Ni ubuhe buryo bwo gutegura CMP?

Dual-Damascene ni ikoranabuhanga rikoreshwa mu gukora imiyoboro y'ibyuma mu miyoboro ihujwe. Ni iterambere ryinshi ry'imiyoboro ya Damascus. Mu gukora imyobo n'imirongo icyarimwe mu ntambwe imwe y'imiyoboro no kubyuzuzamo ibyuma, hakorwa ikorwa ry'imiyoboro y'ibyuma ihujwe.

Kuki yitwa Damasiko?

Umujyi wa Damasiko ni umurwa mukuru wa Siriya, kandi inkota za Damasiko zizwiho ubukana bwazo n'imiterere yazo myiza. Hakenewe ubwoko bw'inzira yo gushyiramo: icya mbere, igishushanyo gisabwa gishushanywa ku buso bw'icyuma cya Damasiko, kandi ibikoresho byateguwe mbere bigashyirwa neza mu myenge yashushanyijwe. Nyuma y'uko imiterere irangiye, ubuso bushobora kuba butangana gato. Umufundi azabusukura neza kugira ngo burusheho kuba bwiza. Kandi iyi nzira ni yo ngero y'inzira ebyiri za Damasiko z'iki gikoresho. Icya mbere, myenge cyangwa imyobo irashushanywa mu urwego rwa dielectric, hanyuma icyuma kikuzuzwamo. Nyuma yo kuzuza, icyuma gisigaye kizakurwaho na cmp.

Intambwe z'ingenzi z'igikorwa cya damascene ebyiri zirimo:

▪ Gushyiramo urwego rwa dielectric:

Shyira urwego rw'ibikoresho bya dielectric, nka silicon dioxide (SiO2), kuri semiconductoragace gato.

▪ Fotolithography kugira ngo isobanure imiterere:

Koresha fotolithography kugira ngo usobanure imiterere y'ibice n'imiyoboro ku gice cy'amashanyarazi.

▪Gushushanya:

Hindura imiterere y'ibice n'imiyoboro ku gipimo cya dielectric binyuze mu gukata byumye cyangwa bitose.

▪ Gukuraho icyuma:

Suka ibyuma, nka umuringa (Cu) cyangwa aluminiyumu (Al), mu byuma binini n'imiyoboro kugira ngo habeho imiyoboro y'ibyuma.

▪ Gusukura imashini hakoreshejwe imiti:

Gusukura icyuma hakoreshejwe imiti kugira ngo ukureho icyuma gisigaye no kugorora ubuso.

Ugereranyije n'uburyo busanzwe bwo gukora ibyuma bihuza ibyuma, uburyo bwa damascene ebyiri bufite ibyiza bikurikira:

▪Intambwe zoroshye zo gukora:Mu gukora imiyoboro n'imiyoboro icyarimwe mu ntambwe imwe y'igikorwa, intambwe z'igikorwa n'igihe cyo kugikora biragabanuka.

▪ Kongera ubushobozi mu nganda:Kubera kugabanuka kw'intambwe z'ibikorwa, inzira ya damascene ebyiri ishobora kunoza imikorere myiza y'inganda no kugabanya ikiguzi cy'umusaruro.

▪Kunoza imikorere y'ibyuma bihuza:Uburyo bwa damascene bubiri bushobora kugera ku mikoranire y'ibyuma mito, bityo bikanoza guhuza no gukora neza kw'imiyoboro.

▪Kugabanya ubushobozi bw'udukoko n'ubudahangarwa bw'udukoko:hakoreshejwe ibikoresho bya dielectric bifite low-k no kunoza imiterere y’ibyuma bihuza, ubushobozi bwa parasite n’ubudahangarwa bishobora kugabanuka, bikongera umuvuduko n’imikorere y’ingufu by’urukiramende.