Chigadziko cheCeramic Wafer Heater AlN Alumina Heating Element

Chigadziko cheCeramic Wafer Heater AlN Alumina Heating Element
Mukugadzira ma semiconductor, ma wafer anofanirwa kugadziriswa nenzira dzakasiyana-siyana, dzakadai sekuiswa kwefirimu rakatetepa, kuchekwa, nezvimwewo. Muzvibatanidza izvi, ma wafer anofanirwa kudziiswa kusvika patembiricha yakati, uye pane zvinodiwa zvakasimba zvetembiricha, nekuti kufanana kwetembiricha kune simba guru pakubudirira kwechigadzirwa, uye zvikamu zvekupisa hazvifanirwe kuverengerwa.

Chitofu checeramicinoiswa zvakananga muimba yekugadzira uye inosangana zvakananga newafer. Haisi kungotakura wafer chete, asiwo inoita kuti wafer iwane tembiricha yakagadzikana uye yakafanana yekushanda. Izvo zvinhu zvakakosha mumidziyo ye semiconductor thin film deposition!

Chitofu checeramic chinosanganisira chigadziko checeramic chinotsigira wafer uye muviri we cylindrical unotsigira kumashure unochitsigira. Pamusoro pechinhu chinodzivisa (heating layer) chekudziyisa, kunewo ma electrodes eredhiyo (RF layer) mukati kana pamusoro pechigadziko checeramic. Kuti kupisa nekutonhodza nekukurumidza, ukobvu hwechigadziko checeramic hunofanira kunge hwakatetepa, asi hwakatetepa hunoderedzawo kuomarara.

Rutsigiro rwechitofu checeramic runowanzo gadzirwa nezvinhu zveceramic zvine thermal expansion coefficient yakafanana neye base. Chitofu chinoshandisa chimiro chakasiyana che shaft joint bottom kudzivirira ma terminals newaya kubva kumigumisiro ye plasma ne corrosive chemical gases. Rutsigiro rwacho rwakagadzirwa ne heat transfer gas inlet uye outlet pipe kuti ive nechokwadi chekuti heater inodziya ....

Chitofu checeramic chinogona kugadzirwa neceramic dzakadai sealuminium nitride (AlN), silicon nitride (Si3N4), uye alumina (Al2O3). Pakati pazvo, AlN ndiyo sarudzo yakanakisisa ye ceramic heaters. Kana ichienzaniswa nezvimwe zvinhu, VET Energy's AlN ceramic ine hunhu hunotevera:
(1) Kufambisa zvakanaka kwekupisa;
(2) Kuenzanisa kwekuwedzera kwekupisa nezvinhu zvesilicon zve semiconductor;
(3) Hunhu hwakanaka hwemakanika, hunodzivirira kupera zvakanaka, uye hunhu hwakakwana hwemakanika huri nani pane beryllium oxide uye hwakaenzana nealuminium oxide;
(4) Hunhu hwakanaka hwemagetsi hwakakwana, kudzivirira kupisa kwemagetsi kwakanaka uye kurasikirwa kwakaderera kwe dielectric;
(5) Hazvina chepfu uye hazvina njodzi kune zvakatipoteredza.