Ko te Dual-Damascene he hangarau tukanga e whakamahia ana hei hanga hononga whakarewa i roto i ngā ara iahiko whakauru. He whanaketanga anō tēnei o te tukanga Damascus. Mā te hanga i roto i ngā kōhao me ngā awaawa i te wā kotahi i roto i te taahiraa tukanga kotahi me te whakakī i aua kōhao ki te whakarewa, ka tutuki te hanga hononga whakarewa whakauru.
He aha i huaina ai ko Ramahiku?
Ko te tāone o Ramahiku te tāone matua o Hiria, ā, he rongonui ngā hoari Ramahiku mō ō rātou koi me te ātaahua o te kakano. Me whai i tētahi momo tukanga tārai: tuatahi, ka whakairohia te tauira e hiahiatia ana ki te mata o te maitai Ramahiku, ā, ka tāraitia ngā rauemi kua oti te whakarite ki roto i ngā awaawa whakairo. Kia oti te tārai, tera pea he paku koretake te mata. Ka āta whakakanapahia e te tohunga toi kia maeneene ai te katoa. Ā, ko tēnei tukanga te tauira o te tukanga rua Ramahiku o te maramara. Tuatahi, ka whakairohia ngā awaawa, ngā kōhao rānei ki te paparanga dielectric, kātahi ka whakakīia te konganuku ki roto. Whai muri i te whakakī, ka tangohia te konganuku taikaha mā te cmp.
Ko ngā mahi matua o te tukanga damascene takirua ko:
▪ Te whakatakotoranga o te paparanga hikohiko:
Whakatakotoria he paparanga o ngā rauemi dielectric, pērā i te silicon dioxide (SiO2), ki runga i te semiconductorpapa.
▪ Te whakaahua-ipurangi hei tautuhi i te tauira:
Whakamahia te whakaahua-lithography hei tautuhi i te tauira o ngā vias me ngā awaawa i runga i te paparanga dielectric.
▪Te whakairo:
Whakawhitihia te tauira o ngā awaawa me ngā rua ki te paparanga ārai-hiko mā te tukanga whakairo maroke, mākū rānei.
▪ Te whakatakotoranga o te konganuku:
Whakatakotoria te mea whakarewa, pērā i te parahi (Cu) me te konumohe (Al) rānei, ki roto i ngā awaawa me ngā rua hei hanga hononga whakarewa.
▪ Te whakakanapa matū ā-ringa:
Te whakakanapa matū me te ā-pūkaha o te mata whakarewa hei tango i te konganuku taikaha, hei whakapapatahi hoki i te mata.
Ki te whakatauritea ki te tukanga hanga hononga whakarewa tuku iho, ko ngā painga o te tukanga damascene takirua e whai ake nei:
▪Ngā mahi māmā ake:Mā te hanga i ngā awaawa me ngā rua i te wā kotahi i te taahiraa tukanga kotahi, ka whakaitihia ngā taahiraa tukanga me te wā hanga.
▪Te whakapai ake i te whai huatanga o te hanga:Nā te whakaiti i ngā mahi tukatuka, ka taea e te tukanga damascene takirua te whakapai ake i te whai huatanga o te hanga me te whakaiti i ngā utu whakaputa.
▪Whakapai ake i te mahi a ngā hononga whakarewa:Ka taea e te tukanga damascene takirua te whakatutuki i ngā hononga whakarewa whaiti ake, ā, ka whakapai ake i te whakaurunga me te mahi o ngā ara iahiko.
▪Whakaitihia te kaha me te ātete o te pirinoa:Mā te whakamahi i ngā rauemi hiko iti-k me te arotau i te hanganga o ngā hononga whakarewa, ka taea te whakaiti i te kaha me te ātete pirinoa, ka whakapai ake i te tere me te mahi whakapau kaha o ngā ara iahiko.
Wā tuku: Whiringa-ā-rangi 25-2024