Yepamusoro Porous Ceramic Vacuum Chuck
Porous Ceramic Vacuum Chuckipuratifomu inotakura mutoro inoshandisa musimboti wekuti vacuum adsorption igadzire maworkpieces. Chikamu chevacuum chuck chinotumira vacuum iplate yeceramic ine maburi. Plate yeceramic ine maburi inounganidzwa mugomba rinonyura rechigadziko, uye miganhu yayo inosungirirwa uye yakavharwa nechigadziko. Hwaro hwacho hwakagadzirwa nezvinhu zveceramic kana zvesimbi. Nekubatanidza chigadziko chesimbi kana checeramic neceramic yakakosha ine maburi, dhizaini yemukati memhepo inoyerera inobvumira kuti workpiece inyatsobatana uye igare yakasimba nekapu yekusveta vacuum kana yaiswa pasi pekumanikidzwa kwakashata.
Nekuda kwemaburi matete kwazvo ari muzviumbwa zvedongo zvine maburi, pamusoro pechinhu chebasa chinogona kunamirwa mukapu yekusveta vacuum pasina zvinhu zvakaipa zvakaita sekukwenya kana maburi anokonzerwa nekumanikidzwa kusina kunaka.

Hunhu hwePorous Ceramic Vacuum Chuck:
① Yakasimba uye yakafanana: Inodzivirira kunyungudika kweupfu hwesilicon/tsvina, iri nyore kuchenesa.
② Simba guru uye kuramba kupfeka: Hapana kuchinja panguva yekukuya, kunoderedza kupwanyika/kutsemuka kwemucheto.
③ Nguva refu yehupenyu: Inogara kwenguva refu, inochengetedza chimiro cheganda kwenguva refu uye haibviswi zvakanyanya.
④ Inodzivirira zvakanyanya: Inobvisa magetsi asingachinji.
⑤ Inogona kushandiswazve uye iri nyore kupfeka: Hapana kutsemuka/kupwanyika panguva yekuisa pamusoro payo, inogona kushandiswazve kakawanda.
⑥ Haipukute guruva uye yakagadzikana: Yakanyungudutswa zvizere, haina kuburitsa tunhu tudiki.
⑦ Huremu: Chimiro chine maburi chinoderedza huremu zvakanyanya.
⑧ Kusabatwa nemakemikari: Inogona kugadziriswa panzvimbo dzinoparadza kuburikidza nekudzora zvinhu/maitiro.
Kapu yeCeramic Vacuum Chuck VS Yechinyakare Yesimbi Suction:
Ceramic vacuum chuck mumunda we semiconductor
Ma ceramic vacuum chucks anoshanda sematurusi ekubatanidza nekutakura mukugadzira ma semiconductor wafer. Ane hurefu hwakati sandara uye akafanana, chimiro chakasimba uye chakafanana, simba rakawanda, mhepo inoyerera zvakanaka, simba rekunyungudutsa rakaenzana, uye nyore kupfekedza. Hunhu uhwu hunoita kuti akwanise kushandiswa mukugadzira ma semiconductor wafer akadai sekutetepa, kucheka, kukuya, kuchenesa, uye kubata. Anoshanda zvinobudirira kugadzirisa matambudziko akadai sekudhinda ma wafer, kupwanyika kwema chips nemagetsi, uye kusvibiswa kwezvikamu, zvichiita kuti ma wafers e semiconductor ave emhando yepamusoro mukushandiswa kwawo.
Pepa reData reZvinhu zveCeramic
| Chinhu | 95% Alumina | 99% Alumina | Zirconia | Silicon carbide | SirikiNitride | AruminiyamuNitride |
| Ruvara | chena | Yero yakajeka | chena | nhema | nhema | gireyi |
| Kuwanda (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Kunyudzwa kweMvura | 0% | 0% | 0% | 0% | 0% | 0% |
| Kuoma (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Simba reKuchinjika (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Simba Rokumanikidza (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Modulus yeYoung yeElasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310~350GPa |
| Chiyero chaPoisson | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Kufambisa kwekupisa | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Simba reDielectric | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Kuramba kweVhoriyamu (25℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
VET Energy inyanzvi yekugadzira zvinhu inotarisa paR&D uye kugadzirwa kwezvinhu zvepamusoro-soro zvakaita segraphite, silicon carbide, quartz, pamwe nekugadzirwa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, nezvimwewo. Zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.
Chikwata chedu chehunyanzvi chinobva kumasangano makuru ekutsvagisa emuno, chinogona kukupa mhinduro dzehunyanzvi.
Zvakanakira zveVET Energy zvinosanganisira:
• Laboratori yemufekitori neyanyanzvi;
• Matanho ekuchena uye mhando yepamusoro-soro muindasitiri;
• Mutengo unokwikwidzana & Nguva yekutumira nekukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;
Tinokugamuchirai kuti mushanyire fekitori yedu nerabhoritari chero nguva!
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