Zoben mayar da hankali na shafi na CVD

Zoben mayar da hankali na murfin CVD Hoton da aka Fito

Takaitaccen Bayani:

Zoben Murfi na CVD don Zane-zanen Plasma an tsara shi ne don inganta rarrabawar plasma da inganta daidaiton zane-zane a cikin tsarin zane-zane na zamani. Yana da wani abu mai ƙarfi na Si ko SiC tare da murfin CVD SiC mai tsarki, yana ba da juriya mai kyau ga plasma, samar da barbashi mai ƙarancin ƙarfi, da tsawon rai na sabis. Ana amfani da shi sosai a cikin hanyoyin zane-zanen plasma na ICP da CCP, wannan zoben mai mayar da hankali yana rage tasirin gefen yadda ya kamata, yana daidaita halayen ion, kuma yana kare sassan ɗakin daga zaizayar ƙasa da gurɓatawa. Yana da mahimmanci don amfani don cimma babban yawan amfanin ƙasa da daidaiton tsari a cikin masana'antar semiconductor mai ci gaba.

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Cikakken Bayani game da Samfurin

Alamun Samfura

Zoben Murfin Murfin CVD don Etching na Plasma muhimmin sashi ne na amfani da ake amfani da shi a cikin tsarin etching na semiconductor na zamani. An ƙera shi da tsarin haɗakar murfin substrate + CVD, an ƙera wannan samfurin don inganta rarrabawar plasma, inganta daidaiton etching, da kuma tsawaita tsawon rayuwar sassan ɗakin.

A Vet Energy, muna amfani da ƙwarewa mai zurfi a fasahar adana tururin sinadarai (CVD) da kayan yumbu na zamani don isar da zoben mayar da hankali waɗanda suka cika ƙa'idodin ƙa'idodin na'urorin semiconductor na zamani, gami da hanyoyin FinFET da 3D NAND.

Matsayin Zoben Mai da Hankali a cikin Zane-zanen Plasma

A cikin tsarin etching na plasma (kamar ICP da CCP reactors), zoben mayar da hankali yana tsaye a kusa da gefen wafer kuma yana taka muhimmiyar rawa wajen daidaita tsari da aikin samar da amfanin gona.

1. Kula da Daidaito na Plasma

Zoben da aka mayar da hankali yana aiki a matsayin iyaka ta lantarki da ta zahiri wanda ke taimakawa wajen daidaita rarrabawar yawan plasma a saman wafer.

Muhimman fa'idodi:

● Inganta daidaiton ƙimar etch
● Rage bambancin tsakiya zuwa gefe
● Ingantaccen maimaituwa na tsari

2. Diyya Tasirin Gefen

Ba tare da zoben mayar da hankali ba, ɓarkewar murfin plasma a gefen wafer na iya haifar da ƙwanƙwasa mara tsari.

Zoben mayar da hankali yana aiki yadda ya kamata a matsayin "tsawaita wafer na kama-da-wane", yana rage abubuwan da ba su da alaƙa da gefen kamar:

● Yin etching fiye da kima a gefunan wafer
● Bambancin girma mai mahimmanci (CD)
● Ɓarnatar da bayanin martaba

3. Tsarin Hanya da Kula da Makamashi na Ion

Ta hanyar rinjayar filin lantarki na gida, zoben mayar da hankali yana taimakawa wajen daidaita kusurwoyin ion da rarraba makamashi, wanda yake da mahimmanci ga:

● Babban rabon al'amari (HAR) etching
● Kula da bayanin martaba na Anisotropic
● Rage lalacewar gefe