Ceramic Wafer Heater AlN Alumina Heating Element

Ceramic Wafer Heater AlN Alumina Heating Element
Mukugadzira semiconductor, mawaferi anofanirwa kugadziridzwa nenzira dzakasiyana siyana, senge yakaonda firimu deposition, etching, etc. Muzvibatanidza izvi, mawaferi anofanirwa kudziyirwa kune imwe tembiricha, uye pane zvakanyanya zvinodikanwa zvekupisa, nekuti kufanana kwekushisa kune zvakakosha zvakanyanya pagoho rechigadzirwa, uye zvinhu zvekudziya zvinonyanya kukosha.

Ceramic hitainoshandiswa zvakananga kukamuri yekugadzira uye inotarisana zvakananga newafer. Ivo havangotakure chete, asi zvakare vanove nechokwadi chekuti wafer inowana yakagadzikana uye yakafanana process tembiricha. Iwo akakosha zvikamu mune semiconductor yakaonda firimu deposition michina!

Iyo ceramic hita inosanganisira chigadziko checeramic chinotsigira wafer uye cylindrical tsigiro yemuviri kudivi rekuseri rinoitsigira. Pamusoro peiyo inopokana chinhu (yekupisa layer) yekudziya, kune zvakare radio frequency electrode (RF layer) mukati kana pamusoro peiyo ceramic base. Kuti uwane nekukurumidza kupisa uye kutonhora, ukobvu hweceramic base hunofanirwa kuve hutete, asi hutete hwakanyanya huchadzikisawo kuomarara.

Rutsigiro rweceramic hita inowanzogadzirwa neceramic material ine thermal yekuwedzera coefficient yakafanana neyechigadziko. Iyo hita inotora yakasarudzika chimiro cheshaft yakabatana pasi kuchengetedza materminal uye waya kubva pamhedzisiro yeplasma uye inoparadza kemikari magasi. Rutsigiro rwakashongedzerwa nekupisa kupisa gasi inlet uye pombi yekubuda kuti ive nechokwadi chekushisa chakafanana cheheater. Nheyo uye chitsigiro chinosungirirwa nekemikari nechisungo chekubatanidza.

Iyo ceramic hita inogona kugadzirwa nekeramics yakadai sealuminium nitride (AlN), silicon nitride (Si3N4), uye alumina (Al2O3). Pakati pavo, AlN ndiyo yakanakisa sarudzo yeceramic heaters. Kuenzaniswa nezvimwe zvinhu, VET Energy's AlN ceramic ine zvinotevera maitiro:
(1) Zvakanaka kupisa conductivity;
(2) Inofananidzwa nemafuta ekuwedzera coefficient kune semiconductor silicon zvinhu;
(3) Yakanaka ma mechanical properties, yakanakisa kupfeka kuramba, uye comprehensive mechanical properties zviri nani pane beryllium oxide uye yakaenzana nealuminium oxide;
(4) Yakanakisa yakazara yakazara magetsi zvivakwa, yakanakisa magetsi ekudzivirira uye yakaderera dielectric kurasikirwa;
(5) Non-chepfu uye zvakatipoteredza ushamwari.