Akụkụ ọkara ọnwa nke SiC graphite a kpụchara akpụbụ isi ihe eji eme ihe na usoro mmepụta semiconductor, ọkachasị maka ngwa epitaxial SiC. Nhazi nhazi ya na ihe onwunwe ya na-ekpebi kpọmkwem ịdị mma na arụmọrụ mmepụta nke wafers epitaxial.
Nhazi ụlọ mmeghachi omume:
Akụkụ ọkara ọnwa nwere akụkụ abụọ, akụkụ elu na ala, nke a na-ejikọta ọnụ iji mepụta ụlọ uto mechiri emechi, nke na-anabata ihe mkpuchi silicon carbide (nke na-abụkarị 4H-SiC ma ọ bụ 6H-SiC) ma na-enweta uto oyi akwa epitaxial site na ijikwa kpọmkwem ubi mmiri gas (dịka ngwakọta nke SiH₄, C₃H₈, na H₂).
Nhazi mpaghara okpomọkụ:
Ntọala graphite dị ọcha nke jikọtara ya na eriri ọkụ induction nwere ike idobe otu okpomọkụ ụlọ ahụ (n'ime ±5°C) na oke okpomọkụ nke 1500-1700°C iji hụ na ọkpụrụkpụ oyi akwa epitaxial na-adịgide adịgide.
Ntuziaka maka usoro ikuku:
Site n'ịmepụta ọnọdụ nke ntinye na mpụta ikuku (dịka ntinye ikuku n'akụkụ na mpụta ikuku n'elu nke ahụ ọkụ kwụ ọtọ), a na-eduzi mmiri laminar gas mmeghachi omume site na elu substrate iji belata ntụpọ uto nke ọgba aghara kpatara.
Isi ihe: graphite dị ọcha nke ukwuu
Ihe achọrọ maka ịdị ọcha:ọdịnaya carbon ≥99.99%, ọdịnaya ntụ ≤5ppm, iji hụ na ọ dịghị ihe ruru unyi ọ bụla na-eme ka ọ merụọ oyi akwa epitaxial n'oge okpomọkụ dị elu.
Uru arụmọrụ:
Oke okpomọkụ na-achịkwa nke ọma:Ọkwa okpomọkụ n'ime ụlọ na-eru 150W/(m・K), nke dị nso na ọkwa ọla kọpa ma nwee ike ibufe okpomọkụ ngwa ngwa.
Ọnụọgụ mgbasawanye dị ala:5 × 10-6/℃ (25-1000℃), nke kwekọrọ na ihe mkpuchi silicon carbide (4.2×10)-6/℃), na-ebelata mgbawa nke mkpuchi ahụ nke nrụgide okpomọkụ kpatara.
Nhazi izi ezi:A na-enweta ndidi nha nke ±0.05mm site na igwe CNC iji hụ na e mechiri ụlọ ahụ.
Ngwa dị iche iche nke CVD SiC na CVD TaC
| Mkpuchi | Usoro | Ntụnyere | Ngwa nkịtị |
| CVD-SiC | Okpomọkụ: 1000-1200℃Nrụgide: 10-100 Torr | Ike HV2500, ọkpụrụkpụ 50-100um, ezigbo nguzogide oxidation (kwụsiri ike n'okpuru 1600℃) | Ọkụ epitaxial zuru ụwa ọnụ, nke dabara adaba maka ikuku nkịtị dịka hydrogen na silane |
| CVD-TaC | Okpomọkụ: 1600-1800℃Nrụgide: 1-10 Torr | Ike HV3000, ọkpụrụkpụ ya bụ 20-50um, ọ na-eguzogide nchara nke ukwuu (nwere ike iguzogide gas ndị na-emebi emebi dịka HCl, NH₃, wdg.) | Gburugburu ebe siri ike nke ukwuu (dịka ngwa GaN epitaxy na ihe etching), ma ọ bụ usoro pụrụ iche nke chọrọ oke okpomọkụ dị elu nke 2600°C |
VET Energy bụ ọkachamara na-emepụta ihe na-elekwasị anya na R&D na mmepụta nke ihe ndị dị elu dị ka graphite, silicon carbide, quartz, yana ọgwụgwọ ihe dịka mkpuchi SiC, mkpuchi TaC, mkpuchi carbon iko, mkpuchi carbon pyrolytic, wdg. A na-eji ngwaahịa ndị a eme ihe n'ọtụtụ ebe na fotovoltaic, semiconductor, ike ọhụrụ, metallurgy, wdg.
Ndị otu teknụzụ anyị sitere na ụlọ ọrụ nyocha kacha elu n'ime obodo, ha nwere ike inye gị azịza ihe ọkachamara karịa.
Uru ike VET gụnyere:
• Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara nke ya;
• Ọkwa na ịdị ọcha nke ụlọ ọrụ mmepụta ihe na-eduga n'ịdị ọcha;
• Ọnụ ahịa asọmpi & Oge nnyefe ngwa ngwa;
• Mmekọrịta dị iche iche n'etiti ụlọ ọrụ n'ụwa niile;
Anyị na-anabata gị ka ị gaa leta ụlọ ọrụ mmepụta ihe na ụlọ nyocha anyị n'oge ọ bụla!
