Sashen rabin wata mai rufi na SiC Graphitemuhimmin sashi ne da ake amfani da shi a cikin tsarin kera semiconductor, musamman ga kayan aikin epitaxial na SiC. Tsarin tsarinsa da halayen kayansa suna ƙayyade inganci da ingancin samarwa na wafers na epitaxial kai tsaye.
Gina ɗakin amsawa:
Bangaren rabin wata ya ƙunshi sassa biyu, sassan sama da ƙasa, waɗanda aka haɗa su wuri ɗaya don samar da ɗakin girma mai rufewa, wanda ke ɗaukar sinadarin silicon carbide (yawanci 4H-SiC ko 6H-SiC) kuma yana cimma haɓakar Layer na epitaxial ta hanyar sarrafa filin kwararar iskar gas daidai (kamar cakuda SiH₄, C₃H₈, da H₂).
Tsarin filin zafin jiki:
Tushen graphite mai tsabta tare da murfin dumama na induction zai iya kiyaye daidaiton zafin ɗakin (cikin ±5°C) a babban zafin jiki na 1500-1700°C don tabbatar da daidaiton kauri na Layer epitaxial.
Jagorar kwararar iska:
Ta hanyar tsara matsayin shigar iska da fitar da iska (kamar shigar iska ta gefe da kuma fitar iska ta sama ta jikin tanda mai kwance), ana jagorantar kwararar iskar gas ta hanyar saman substrate don rage lahani na girma da hayaniya ke haifarwa.
Tushe abu: high-tsarki graphite
Bukatun tsarki:sinadarin carbon ≥99.99%, sinadarin toka ≤5ppm, don tabbatar da cewa babu wani datti da zai gurɓata layin epitaxial a yanayin zafi mai yawa.
Fa'idodin aiki:
Babban ƙarfin lantarki na thermal:Tsarin watsa zafi a zafin ɗaki ya kai 150W/(m・K), wanda yake kusa da matakin jan ƙarfe kuma yana iya canja wurin zafi cikin sauri.
Ƙarancin faɗuwa:5×10-6/℃ (25-1000℃), wanda ya dace da sinadarin silicon carbide (4.2×10)-6/℃), yana rage tsagewar murfin da ke haifar da matsin lamba na zafi.
Daidaiton sarrafawa:Ana samun juriya mai girma na ±0.05mm ta hanyar injin CNC don tabbatar da rufe ɗakin.
Bambancin aikace-aikace na CVD SiC da CVD TaC
| Shafi | Tsarin aiki | Kwatanta | Aikace-aikacen yau da kullun |
| CVD-SiC | Zafin jiki: 1000-1200℃Matsakaicin matsin lamba: 10-100 Torr | Tauri HV2500, kauri 50-100um, kyakkyawan juriya ga iskar shaka (bargaza a ƙasa da 1600℃) | Tanderun epitaxial na duniya, waɗanda suka dace da yanayi na yau da kullun kamar hydrogen da silane |
| CVD-TaC | Zafin jiki: 1600-1800℃Matsakaicin matsin lamba: 1-10 Torr | Taurin HV3000, kauri 20-50um, mai jure tsatsa sosai (zai iya jure iskar gas mai lalata kamar HCl, NH₃, da sauransu) | Muhalli masu yawan lalata (kamar kayan aikin GaN epitaxy da etching), ko kuma ayyuka na musamman da ke buƙatar yanayin zafi mai tsanani na 2600°C |
VET Energy ƙwararriyar masana'anta ce da ke mai da hankali kan bincike da samar da kayayyaki masu inganci kamar su graphite, silicon carbide, quartz, da kuma maganin kayan aiki kamar su SiC, TaC, gilashin carbon, pyrolytic carbon coating, da sauransu. Ana amfani da samfuran sosai a fannin photovoltaic, semiconductor, sabon makamashi, ƙarfe, da sauransu.
Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na cikin gida, waɗanda za su iya samar muku da ƙarin mafita na kayan aiki na ƙwararru.
Fa'idodin Makamashin VET sun haɗa da:
• Masana'antar da ke da ita da kuma dakin gwaje-gwajen ƙwararru;
• Matakan tsarki da inganci a masana'antu;
• Farashi mai gasa & Lokacin isarwa da sauri;
• Haɗin gwiwa da yawa na masana'antu a duk duniya;
Muna maraba da ku da ku ziyarci masana'antarmu da dakin gwaje-gwajenmu a kowane lokaci!
