav, thiab tuav. Lawv daws tau cov teeb meem xws li wafer imprinting, electrostatic breakdown ntawm chips, thiab particle contamination, ua tiav cov txheej txheem zoo heev rau semiconductor wafers hauv kev siv tiag tiag.
Cov Ntaub Ntawv ntawm Cov Khoom Siv Ceramic
| Khoom | 95% Alumina | 99% Alumina | Zirconia | Silicon carbide | SiliconNnws | AluminiumNnws |
| Xim | dawb | Daj daj me me | dawb | dub | dub | xim av |
| Qhov Ceev (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Kev Nqus Dej | 0% | 0% | 0% | 0% | 0% | 0% |
| Qhov nyuaj (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Lub Zog Flexural (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Lub Zog Nqus (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Young's Modulus ntawm Elasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310 ~ 350 GPa |
| Poisson qhov piv | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Kev Ua Kub | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Lub zog dielectric | 14KV/hli | 14KV/hli | 14KV/hli | 14KV/hli | 14KV/hli | 14KV/hli |
| Ntim Resistivity (25 ℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
VET Zog yog ib lub chaw tsim khoom uas tsom mus rau R & D thiab kev tsim cov khoom siv siab heev xws li graphite, silicon carbide, quartz, nrog rau cov khoom siv kho xws li SiC txheej, TaC txheej, iav carbon txheej, pyrolytic carbon txheej, thiab lwm yam. Cov khoom siv dav siv hauv photovoltaic, semiconductor, lub zog tshiab, metallurgy, thiab lwm yam.
Peb pab neeg kev tshaj lij los ntawm cov tsev kawm tshawb fawb hauv tsev sab saum toj, tuaj yeem muab cov kev daws teeb meem ntau dua rau koj.
Cov txiaj ntsig ntawm VET Energy suav nrog:
• Muaj lub Hoobkas thiab chaw kuaj mob tshaj lij;
• Cov qib kev huv thiab qhov zoo uas ua tus thawj coj hauv kev lag luam;
• Tus nqi sib tw & Lub sijhawm xa khoom sai;
• Kev koom tes ntau yam lag luam thoob ntiaj teb;
Peb txais tos koj tuaj xyuas peb lub Hoobkas thiab chaw kuaj mob txhua lub sijhawm!
