Iyini indlela yokuhlela ye-CMP?

I-Dual-Damascene ubuchwepheshe benqubo obusetshenziswa ukukhiqiza ukuxhumana kwensimbi kumasekethe ahlanganisiwe. Kuyintuthuko eyengeziwe yenqubo yaseDamasko. Ngokwakha imigodi kanye nemisele ngesikhathi esifanayo esinyathelweni esifanayo senqubo bese uyigcwalisa ngensimbi, ukukhiqizwa okuhlanganisiwe kokuxhumana kwensimbi kuyenzeka.

Kungani ibizwa ngokuthi iDamaseku?

Idolobha laseDamaseku liyinhloko-dolobha yaseSiriya, futhi izinkemba zaseDamaseku zidumile ngobukhali bazo kanye nokuthungwa kwazo okuhle kakhulu. Kudingeka uhlobo oluthile lwenqubo yokufaka: okokuqala, iphethini edingekayo iqoshwe ebusweni bensimbi yaseDamaseku, futhi izinto ezilungiselelwe kusengaphambili zifakwe ngokuqinile emiseleni eqoshiwe. Ngemva kokuba ukufakwa sekuqediwe, ubuso bungase bungalingani kancane. Ingcweti izoyipholisha ngokucophelela ukuqinisekisa ukuthi ibushelelezi ngokuphelele. Futhi le nqubo iyisibonelo senqubo yeDamaseku ephindwe kabili ye-chip. Okokuqala, imigoqo noma imigodi iqoshwe kungqimba lwe-dielectric, bese insimbi igcwaliswa kuyo. Ngemva kokugcwalisa, insimbi eyengeziwe izosuswa yi-cmp.

Izinyathelo eziyinhloko zenqubo ye-dual damascene zifaka:

▪ Ukususwa kwesendlalelo se-dielectric:

Beka ungqimba lwezinto ze-dielectric, njenge-silicon dioxide (SiO2), ku-semiconductori-wafer.

▪ I-Photolithography ukuchaza iphethini:

Sebenzisa i-photolithography ukuchaza iphethini yama-vias kanye nemisele engqimbeni ye-dielectric.

▪Ukuqopha:

Dlulisa iphethini yama-vias kanye nemisele ungqimba lwe-dielectric ngenqubo yokuqopha eyomile noma emanzi.

▪ Ukususwa kwensimbi:

Faka insimbi, njengethusi (Cu) noma i-aluminium (Al), kuma-vias nasemifuleni ukuze wakhe ukuxhumana kwensimbi.

▪ Ukupholisha ngomshini ngamakhemikhali:

Ukupholisha ngomshini ubuso bensimbi ngamakhemikhali ukuze kususwe insimbi eningi futhi kuthambe indawo.

Uma kuqhathaniswa nenqubo yokukhiqiza yendabuko yokuxhumanisa insimbi, inqubo ye-dual damascene inezinzuzo ezilandelayo:

▪Izinyathelo zenqubo ezilula:Ngokwakha ama-vias kanye nemisele ngesikhathi esisodwa esinyathelweni esifanayo senqubo, izinyathelo zenqubo kanye nesikhathi sokukhiqiza ziyancishiswa.

▪Ukuthuthukiswa kokusebenza kahle kokukhiqiza:ngenxa yokunciphisa izinyathelo zenqubo, inqubo ye-damascene ephindwe kabili ingathuthukisa ukusebenza kahle kokukhiqiza futhi inciphise izindleko zokukhiqiza.

▪Thuthukisa ukusebenza kwezixhumanisi zensimbi:inqubo ye-damascene ekabili ingafeza ukuxhumana kwensimbi okunciphile, ngaleyo ndlela ithuthukise ukuhlanganiswa nokusebenza kwamasekethe.

▪Nciphisa amandla okumelana nezibungu kanye nokumelana nazo:ngokusebenzisa izinto ze-dielectric ezisezingeni eliphansi kanye nokwenza ngcono isakhiwo sezixhumanisi zensimbi, amandla okumelana nezinambuzane kungancishiswa, kuthuthukiswe isivinini kanye nokusebenza kwamandla kwesekethe.