Mahele Halfmoon SiC Coated Graphitehe mea nui i hoʻohana ʻia i nā kaʻina hana semiconductor, ʻoi aku hoʻi no nā lako epitaxial SiC. Hoʻohana mākou i kā mākou ʻenehana patented e hana i ka hapa hapalua mahina me ka maʻemaʻe kiʻekiʻe loa, ka like ʻole o ka uhi ʻana a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai paʻa wela.
Mea kumu: graphite maʻemaʻe kiʻekiʻe
Pono maʻemaʻe:carbon maʻiʻo ≥99.99%, lehu maʻiʻo ≤5ppm, e hōʻoiaʻiʻoʻaʻohe haumia i precipitated e hoʻohaumia i ka epitaxial papa ma kiʻekiʻe wela.
Nā pono hana:
Kiʻekiʻe thermal conductivity:Hiki i ka 150W/(m・K) ka wela wela ma ka lumi wela, kahi kokoke i ka pae keleawe a hiki ke hoʻololi koke i ka wela.
ʻĀpana hoʻonui haʻahaʻa:5×10-6/ ℃ (25-1000 ℃), e pili ana i ka substrate carbide silika (4.2×10-6/ ℃), e hōʻemi ana i ka haki ʻana o ka uhi i hana ʻia e ke kaumaha wela.
Ka pololei o ka hana ana:Loaʻa ka hoʻomanawanui ʻana o ± 0.05mm ma o ka mīkini CNC e hōʻoia i ka sila ʻana o ke keʻena.
Nā noi like ʻole o CVD SiC a me CVD TaC
| Ka uhi ʻana | Kaʻina hana | Hoʻohālikelike | Hoʻohana maʻamau |
| CVD-SiC | Temperaute: 1000-1200 ℃ Puhi: 10-100 Torr | ʻO ka paʻakikī HV2500, mānoanoa 50-100um, kūpaʻa maikaʻi i ka oxidation (paʻa ma lalo o 1600 ℃) | ʻO nā kapuahi epitaxial universal, kūpono i nā lewa maʻamau e like me ka hydrogen a me ka silane |
| CVD-TaC | Ka Mahana: 1600-1800 ℃ Pihi: 1-10 Torr | ʻO ka paʻakikī HV3000, ka mānoanoa 20-50um, hiki ke pale i nā kinoea corrosive e like me HCl, NH₃, etc.) | ʻO nā kaiapuni ʻino loa (e like me GaN epitaxy a me nā mea hana etching), a i ʻole nā kaʻina hana kūikawā e koi ana i nā wela kiʻekiʻe loa o 2600°C |
Nānā maikaʻi
Ka mānoanoa o ka uhi: ana mānoanoa laser (pololei ± 1um) a i ʻole ka nānā ʻana i ka ʻāpana SEM.
ʻO ka ikaika paʻa: ka hoʻāʻo ʻana (ka ukana koʻikoʻi > 50N) a i ʻole ka hoʻāʻo kani ultrasonic (ka wikiwiki kani > 5000m/s).
ʻO ke kūpaʻa ʻino: hoʻāʻo ʻia ma ka lewa HCl (5 vol%, 1600 ℃).
ʻO VET Energy kahi mea hana loea e kālele ana i ka R&D a me ka hana ʻana i nā mea kiʻekiʻe kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc.
Hele mai kā mākou hui ʻenehana mai nā keʻena noiʻi kūloko kiʻekiʻe, hiki iā ia ke hāʻawi i nā hoʻonā ʻoihana ʻoihana hou aku no ʻoe.
Loaʻa nā pono o ka VET Energy:
• hale hana ponoi a me ka hale hana oihana;
• nā pae maʻemaʻe alakaʻi alakaʻi a me ka maikaʻi;
• Kūʻai hoʻokūkū & manawa hāʻawi wikiwiki;
• Nā hui ʻoihana lehulehu ma ka honua holoʻokoʻa;
Hoʻokipa mākou iā ʻoe e kipa i kā mākou hale hana a me ka hale hana i kēlā me kēia manawa!
