Impeta yo kwibandaho yo gusiga CVD

Ibisobanuro bigufi:

Impeta yo gusiga plasma ya CVD Coating yo gusiga plasma yagenewe kunoza ikwirakwizwa rya plasma no kunoza uburinganire mu buryo bwo gusiga plasma mu buryo bugezweho. Ifite substrate ikomeye ya Si cyangwa SiC ivanze n'impeta ya CVD SiC ifite ubuziranenge bwinshi, itanga ubudahangarwa bwiza bwa plasma, ikora uduce duto cyane, kandi igakomeza igihe kirekire. Iyi mpeta yo gusiga plasma ya ICP na CCP, igabanya ingaruka nziza ku nkombe, igatuza imyitwarire ya iyoni, kandi ikarinda ibice by'icyumba kwangirika no kwanduzwa. Ni ikintu cy'ingenzi gikoreshwa kugira ngo haboneke umusaruro mwinshi kandi habeho imikorere ihamye mu nganda zikora semiconductor.

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Impeta yo gushushanya CVD yo gushushanya plasma ni igice cy'ingenzi gikoreshwa mu gushushanya plasma mu buryo bugezweho. Yakozwe mu buryo buvanze bw'ibumba rya substrate + CVD, iki gicuruzwa cyagenewe kunoza ikwirakwizwa rya plasma, kunoza uburinganire bw'ibumba, no kongera igihe cy'ubuzima bw'igice cy'icyumba.

Muri Vet Energy, dukoresha ubuhanga bwimbitse mu ikoranabuhanga rya CVD n'ibikoresho bya keramike bigezweho kugira ngo dutange impeta z'icyerekezo zihuye n'ibisabwa bikomeye bya node za semiconductor zigezweho, harimo na FinFET na 3D NAND processes.

Uruhare rw'Impeta yo Kwibandaho mu Gushushanya Plasma

Mu buryo bwo gushushanya plasma (nk'imashini zikora ICP na CCP), impeta yo kwibandaho ishyirwa ku nkengero za wafer kandi igira uruhare runini mu gutuma inzira ihora ihagaze neza no gukora neza.

1. Kugenzura Ubumwe bw'Amaraso mu Mutwe

Impeta yo kwibandaho ikora nk'umupaka w'amashanyarazi n'uw'umubiri ufasha mu kugenzura ikwirakwizwa ry'ubucucike bwa plasma ku buso bwa wafer.

Ibyiza by'ingenzi:

● Uburyo bworoshye bwo guhuza igipimo cy'ibishushanyo
● Impinduka zo hagati zigabanuka
● Kongera ubushobozi bwo gusubiramo ibikorwa

2. Inyungu za Edge Effects

Iyo hatabayeho impeta yo kwibandaho, plasma sheath ihindagurika ku nkengero za wafer ishobora gutuma habaho gushushanya ku buryo butari bumwe.

Impeta yo kwibandaho ikora neza nk' "inyongera ya wafer isanzwe", ikagabanya ibibazo bifitanye isano n'inkombe nka:

● Gushyiramo cyane ku mpande za wafer
● Gutandukana kw'ibipimo by'ingenzi (CD)
● Guhindura imiterere y'ishusho

3. Uburyo bwo kugenzura ingufu za Ion n'uburyo bwo kuzigenzura

Mu kugira ingaruka ku ngufu z'amashanyarazi zo mu gace, impeta y'icyerekezo ifasha mu gutuza inguni z'inguni z'amashanyarazi n'ikwirakwizwa ry'ingufu, ibyo bikaba ari ingenzi kuri:

● Gushushanya ku gipimo cyo hejuru cy'ubuso (HAR)
● Kugenzura imiterere ya Anisotropic
● Kwangirika kw'urukuta kugabanuka