Igice cya SiC gikozwe muri Graphite Half Moonni igice cy'ingenzi gikoreshwa mu gukora ibikoresho bya semiconductor, cyane cyane ku bikoresho bya epitaxial bya SiC. Imiterere yabyo n'imiterere y'ibikoresho bigena neza ubwiza n'ubushobozi bw'umusaruro wa epitaxial wafers.
Imiterere y'icyumba cyo gusubizamo ingaruka:
Igice cy'igice cy'ukwezi kigizwe n'ibice bibiri, igice cyo hejuru n'icyo hasi, bifatanye kugira ngo bikore icyumba gifunze cyo gukuramo, gifata substrate ya silicon carbide (ubusanzwe 4H-SiC cyangwa 6H-SiC) kandi kigakura mu gice cya epitaxial binyuze mu kugenzura neza ikirere cy'imyuka (nk'uruvange rwa SiH₄, C₃H₈, na H₂).
Igenzura ry'ubushyuhe mu murima:
Igikoresho cya grafiti gifite isuku nyinshi gihujwe n'icyuma gishyushya induction gishobora kugumana ubushyuhe bw'icyumba kimwe (muri ± 5°C) ku bushyuhe buri hejuru ya 1500-1700°C kugira ngo gikomeze kuba urwego rw'ubugari bw'urwego rwa epitaxial.
Ubuyobozi bw'umuyoboro w'umwuka:
Mu gushushanya aho umwuka winjirira n'aho usohoka (nk'aho umwuka winjirira ku ruhande n'aho umwuka wo hejuru usohoka mu itanura ritambitse), urujya n'uruza rw'umwuka runyura mu gice cy'ubutaka kugira ngo bigabanye ibibazo byo gukura biterwa n'umuvuduko.
Ibikoresho by'ibanze: grafiti ifite isuku nyinshi
Ibisabwa ku isuku:ingano ya karuboni ≥99.99%, ingano y'ivu ≤5ppm, kugira ngo hatagira umwanda uterwa n'amazi ngo wanduze urwego rwa epitaxial ku bushyuhe bwinshi.
Ibyiza by'imikorere:
Ubushobozi bwo gutwara ubushyuhe bwinshi:Ubushyuhe bugera kuri 150W/(m・K), buri hafi y'urugero rw'umuringa kandi bushobora kohereza ubushyuhe vuba.
Igipimo cyo kwaguka kiri hasi:5×10-6/℃ (25-1000℃), ihuye na substrate ya silicon carbide (4.2×10-6/℃), bigabanya guturika kw'igitambaro giterwa n'ubushyuhe.
Uburyo bwo gutunganya neza:Ubushobozi bwo kwihanganira ± 0.05mm bugerwaho binyuze mu gutunganya CNC kugira ngo icyumba gifungwe neza.
Uburyo butandukanye bwo gukoresha CVD SiC na CVD TaC
| Gupfuka | Inzira | Kugereranya | Uburyo busanzwe bwo gukoresha |
| CVD-SiC | Ubushyuhe: 1000-1200℃ Umuvuduko: 10-100 Torr | Ubukomere HV2500, ubunini 50-100um, ubudahangarwa bwiza bwo kurwanya okiside (buhamye munsi ya 1600℃) | Amatanura ya epitaxial akoreshwa mu kirere gisanzwe nka hydrogen na silane, akwiriye gukoreshwa mu buryo busanzwe. |
| CVD-TaC | Ubushyuhe: 1600-1800℃ Umuvuduko: 1-10 Torr | Ubukomere HV3000, ubunini bwa 20-50um, irwanya ingese cyane (ishobora kwihanganira imyuka ihumanya nka HCl, NH₃, nibindi) | Ahantu hangiza cyane (nk'ibikoresho byo gukata bya GaN n'ibikoresho byo gukata), cyangwa ibikorwa byihariye bisaba ubushyuhe buri hejuru cyane bwa 2600°C |
VET Energy ni uruganda rw’umwuga rwibanda ku bushakashatsi n’iterambere no gukora ibikoresho bigezweho nka grafiti, silicon carbide, quartz, ndetse no gutunganya ibikoresho nka SiC coating, TaC coating, ikirahure cya karuboni, pyrolytic carbon coating, nibindi. Ibi bicuruzwa bikoreshwa cyane mu bushyuhe bwa photovoltaic, semiconductor, new energy, metallurgy, nibindi.
Itsinda ryacu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora kuguha ibisubizo by’ibikoresho by’umwuga.
Ibyiza bya VET Energy birimo:
• Laboratwari yawe bwite y'uruganda n'iy'umwuga;
• Urwego rw'ubuziranenge n'ubwiza bya mbere mu nganda;
• Igiciro gishimishije & Igihe cyo gutanga vuba;
• Ubufatanye bwinshi mu nganda ku isi yose;
Turaguhaye ikaze gusura uruganda rwacu na laboratwari igihe icyo ari cyo cyose!
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