Menene tsarin tsara tsarin CMP?

Dual-Damascene wata fasaha ce ta tsari da ake amfani da ita wajen kera hanyoyin haɗin ƙarfe a cikin da'irori masu haɗawa. Wannan wani ci gaba ne na tsarin Damascus. Ta hanyar ƙirƙirar ramuka da ramuka a lokaci guda a cikin matakin tsari ɗaya da kuma cika su da ƙarfe, ana cimma haɗakar hanyoyin haɗin ƙarfe.

Me yasa ake kiransa da Damascus?

Birnin Damascus shine babban birnin Siriya, kuma takubban Damascus sun shahara saboda kaifi da kuma kyawun yanayinsu. Ana buƙatar wani nau'in tsarin sakawa: da farko, ana zana tsarin da ake buƙata a saman ƙarfen Damascus, kuma kayan da aka riga aka shirya an lulluɓe su sosai a cikin ramukan da aka sassaka. Bayan an gama sakawa, saman na iya zama ɗan rashin daidaito. Mai sana'a zai goge shi da kyau don tabbatar da santsi gaba ɗaya. Kuma wannan tsari shine samfurin tsarin Damascus guda biyu na guntu. Da farko, ana zana ramuka ko ramuka a cikin layin dielectric, sannan a cika ƙarfe a cikinsu. Bayan an cika, za a cire ƙarin ƙarfe da cmp.

Manyan matakai na tsarin damshin dual sun haɗa da:

▪ Rage girman layin dielectric:

Sanya wani Layer na kayan dielectric, kamar silicon dioxide (SiO2), a kan semiconductorwafer ɗin wafer.

▪ Photolithography don ayyana tsarin:

Yi amfani da photolithography don ayyana tsarin vias da ramuka akan layin dielectric.

▪Gyaran fuska:

Canja wurin tsarin vias da ramuka zuwa layin dielectric ta hanyar busasshen ko rigar ƙwanƙwasa.

▪ Zubar da ƙarfe:

A ajiye ƙarfe, kamar jan ƙarfe (Cu) ko aluminum (Al), a cikin ramuka da ramuka don samar da haɗin ƙarfe.

▪ Gyaran injina na sinadarai:

Gilashin sinadarai na aikin injiniya na saman ƙarfe don cire ƙarfe da ya wuce kima da kuma daidaita saman.

Idan aka kwatanta da tsarin kera haɗin ƙarfe na gargajiya, tsarin damɓa biyu yana da fa'idodi masu zuwa:

▪ Matakan tsari masu sauƙi:Ta hanyar samar da hanyoyin sadarwa da ramuka a lokaci guda a cikin matakin tsari guda, matakan aiwatarwa da lokacin ƙera su suna raguwa.

▪Ingantaccen ingancin masana'antu:saboda rage matakan aiwatarwa, tsarin damshin dual zai iya inganta ingancin masana'antu da rage farashin samarwa.

▪Inganta aikin haɗin ƙarfe:Tsarin damshin biyu zai iya cimma ƙananan haɗin ƙarfe, ta haka ne zai inganta haɗin kai da aikin da'irori.

▪Rage ƙarfin ƙwayoyin cuta da juriya:Ta hanyar amfani da kayan dielectric masu ƙarancin k da kuma inganta tsarin haɗin ƙarfe, ana iya rage ƙarfin parasitic capacitance da juriya, wanda ke inganta saurin aiki da ƙarfin amfani da wutar lantarki na da'irori.