Mphete yoyang'ana kwambiri ya CVD

Mphete yowunikira ya CVD Chithunzi Chodziwika

Kufotokozera Kwachidule:

Mphete Yoyang'ana pa CVD Coating ya Plasma Etching yapangidwa kuti iwonjezere kufalikira kwa plasma ndikuwonjezera kufanana kwa etching mu makina apamwamba a etch. Yokhala ndi gawo lolimba la Si kapena SiC lophatikizidwa ndi CVD SiC coating yoyera kwambiri, imapereka kukana kwapamwamba kwa plasma, kupanga tinthu tating'onoting'ono tochepa kwambiri, komanso moyo wautali wautumiki. Yogwiritsidwa ntchito kwambiri mu njira za ICP ndi CCP plasma etching, mphete yoyang'ana iyi imachepetsa bwino zotsatira za m'mphepete, imakhazikika machitidwe a ion, ndikuteteza zigawo za chipinda kuti zisakokoloke ndi kuipitsidwa. Ndi chinthu chofunikira kwambiri chomwe chingagwiritsidwe ntchito kuti pakhale zokolola zambiri komanso kusinthasintha kwa njira zopangira semiconductor zapamwamba.

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Tsatanetsatane wa Zamalonda

Ma tag a Zamalonda

Mphete Yoyang'ana Pakuphimba kwa CVD ya Plasma Etching ndi gawo lofunika kwambiri lomwe limagwiritsidwa ntchito mu makina apamwamba oboola a semiconductor. Yopangidwa ndi kapangidwe kophatikizana ka substrate + CVD, chinthuchi chapangidwa kuti chiwongolere kufalikira kwa plasma, kukonza kufanana kwa etching, ndikuwonjezera moyo wa gawo la chipinda.

Ku Vet Energy, timagwiritsa ntchito ukadaulo wozama mu ukadaulo wa chemical vapor deposition (CVD) ndi zipangizo zapamwamba zadothi kuti tipereke mphete zowunikira zomwe zimakwaniritsa zofunikira za ma semiconductor nodes amakono, kuphatikiza njira za FinFET ndi 3D NAND.

Udindo wa Mphete Yoyang'ana Pakujambula Plasma

Mu machitidwe odulira plasma (monga ma ICP ndi ma CCP reactors), mphete yolunjika imayikidwa mozungulira m'mphepete mwa wafer ndipo imagwira ntchito yofunika kwambiri pakukhazikika kwa njira ndi magwiridwe antchito a zokolola.

1. Kulamulira Kufanana kwa Plasma

Mphete yolunjika imagwira ntchito ngati malire amagetsi komanso enieni omwe amathandiza kuwongolera kufalikira kwa plasma pamwamba pa wafer.

Ubwino waukulu:

● Kulinganiza bwino kwa mlingo wa etch
● Kusintha kwapakati kuchokera pakati mpaka m'mphepete
● Kubwerezabwereza kwa njira yowonjezereka

2. Kulipira kwa Edge Effect

Popanda mphete yolunjika, kusokonekera kwa plasma sheath m'mphepete mwa wafer kungayambitse kudulidwa kosafanana.

Mphete yowunikira imagwira ntchito bwino ngati "kuwonjezera kwa wafer weniweni", kuchepetsa zolakwika zokhudzana ndi m'mphepete monga:

● Kudula kwambiri m'mphepete mwa wafer
● Kupatuka kwa gawo lofunikira (CD)
● Kusokoneza mbiri

3. Kuwongolera kwa Ion ndi Kulamulira Mphamvu

Pogwiritsa ntchito mphamvu zamagetsi am'deralo, mphete yowunikira imathandiza kukhazikika kwa ma ion activity angles ndi kugawa mphamvu, zomwe ndizofunikira kwambiri pa:

● Kujambula kwa chiŵerengero chapamwamba (HAR)
● Kuwongolera mbiri ya Anisotropic
● Kuwonongeka kwa mbali ya khoma kwachepa

4. Kuteteza ndi Kuchepetsa Kuipitsidwa kwa Chipinda

Monga gawo lopereka nsembe, mphete yowunikira imatenga plasma mwachindunji ndi zinthu zina zomwe zimayikidwa.

Ubwino wotsatira:

● Kuchepa kwa kukokoloka kwa makoma a chipinda
● Kuchepetsa kuipitsidwa kwa tinthu tating'onoting'ono
● Nthawi yokonza yotalikirapo (nthawi zocheperako)

Yapitayi: Kaseti ndi Chonyamulira cha SiC Wafer

Ena: Mphete Yoyang'ana pa CVD SiC ya Njira Yopangira Semiconductor