ʻĀpana Halfmoon Graphite i uhi ʻia ʻo SiChe ʻāpana koʻikoʻi i hoʻohana ʻia i nā kaʻina hana semiconductor, ʻoi aku hoʻi no nā lako epitaxial SiC. Hoʻohana mākou i kā mākou ʻenehana i hoʻopaʻa ʻia e hana i ka ʻāpana halfmoon me ka maʻemaʻe kiʻekiʻe loa, ka like ʻana o ka uhi maikaʻi a me ke ola lawelawe maikaʻi loa, a me ke kūpaʻa kemika kiʻekiʻe a me nā waiwai kūpaʻa wela.
Mea kumu: graphite maʻemaʻe kiʻekiʻe
Nā koi maʻemaʻe:ʻO ka nui o ke kalapona ≥99.99%, ka nui o ka lehu ≤5ppm, e hōʻoia i ʻole e hoʻoheheʻe ʻia nā mea haumia e haumia ai ka papa epitaxial i nā mahana kiʻekiʻe.
Nā pono hana:
Ka hoʻokele wela kiʻekiʻe:ʻO ka conductivity thermal ma ka mahana o ka lumi a hiki i 150W/(m・K), kokoke i ka pae o ke keleawe a hiki ke hoʻoili koke i ka wela.
Ka helu hoʻonui haʻahaʻa:5×10-6/℃ (25-1000℃), e hoʻohālikelike ana i ka substrate silicon carbide (4.2 × 10-6/℃), e hōʻemi ana i ka nahā ʻana o ka uhi i hoʻokumu ʻia e ke kaumaha wela.
Ka pololei o ka hana ʻana:Hoʻokō ʻia ka hoʻomanawanui ana o ±0.05mm ma o ka mīkini CNC e hōʻoia i ka sila ʻana o ke keʻena.
Nā noi ʻokoʻa o CVD SiC a me CVD TaC
| Uhi ʻana | Kaʻina Hana | Hoʻohālikelike | Hoʻohana maʻamau |
| CVD-SiC | Mahana: 1000-1200℃ Kaomi: 10-100 Torr | Paʻakikī HV2500, mānoanoa 50-100um, kūpaʻa oxidation maikaʻi loa (paʻa ma lalo o 1600 ℃) | Nā umu epitaxial honua, kūpono no nā lewa maʻamau e like me ka hydrogen a me ka silane |
| CVD-TaC | Mahana: 1600-1800℃ Kaomi: 1-10 Torr | Paʻakikī HV3000, mānoanoa 20-50um, kūpaʻa loa i ka pala (hiki ke kū i nā kinoea pala e like me HCl, NH₃, a pēlā aku) | Nā wahi ʻino loa (e like me GaN epitaxy a me nā lako etching), a i ʻole nā kaʻina hana kūikawā e koi ana i nā mahana kiʻekiʻe loa o 2600°C |
Nānā maikaʻi
Mānoanoa o ka uhi ʻana: ke ana o ka mānoanoa laser (pololei ±1um) a i ʻole ka nānā ʻana o ka ʻāpana kea SEM.
Ikaika hoʻopaʻa: hoʻāʻo ʻōpala (kaumaha koʻikoʻi > 50N) a i ʻole hoʻāʻo ultrasonic (wikiwiki kani > 5000m/s).
Ke kūpaʻa ʻana i ka palaho: ka nui o ka pohō nuipa (<0.1 mg/cm²・h) i hoʻāʻo ʻia ma ka lewa HCl (5 vol%, 1600℃).
He mea hana ʻoihana ʻo VET Energy e kālele ana i ka R&D a me ka hana ʻana o nā mea holomua kiʻekiʻe e like me ka graphite, silicon carbide, quartz, a me ka mālama ʻana i nā mea e like me ka SiC coating, TaC coating, glassy carbon coating, pyrolytic carbon coating, etc. Hoʻohana nui ʻia nā huahana i ka photovoltaic, semiconductor, ikehu hou, metallurgy, etc.
Loaʻa kā mākou hui loea mai nā ʻoihana noiʻi kūloko kiʻekiʻe, hiki ke hāʻawi i nā hoʻonā mea ʻoihana hou aku nāu.
ʻO nā pono o VET Energy:
• Hale hana ponoʻī a me ke keʻena hoʻokolohua ʻoihana;
• Nā pae maʻemaʻe a me ka maikaʻi o ka ʻoihana;
• Kumukūʻai hoʻokūkū a me ka manawa hoʻouna wikiwiki;
• Nā hui like ʻana o nā ʻoihana he nui ma ka honua holoʻokoʻa;
Hoʻokipa mākou iā ʻoe e kipa i kā mākou hale hana a me ka hale hana i kēlā me kēia manawa!
