Yepamusoro Porous Ceramic Vacuum Chuck
Porous Ceramic Vacuum Chuckipuratifomu inotakura zvinhu inoshandisa musimboti wevacuum adsorption kugadzirisa maworkpieces. Chikamu chevacuum chuck chinotumira vacuum iplate ye ceramic ine porous. Iyo porous ceramic plate inounganidzwa mugomba rinonyura rechigadziko, uye periphery yayo inosungirirwa uye yakavharwa nechigadziko. Nheyo yacho yakagadzirwa nechaiyo ceramic kana simbi zvinhu. Nekubatanidza simbi kana ceramic base ine yakakosha porous ceramic, dhizaini yemukati yakanyatsojeka nzira yemhepo inobvumira kutsvedzerera uye kugadzikana kunamatira kweiyo workpiece kune vacuum yekusveta kapu kana ichiiswa pasi pekumanikidzwa kwakashata.
Nekuda kweakanyanya kunaka pores mune porous ceramics, pamusoro peiyo workpiece inogona kunamatira kune vacuum suction kapu pasina chero yakaipa zvinhu senge makwara kana mazino anokonzerwa nekumanikidza kwakashata.
Hunhu hwePorous Ceramic Vacuum Chuck:
① Dense & yunifomu chimiro: Inopikisa silicon hupfu / kukuya marara adsorption, nyore kuchenesa.
② Simba rakakwirira & kupfeka kuramba: Hapana deformation panguva yekugaya, inoderedza kumucheto kupeta / kuparadzaniswa.
③ Hurefu hwehupenyu: Yakanakisa nzvimbo yekuchengetedza chimiro, kutenderera kwenguva refu yekupfeka nekubvisa kushoma.
④ High insulation: Inobvisa static magetsi.
⑤ Inoshandisika zvakare & iri nyore kupfeka: Hapana kutsemuka/kutsemuka panguva yekumisikidza, kushandiswazve kwakawanda kunogoneka.
⑥ Isiri-guruva & yakagadzikana: Yakazara sintered, hapana particle emission.
⑦ Lightweight: Porous chimiro chinoderedza uremu zvakanyanya.
⑧ Chemical kuramba: Customizable kune nharaunda dzinoparadza kuburikidza nezvinhu / maitiro ekugadzirisa.
Ceramic Vacuum Chuck VS Traditional Metal Suction Cup:
Ceramic vacuum chuck mumunda we semiconductor
Ceramic vacuum chucks inoshanda sekusunga uye kutakura maturusi mune semiconductor wafer kugadzirwa. Zvinoratidza kupfava kwepamusoro uye kufanana, chimiro chakakora uye chakafanana, kusimba kwepamusoro, kunaka kwemhepo kupenya, yunifomu yekushongedza simba, uye kupfeka nyore. Aya maitiro anoita kuti ave akakodzera maitiro ekugadzira semiconductor wafer senge kutetepa, kucheka, kukuya, kuchenesa, uye kubata. Ivo vanogadzirisa zvinonetsa senge wafer imprinting, electrostatic kuparara kwemachipisi, uye kusvibiswa kwechikamu, kuwana yakanyanyisa kugadzirisa mhando ye semiconductor wafers mune zvinoshanda maapplication.
Data Sheet yeCeramic Materials
| Item | 95% Alumina | 99% Alumina | Zirconia | Silicon carbide | SiliconNitride | AluminiumNitride |
| Color | chena | Chiedza chero | chena | nhema | nhema | gireyi |
| Density (g/cm3) | 3.7g/cm3 | 3.9g/cm3 | 6.02g/cm3 | 3.2g/cm3 | 3.25g/cm3 | 3.2g/cm3 |
| Kutora Mvura | 0% | 0% | 0% | 0% | 0% | 0% |
| Kuoma (HV) | 23.7 | 23.7 | 16.5 | 33 | 20 | - |
| Flexural Strength (MPa) | 300MPa | 400MPa | 1100MPa | 450MPa | 800MPa | 310MPa |
| Compressive Strength (MPa) | 2500MPa | 2800MPa | 3600MPa | 2000MPa | 2600MPa | - |
| Yechidiki's Modulus yeElasticity | 300GPa | 300GPa | 320GPa | 450GPa | 290GPa | 310 ~ 350GPa |
| Poisson's Ratio | 0.23 | 0.23 | 0.25 | 0.14 | 0.24 | 0.24 |
| Thermal Conductivity | 20W/m°C | 32W/m°C | 3W/m°C | 50W/m°C | 25W/m°C | 150W/m°C |
| Dielectric Simba | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm | 14KV/mm |
| Vhoriyamu Resistivity (25 ℃) | >1014Ω·cm | >1014Ω·cm | >1014Ω·cm | >105Ω·cm | >1014Ω·cm | >1014Ω·cm |
VET Energy inyanzvi yekugadzira inotarisisa kuR&D nekugadzirwa kwemhando yepamusoro-soro senge graphite, silicon carbide, quartz, pamwe nekurapa kwezvinhu zvakaita seSiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. Zvigadzirwa izvi zvinoshandiswa zvakanyanya muphotovoltaic, semiconductor, simba idzva, simbi, nezvimwe.
Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa dzimba, anogona kukupa mamwe hunyanzvi zvigadziriso zvekushandisa kwauri.
VET Energy zvakanakira zvinosanganisira:
• Fekitari uye rabhoritari yehunyanzvi;
• Indasitiri-inotungamira kuchena mwero uye kunaka;
• Mutengo wemakwikwi & Nguva yekuendesa nokukurumidza;
• Kudyidzana kwemaindasitiri akawanda pasi rose;
Tinokugamuchira iwe kuti utarise fekitori yedu nerabhoritari chero nguva!
