Dual-Damascene inyanzvi yekushanda inoshandiswa kugadzira simbi dzinobatana mumasekete akabatanidzwa. Inzira yekuwedzera yekushanda kweDamascus. Nekugadzira maburi nepakati pemakomba panguva imwe chete muchikamu chimwe chete chekushanda uye kuzadza nesimbi, kugadzirwa kwesimbi dzinobatana kunoitika.
Sei ichinzi Dhamasiko?
Guta reDhamasiko ndiro guta guru reSiriya, uye minondo yeDhamasiko inozivikanwa nekupinza kwayo uye magadzirirwo ayo akanaka. Rudzi rwenzira yekuisa zvinhu mukati runodiwa: kutanga, patani inodiwa inonyorwa pamusoro pesimbi yeDamascus, uye zvinhu zvakagadzirwa kare zvinoiswa zvakasimba mumigero yakavezwa. Mushure mekunge inlay yapera, pamusoro payo panogona kunge pasina kuenzana. Nyanzvi ichaipukuta nokungwarira kuti ive nechokwadi chekuti yakatsetseka. Uye iyi nzira ndiyo muenzaniso wenzira mbiri dzeDhamasiko dzechip. Kutanga, migero kana maburi anonyorwa mu dielectric layer, uye simbi inozadzwa maari. Mushure mekuzadza, simbi yakawandisa inobviswa ne cmp.
Matanho makuru ekuita kwe "dual damascene process" anosanganisira:
▪ Kubviswa kwechikamu che dielectric:
Isa jira rezvinhu zve dielectric, zvakaita sesilicon dioxide (SiO2), pa semiconductorchifukidziro.
▪ Photolithography yekutsanangura maitiro acho:
Shandisa photolithography kutsanangura maitiro emavias nemakomba ari pa dielectric layer.
▪Kucheka:
Chinja maitiro ema "vias" nema "trench" kuenda kune "dielectric layer" kuburikidza ne "dry or wet etching process".
▪ Kubviswa kwesimbi:
Isa simbi, dzakadai semhangura (Cu) kana aruminiyamu (Al), mumapiyasi nemakomba kuti ugadzire masimbi akabatana.
▪ Kupolisha kwemakemikari:
Kukwesha simbi nemakemikari kuti ibvise simbi yakawandisa uye kuti pamusoro payo pave patete.
Kana tichienzanisa nemaitiro ekugadzira esimbi ekubatanidza simbi, maitiro ekugadzira damascene ane mabhenefiti anotevera:
▪ Matanho ari nyore ekuita:Nekugadzira ma "vias" nema "trench" panguva imwe chete muchikamu chimwe chete che "process", matanho e "process" nenguva yekugadzira zvinoderedzwa.
▪Kubudirira kwekugadzira zvinhu:nekuda kwekuderedzwa kwematanho ekuita, maitiro maviri eDamascene anogona kuvandudza kushanda zvakanaka kwekugadzira uye kuderedza mari yekugadzira.
▪Kuvandudza mashandiro ekubatanidza simbi:Maitiro ekubatanidza simbi mbiri anogona kuita kuti simbi dzibatane zvishoma, nokudaro zvichivandudza kubatanidzwa uye kushanda kwemasekete.
▪Deredza kugona kwezvipembenene uye kuramba zvipembenene:nekushandisa zvinhu zve dielectric zvine low-k uye kugadzirisa maumbirwo esimbi dzinobatana, kugona kweparasitic uye resistance zvinogona kuderedzwa, zvichivandudza kumhanya uye kushandiswa kwesimba kwemasekete.
Nguva yekutumira: Mbudzi-25-2024