Dual-Damascene yog ib txoj kev siv tshuab los tsim cov hlau sib txuas hauv cov integrated circuits. Nws yog ib qho kev txhim kho ntxiv ntawm cov txheej txheem Damascus. Los ntawm kev tsim cov qhov thiab cov grooves tib lub sijhawm hauv tib kauj ruam txheej txheem thiab sau lawv nrog hlau, kev tsim cov hlau sib txuas ua ke tau ua tiav.
Vim li cas nws thiaj hu ua Damascus?
Lub nroog Damascus yog lub nroog peev ntawm Syria, thiab cov ntaj Damascus nto moo rau lawv qhov ntse thiab cov qauv zoo nkauj. Ib hom txheej txheem inlay yog qhov yuav tsum tau ua: ua ntej, cov qauv xav tau raug engraved rau ntawm qhov chaw ntawm Damascus hlau, thiab cov ntaub ntawv npaj ua ntej raug kaw nruj nreem rau hauv cov grooves engraved. Tom qab inlay tiav lawm, qhov chaw yuav tsis sib npaug me ntsis. Tus kws ua tes yuav ua tib zoo txhuam nws kom ntseeg tau tias qhov du tag nrho. Thiab cov txheej txheem no yog tus qauv ntawm cov txheej txheem Damascus ob chav ntawm cov nti. Ua ntej, cov grooves lossis qhov raug engraved rau hauv txheej dielectric, thiab tom qab ntawd hlau raug sau rau hauv lawv. Tom qab sau, cov hlau ntau dhau yuav raug tshem tawm los ntawm cmp.
Cov kauj ruam tseem ceeb ntawm cov txheej txheem dual damascene suav nrog:
▪ Kev tso cov txheej dielectric:
Tso ib txheej ntawm cov khoom siv dielectric, xws li silicon dioxide (SiO2), rau ntawm lub semiconductorncuav mog qab zib.
▪ Kev siv tshuab photolithography los txhais cov qauv:
Siv photolithography los txhais cov qauv ntawm vias thiab trenches ntawm txheej dielectric.
▪Kev kos duab:
Hloov cov qauv ntawm vias thiab trenches mus rau txheej dielectric los ntawm cov txheej txheem qhuav lossis ntub etching.
▪ Kev tso hlau rau hauv av:
Tso cov hlau, xws li tooj liab (Cu) lossis txhuas (Al), rau hauv vias thiab trenches los tsim cov hlau sib txuas.
▪ Kev txhuam txhuam siv tshuaj lom neeg:
Kev txhuam hniav siv tshuaj lom neeg los ntxuav cov hlau kom tshem tawm cov hlau ntau dhau thiab ua kom qhov chaw tiaj tus.
Piv nrog rau cov txheej txheem tsim khoom siv hlau sib txuas, cov txheej txheem damascene ob chav muaj cov txiaj ntsig zoo li nram no:
▪Cov kauj ruam yooj yim:los ntawm kev tsim cov vias thiab cov trenches tib lub sijhawm hauv tib kauj ruam txheej txheem, cov kauj ruam txheej txheem thiab lub sijhawm tsim khoom raug txo qis.
▪Kev ua haujlwm zoo dua qub:vim yog kev txo cov kauj ruam ntawm cov txheej txheem, cov txheej txheem damascene ob chav tuaj yeem txhim kho kev tsim khoom thiab txo cov nqi tsim khoom.
▪Txhim kho kev ua tau zoo ntawm cov hlau sib txuas:cov txheej txheem damascene ob chav tuaj yeem ua tiav cov hlau sib txuas nqaim dua, yog li txhim kho kev koom ua ke thiab kev ua tau zoo ntawm cov circuits.
▪Txo cov kab mob parasitic capacitance thiab kev tiv thaiv:Los ntawm kev siv cov ntaub ntawv dielectric qis-k thiab kev ua kom zoo dua cov qauv ntawm cov hlau sib txuas, parasitic capacitance thiab kev tiv thaiv tuaj yeem txo qis, txhim kho qhov ceev thiab kev siv hluav taws xob ntawm cov circuits.
Lub sijhawm tshaj tawm: Kaum Ib Hlis-25-2024