Sashen Zane Mai Rufi na SiC don Silicon Carbide Epitaxial Tanderu

Sashen Zane Mai Rufi na SiC don Silicon Carbide Epitaxial Firewall Hoton da aka Fito

Takaitaccen Bayani:

VET Energy ƙwararriyar masana'anta ce kuma mai samar da kayan haɗin kai na tanderun silicon carbide na epitaxial. Sashenmu na halfmoon mai rufi da SiC yana amfani da graphite mai tsabta tare da fasahar rufe CVD mai ci gaba. An tsara shi don yanayin epitaxial mai zafi da lalatawa sosai. Graphite mai tsabta yana ba wa ɓangaren kyakkyawan juriya ga zafin jiki (>1600℃) da kwanciyar hankali na zafi, yana tabbatar da daidaiton filin zafi; murfin CVD yana samar da wani katafaren kariya mai yawa a saman ta hanyar fasahar CVD, yana inganta halayen hana oxidation da hana etching sosai, kuma yana tsawaita rayuwar sabis da fiye da sau 3.

Kayan aiki:Graphite mai tsarki sosai

Tsarkakewa:＜5ppm

Shafi:CVD-SiC ko CVD-TaC

Keɓancewa:Tanderu mai alama ko OEM

Aika mana imel Sauke shi azaman PDF

Cikakken Bayani game da Samfurin

Alamun Samfura

Sashen rabin wata mai rufi na SiC Graphitemuhimmin sashi ne da ake amfani da shi a cikin tsarin kera semiconductor, musamman ga kayan aikin epitaxial na SiC. Muna amfani da fasaharmu mai lasisi don yin ɓangaren rabin wata tare da tsarki mai yawa, daidaiton shafi mai kyau da kuma kyakkyawan tsawon rai na sabis, da kuma juriya ga sinadarai da kuma yanayin kwanciyar hankali na zafi.

Tushe abu: high-tsarki graphite
Bukatun tsarki:sinadarin carbon ≥99.99%, sinadarin toka ≤5ppm, don tabbatar da cewa babu wani datti da zai gurɓata layin epitaxial a yanayin zafi mai yawa.
Fa'idodin aiki:
Babban ƙarfin lantarki na thermal:Tsarin watsa zafi a zafin ɗaki ya kai 150W/(m・K), wanda yake kusa da matakin jan ƙarfe kuma yana iya canja wurin zafi cikin sauri.
Ƙarancin faɗuwa:5×10^-6/℃ (25-1000℃), wanda ya dace da sinadarin silicon carbide (4.2×10)^-6/℃), yana rage tsagewar murfin da ke haifar da matsin lamba na zafi.
Daidaiton sarrafawa:Ana samun juriya mai girma na ±0.05mm ta hanyar injin CNC don tabbatar da rufe ɗakin.

Bambancin aikace-aikace na CVD SiC da CVD TaC

Shafi	Tsarin aiki	Kwatanta	Aikace-aikacen yau da kullun
CVD-SiC	Zafin jiki: 1000-1200℃Matsakaicin matsin lamba: 10-100 Torr	Tauri HV2500, kauri 50-100um, kyakkyawan juriya ga iskar shaka (bargaza a ƙasa da 1600℃)	Tanderun epitaxial na duniya, waɗanda suka dace da yanayi na yau da kullun kamar hydrogen da silane
CVD-TaC	Zafin jiki: 1600-1800℃Matsakaicin matsin lamba: 1-10 Torr	Taurin HV3000, kauri 20-50um, mai jure tsatsa sosai (zai iya jure iskar gas mai lalata kamar HCl, NH₃, da sauransu)	Muhalli masu yawan lalata (kamar kayan aikin GaN epitaxy da etching), ko kuma ayyuka na musamman da ke buƙatar yanayin zafi mai tsanani na 2600°C

Duba inganci

Kauri na shafi: ma'aunin kauri na laser (daidai ± 1um) ko nazarin sassan SEM.
Ƙarfin ɗaurewa: gwajin karce (nauyi mai mahimmanci > 50N) ko gwajin ultrasonic (gudun sauti > 5000m/s).
Juriyar tsatsa: ƙimar asarar taro (<0.1 mg/cm²・h) an gwada shi a cikin yanayin HCl (5 vol%, 1600℃).

VET Energy ƙwararriyar masana'anta ce da ke mai da hankali kan bincike da samar da kayayyaki masu inganci kamar su graphite, silicon carbide, quartz, da kuma maganin kayan aiki kamar su SiC, TaC, gilashin carbon, pyrolytic carbon coating, da sauransu. Ana amfani da samfuran sosai a fannin photovoltaic, semiconductor, sabon makamashi, ƙarfe, da sauransu.

Ƙungiyarmu ta fasaha ta fito ne daga manyan cibiyoyin bincike na cikin gida, waɗanda za su iya samar muku da ƙarin mafita na kayan aiki na ƙwararru.

Fa'idodin Makamashin VET sun haɗa da:
• Masana'antar da ke da ita da kuma dakin gwaje-gwajen ƙwararru;
• Matakan tsarki da inganci a masana'antu;
• Farashi mai gasa & Lokacin isarwa da sauri;
• Haɗin gwiwa da yawa na masana'antu a duk duniya;

Muna maraba da ku da ku ziyarci masana'antarmu da dakin gwaje-gwajenmu a kowane lokaci!