Lesale la tlhokomelo ea sekoahelo sa CVD

Lesale la ho Tsepamisa la CVD bakeng sa ho Etching ka Plasma ke karolo ea bohlokoa e ka sebelisoang lits'ebetsong tse tsoetseng pele tsa ho etching tsa semiconductor. E entsoe ka sebopeho se kopaneng sa substrate + CVD coating, sehlahisoa sena se etselitsoe ho ntlafatsa kabo ea plasma, ho ntlafatsa ho tšoana ha ho etching, le ho atolosa bophelo ba karolo ea kamore.

Ho Vet Energy, re sebelisa boiphihlelo bo tebileng theknolojing ea ho boloka mouoane oa lik'hemik'hale (CVD) le thepa e tsoetseng pele ea letsopa ho fana ka masale a tsepamisoang a fihlelang litlhoko tse thata tsa li-node tsa semiconductor tsa sejoale-joale, ho kenyeletsoa le lits'ebetso tsa FinFET le 3D NAND.

Karolo ea Lesale la Tsepamiso ho Ho Etching ka Plasma

Litsamaisong tsa ho fata ka plasma (joalo ka li-reactor tsa ICP le CCP), lesale la ho tsepamisa maikutlo le behiloe ho potoloha moeli oa wafer 'me le bapala karolo ea bohlokoa botsitsong ba ts'ebetso le ts'ebetso ea chai.

1. Taolo ea ho Tšoana ha Plasma

Lesale la ho tsepamisa maikutlo le sebetsa e le moeli oa motlakase le oa 'mele o thusang ho laola kabo ea bongata ba plasma holim'a wafer.

Melemo ea bohlokoa:

● Ho tšoana ho ntlafetseng ha sekhahla sa etch
● Phapang e fokotsehileng pakeng tsa bohareng le moeli
● Ho ntlafala ha ho pheta-phetoa ha ts'ebetso

2. Puseletso ea Phello ea Edge

Ntle le lesale la ho tsepamisa mohopolo, ho sotha ha plasma sheath pheletsong ea wafer ho ka lebisa ho se betle ho sa lekanang.

Lesale la ho tsepamisa maikutlo le sebetsa hantle e le "katoloso ea wafer ea sebele", e fokotsa lintho tse sa tloaelehang tse amanang le moeli tse kang:

● Ho hlaba ka mokhoa o feteletseng mathōkong a wafer
● Ho kheloha ha tekanyo e mahlonoko (CD)
● Ho sotha profil

3. Tsela ea Ion le Taolo ea Matla

Ka ho susumetsa tšimo ea motlakase ea sebakeng seo, lesale la ho tsepamisa maikutlo le thusa ho tsitsisa likhutlo tsa ketsahalo ea li-ion le kabo ea matla, e leng sa bohlokoa bakeng sa:

● Ho betla ka tekanyo e phahameng ea likarolo (HAR)
● Taolo ea boemo ba Anisotropic
● Tšenyo e fokotsehileng ea lebota la lehlakore

4. Tšireletso ea Kamore le Phokotso ea Tšilafalo

Jwalo ka karolo ya sehlabelo, lesale la ho tsepamisa maikutlo le monya tlhahiso e tobileng ya plasma le dihlahiswa tse ding tsa ho e beha.

Melemo e hlahang:

● Khoholeho ea lebota la kamore e fokotsehileng
● Tšilafalo e tlase ea likaroloana
● Metsotso e atolositsoeng ea tlhokomelo (metsotso ea PM)