Kodi njira yokonzekera ya CMP ndi yotani?

Dual-Damascene ndi ukadaulo wa njira zomwe zimagwiritsidwa ntchito popanga zolumikizira zitsulo m'mabwalo ophatikizika. Ndi chitukuko china cha njira ya Damascus. Mwa kupanga mabowo ndi mipata nthawi imodzi mu gawo lomwelo la njira ndikuzidzaza ndi chitsulo, kupanga kophatikizana kwa zolumikizira zitsulo kumachitika.

N’chifukwa chiyani imatchedwa Damasiko?

Mzinda wa Damasiko ndi likulu la Syria, ndipo malupanga a Damasiko ndi otchuka chifukwa cha kuthwa kwawo komanso kapangidwe kake kokongola. Njira yolowera mkati imafunika: choyamba, kapangidwe kofunikira kamalembedwa pamwamba pa chitsulo cha Damascus, ndipo zinthu zomwe zakonzedwa kale zimayikidwa mwamphamvu m'mizere yojambulidwa. Pambuyo poti mizereyo yamalizidwa, pamwamba pake pakhoza kukhala popachikika pang'ono. Wopanga adzapukuta mosamala kuti atsimikizire kuti zonse zikuyenda bwino. Ndipo njira iyi ndi chitsanzo cha njira ziwiri za Damascus za chip. Choyamba, mizere kapena mabowo amalembedwa mu dielectric layer, kenako chitsulo chimadzazidwamo. Pambuyo podzaza, chitsulo chowonjezera chidzachotsedwa ndi cmp.

Masitepe akuluakulu a ndondomeko ya damascene iwiri ndi awa:

▪ Kutaya kwa gawo la dielectric:

Ikani wosanjikiza wa zinthu zamagetsi, monga silicon dioxide (SiO2), pa semiconductorchikwama cha mkate.

▪ Photolithography kuti ifotokoze kapangidwe kake:

Gwiritsani ntchito photolithography kuti mufotokoze mawonekedwe a ma vias ndi ma trenches pa dielectric layer.

▪Kudula:

Samutsani kapangidwe ka ma vias ndi ma trenches kupita ku dielectric layer kudzera mu njira youma kapena yonyowa yocheka.

▪ Kutaya chitsulo:

Ikani zitsulo, monga mkuwa (Cu) kapena aluminiyamu (Al), m'ma vias ndi m'maenje kuti mupange zolumikizira zitsulo.

▪ Kupukuta makina pogwiritsa ntchito mankhwala:

Kupukuta kwa makina pamwamba pa chitsulo kuti muchotse chitsulo chochulukirapo ndikupangitsa pamwamba pake kukhala pathanzi.

Poyerekeza ndi njira yachikhalidwe yopangira zolumikizira zitsulo, njira ya dual damascene ili ndi zabwino izi:

▪Njira zosavuta zochitira zinthu:Mwa kupanga ma vias ndi ngalande nthawi imodzi mu gawo lomwelo la ndondomekoyi, njira zoyendetsera ntchito ndi nthawi yopangira zinthu zimachepetsedwa.

▪Kukonza bwino zinthu:Chifukwa cha kuchepa kwa njira zoyendetsera zinthu, njira ziwiri za damascene zitha kupititsa patsogolo ntchito yopanga zinthu ndikuchepetsa ndalama zopangira.

▪Kuwongolera magwiridwe antchito a zolumikizira zachitsulo:Njira ya damascene iwiri imatha kukwaniritsa kulumikizana kwachitsulo kopapatiza, motero kumawongolera kuphatikiza ndi magwiridwe antchito a ma circuits.

▪Kuchepetsa mphamvu ya tizilombo toyambitsa matenda komanso kukana kwake:Pogwiritsa ntchito zipangizo zamagetsi zotsika-k ndikukonza kapangidwe ka zolumikizira zachitsulo, mphamvu ya parasitic ndi kukana zitha kuchepetsedwa, zomwe zimapangitsa kuti ma circuits azigwira ntchito mwachangu komanso mwachangu.