SiC Mai Rufaffen Graphite Halfmoon Partwani maɓalli ne mai mahimmanci da aka yi amfani da shi a cikin matakan masana'antu na semiconductor, musamman don kayan aikin SiC epitaxial. Muna amfani da fasahar mu ta haƙƙin mallaka don yin ɓangaren rabin wata tare da tsafta mai matuƙar ƙarfi, ingantaccen sutura mai kyau da kyakkyawar rayuwar sabis, kazalika da juriya mai ƙarfi da kaddarorin thermal kwanciyar hankali.
Base abu: high-tsarki graphite
Bukatun tsarki:abun ciki na carbon ≥99.99%, abun cikin ash ≤5ppm, don tabbatar da cewa babu wani ƙazanta da ke tasowa don gurɓata Layer epitaxial a babban yanayin zafi.
Amfanin aiki:
High thermal conductivity:Matsakaicin zafin jiki a dakin da zafin jiki ya kai 150W / (m・K), wanda ke kusa da matakin jan karfe kuma zai iya canja wurin zafi da sauri.
Ƙarƙashin ƙimar haɓakawa:5×10-6/ ℃ (25-1000 ℃), matching da silicon carbide substrate (4.2×10)-6/ ℃), rage raguwa na suturar da ke haifar da damuwa na thermal.
Daidaiton sarrafawa:Ana samun juriyar juzu'i na ± 0.05mm ta hanyar injin CNC don tabbatar da hatimin ɗakin.
Aikace-aikace daban-daban na CVD SiC da CVD TaC
| Tufafi | Tsari | Kwatanta | Aikace-aikace na yau da kullun |
| CVD-SiC | Zazzabi: 1000-1200 ℃Matsi: 10-100 Torr | Hardness HV2500, kauri 50-100um, m oxidation juriya (barga a kasa 1600 ℃) | Tanderun epitaxial na duniya, wanda ya dace da yanayi na al'ada kamar hydrogen da silane |
| CVD-TaC | Zazzabi: 1600-1800 ℃Matsi: 1-10 Torr | Hardness HV3000, kauri 20-50um, musamman lalata-resistant (zai iya jure lalata iskar gas kamar HCl, NH₃, da dai sauransu). | Mahalli masu lalacewa (kamar GaN epitaxy da kayan etching), ko matakai na musamman da ke buƙatar matsanancin zafi na 2600°C |
Ingancin dubawa
Rufe kauri: Laser kauri ma'auni (daidaitacce ± 1um) ko SEM giciye-section bincike.
Ƙarfin haɗin gwiwa: gwajin karce (mahimmin nauyi> 50N) ko gwajin ultrasonic (sautin saurin sauti> 5000m/s).
Juriya na lalata: yawan asarar taro (<0.1 mg/cm²・h) an gwada shi a cikin yanayin HCl (5 vol%, 1600℃).
VET Energy ne mai sana'a manufacturer mayar da hankali a kan R & D da kuma samar da high-karshen ci-gaba kayan kamar graphite, silicon carbide, ma'adini, kazalika da kayan magani kamar SiC shafi, TaC shafi, glassy carbon shafi, pyrolytic carbon shafi, da dai sauransu A kayayyakin da ake amfani da ko'ina a photovoltaic, semiconductor, sabon makamashi, karfe, da dai sauransu.
Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na gida, za su iya samar da ƙarin ƙwararrun kayan aiki don ku.
Abubuwan amfani da makamashi na VET sun haɗa da:
• Ma'aikata da kuma ƙwararrun dakin gwaje-gwaje;
• matakan tsabta masu jagorancin masana'antu da inganci;
• Farashin farashi & Lokacin bayarwa da sauri;
• Haɗin gwiwar masana'antu da yawa a duniya;
Muna maraba da ku zuwa vist mu masana'anta da dakin gwaje-gwaje a kowane lokaci!
