Isifudumezi-sifudumezi seCeramic AlN Alumina Element yokuFundisa

Isifudumezi-sifudumezi seCeramic AlN Alumina Element yokuFundisa
Kwimveliso ye-semiconductor, ii-wafers kufuneka zicutshungulwe kwiinkqubo ezahlukeneyo, ezifana ne-deposition yefilimu ebhityileyo, i-etching, njl. Kwezi khonkco, ii-wafers kufuneka zifudunyezwe kwiqondo elithile lobushushu, kwaye kukho iimfuno ezingqongqo kwiqondo lokushisa, kuba ukufana kweqondo lokushisa kunempembelelo ebaluleke kakhulu kwimveliso yemveliso, kwaye izinto zokufudumeza ziyimfuneko.

Isifudumezi seCeramicisetyenziswe ngokuthe ngqo kwigumbi lenkqubo kwaye idibene ngokuthe ngqo ne-wafer. Abagcini nje ngokuthwala i-wafer, kodwa baqinisekisa ukuba i-wafer ifumana iqondo lokushisa elizinzileyo kunye nelinye. Zingamacandelo aphambili kwi-semiconductor encinci yezixhobo zokubeka ifilimu!

I-heater ye-ceramic iquka isiseko se-ceramic esixhasa i-wafer kunye ne-cylindrical support body on the back side that support it. Ukongeza kwinto yokumelana (i-heater) yokufudumeza, kukho kwakhona i-electrodes yerediyo (i-RF layer) ngaphakathi okanye kumphezulu wesiseko se-ceramic. Ukuze ufezekise ukufudumeza ngokukhawuleza kunye nokupholisa, ubukhulu besiseko se-ceramic kufuneka bube buncinci, kodwa buncinci kakhulu buya kunciphisa ukuqina.

Inkxaso ye-ceramic heater yenziwa ngokubanzi ngezinto ze-ceramic kunye ne-coefficient yokwandisa i-thermal efana nesiseko. I-heater ithatha isakhiwo esiyingqayizivele se-shaft joint bottom ukukhusela i-terminals kunye neengcingo kwimiphumo ye-plasma kunye neegesi zekhemikhali ezinobungozi. Inkxaso ixhotyiswe ngegesi yokungenisa ubushushu kunye nombhobho wokuphuma ukuze kuqinisekiswe ukushisa okufanayo kwe-heater. Isiseko kunye nenkxaso ziboshwe ngamachiza kunye nomgca wokudibanisa.

I-heater ye-ceramic ingenziwa ngeekeramics ezifana ne-aluminium nitride (AlN), i-silicon nitride (Si3N4), kunye ne-alumina (Al2O3). Phakathi kwabo, i-AlN lolona khetho lungcono kwii-heaters ze-ceramic. Xa kuthelekiswa nezinye izinto, i-VET Energy's AlN ceramic inezi mpawu zilandelayo:
(1) Ukuqhuba kakuhle kwe-thermal;
(2) Ukudibanisa i-coefficient yokwandisa i-thermal kwizinto ze-silicon ze-semiconductor;
(3) Iimpawu ezilungileyo zoomatshini, ukuxhathisa okugqwesileyo kokunxiba, kunye neempawu zoomatshini ezibanzi zingcono kune-beryllium oxide kwaye ilingana ne-aluminium oxide;
(4) Iimpawu zombane ezigqwesileyo ezibanzi, ukugqunywa kombane okugqwesileyo kunye nelahleko ephantsi ye-dielectric;
(5) Ayina tyhefu kwaye ayinabungozi kokusingqongileyo.