I-Advanced Porous Ceramic Vacuum Chuck
I-Ceramic Vacuum Chuck Enezimboboiyipulatifomu ethwala umthwalo esebenzisa isimiso sokumuncwa kwe-vacuum ukulungisa izingxenye zomsebenzi. Ingxenye ye-vacuum chuck edlulisa i-vacuum yipuleti le-ceramic elinezimbobo. Ipuleti le-ceramic elinezimbobo lihlanganiswe emgodini ocwilayo wesisekelo, futhi umngcele walo uboshwe futhi uvalwe ngesisekelo. Isisekelo senziwe ngezinto ze-ceramic noma zensimbi ezinembile. Ngokuhlanganisa isisekelo sensimbi noma se-ceramic ne-ceramic ekhethekile enezimbobo, ukwakheka komoya wokungena kwangaphakathi kuvumela ukunamathela okubushelelezi nokuzinzile kwengxenye yokusebenza endebeni yokumunca i-vacuum lapho icindezelwa kabi.
Ngenxa yezindawo ezincane kakhulu zobumba ezinezimbobo, ubuso bento yokusebenza bunganamatheliswa endebeni yokumunca i-vacuum ngaphandle kwezici ezimbi njengokuklwebheka noma ukugoba okubangelwa ukucindezela okungekuhle.

Izici ze-Porous Ceramic Vacuum Chuck:
① Isakhiwo esiqinile nesifanayo: Simelana nokumuncwa kwe-silicon powder/ukungcola okugayiwe, kulula ukukuhlanza.
② Amandla aphezulu kanye nokumelana nokuguguleka: Akukho ukuguguleka ngesikhathi sokugaya, kunciphisa ukuqhekeka/ukuqhekeka komphetho.
③ Isikhathi eside sokuphila: Ukugcinwa kwesimo sobuso okuhle kakhulu, umjikelezo wokubopha omude nokususwa okuncane.
④ Ukushisa okuphezulu: Kuqeda ugesi ongashintshi.
⑤ Ingasetshenziswa kabusha futhi kulula ukuyigqoka: Akukho ukuqhekeka/ukuqhekeka ngesikhathi sokuphinda kufakwe umphezulu, kungenzeka ukuthi kusetshenziswe kabusha kaningi.
⑥ Ayithuli futhi izinzile: Igcwele amanzi, ayikhiphi izinhlayiya.
⑦ Ilula: Isakhiwo esinezimbobo senza isisindo sibe sincane kakhulu.
⑧ Ukumelana namakhemikhali: Kungenziwa ngezifiso ezindaweni ezigqwalisayo ngokulawula izinto/inqubo.
I-Ceramic Vacuum Chuck VS Indebe Yokuncela Insimbi Yendabuko:
I-Ceramic vacuum chuck ensimini ye-semiconductor
Ama-ceramic vacuum chucks asebenza njengamathuluzi okubopha nokuphatha ekukhiqizweni kwe-semiconductor wafer. Ane-flat ephezulu kanye ne-parallelism, isakhiwo esiminyene nesifanayo, amandla aphezulu, ukungena komoya okuhle, amandla afanayo okumunca, kanye nokubopha okulula. Lezi zici ziwenza afaneleke ezinqubweni zokukhiqiza i-semiconductor wafer njengokunciphisa, ukusika, ukugaya, ukuhlanza, kanye nokuphatha. Abhekana ngempumelelo nezinselele ezifana nokuprinta i-wafer, ukuwohloka kwama-chips ngogesi, kanye nokungcola kwezinhlayiya, okufinyelela ikhwalithi ephezulu kakhulu yokucubungula yama-semiconductor wafers ezisetshenziswayo ezisebenzayo.
Ishidi Ledatha Lezinto Zobumba
| Into | I-Alumina engu-95% | I-Alumina engu-99% | I-Zirconia | I-silicon carbide | I-SiliconNi-itride | I-AluminiumNi-itride |
| Umbala | okumhlophe | Ophuzi okhanyayo | okumhlophe | mnyama | mnyama | impunga |
| Ubuningi (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Ukumuncwa Kwamanzi | 0% | 0% | 0% | 0% | 0% | 0% |
| Ubulukhuni (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Amandla Okuguquguquka (i-MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Amandla Okucindezela (i-MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| I-Modulus kaYoung Yokunwebeka | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Isilinganiso sikaPoisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Ukuqhuba Okushisayo | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Amandla e-Dielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Ukumelana Nomthamo (25℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
I-VET Energy ingumkhiqizi ochwepheshe ogxile ku-R&D kanye nokukhiqizwa kwezinto ezisezingeni eliphezulu ezifana ne-graphite, i-silicon carbide, i-quartz, kanye nokwelashwa kwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njll. Imikhiqizo isetshenziswa kabanzi ku-photovoltaic, i-semiconductor, amandla amasha, i-metallurgy, njll.
Ithimba lethu lobuchwepheshe livela ezikhungweni zocwaningo zasekhaya eziphezulu, lingakunikeza izixazululo zezinto zobuchwephesha ezengeziwe.
Izinzuzo ze-VET Energy zifaka:
• Ilebhu yakho yefektri kanye neyobungcweti;
• Amazinga okuhlanzeka okuhamba phambili embonini kanye nekhwalithi;
• Intengo yokuncintisana kanye nesikhathi sokulethwa okusheshayo;
• Ubambiswano oluningi lwemboni emhlabeni jikelele;
Siyakwamukela ukuthi uvakashele ifektri yethu kanye nelebhu nganoma yisiphi isikhathi!
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