Maumbirwo emukati memidziyo yechubhu yechoto anotsanangurwa zvakadzama

Sezvakaratidzwa pamusoro apa, chinhu chakajairika

Chikamu chekutanga:

▪ Chinhu Chinodziisa (coil yekudziyisa):

iri pedyo nechubhu yechoto, inowanzogadzirwa newaya dzinodzivirira kupisa, dzinoshandiswa kupisa mukati mechubhu yechoto.

▪ Chubhu yeQuartz:

Huri pakati pechoto chinopisa, chakagadzirwa nequartz yakachena kwazvo inogona kutsungirira tembiricha yakakwira uye inoramba isina makemikari.

▪ Kudya Kwegasi:

Iri pamusoro kana parutivi pechubhu yechoto, inoshandiswa kutakura okisijeni kana mamwe magasi kuenda mukati mechubhu yechoto.

▪ SS Flange:

zvikamu zvinobatanidza machubhu e quartz nemitsetse yegesi, zvichiita kuti kubatana kwacho kuome uye kugadzikana.

▪ Mitsetse Yekupa Mafuta:

Mapaipi anobatanidza MFC nechiteshi chekupa gasi kuti ritumirwe gasi.

▪ MFC (Mutongi weMass Flow):

Mudziyo unodzora kufamba kwegasi mukati mechubhu yequartz kuti unyatso gadzirisa huwandu hwegasi hunodiwa.

▪ Vhudzi remhepo:

Inoshandiswa kuburitsa gasi rinobuda mumhepo kubva mukati mechubhu yechoto kuenda kunze kwemuchina.

Chikamu chezasi:

▪ Zvidimbu zveSilicon zviri muChibatiso:

Mawafer esilicon anochengetwa muHolder yakakosha kuti ave nechokwadi chekuti kupisa kwakafanana panguva yekupiswa kweoxidation.

▪ Chibatiso cheWafer:

Inoshandiswa kubata silicon wafer uye kuona kuti silicon wafer inoramba yakasimba panguva yekushanda kwayo.

▪ Chitsiko:

Chivako chinobata silicon wafer Holder, chinowanzogadzirwa nezvinhu zvinodzivirira kupisa kwakanyanya.

▪ Elevator:

Inoshandiswa kusimudza maWafer holders kupinda nekubuda mumachubhu equartz kuti ikwanise kurodha nekuburitsa mawafer esilicon otomatiki.

▪ Robhoti rekutamisa Wafer:

iri padivi pemudziyo wechubhu yechoto, inoshandiswa kubvisa otomatiki silicon wafer kubva mubhokisi uye kuiisa muchubhu yechoto, kana kuibvisa mushure mekugadzirisa.

▪ Kaseti Yokuchengetera Makaseti:

Kaseti yekuchengetera makaseti inoshandiswa kuchengetedza bhokisi rine mawafer esilicon uye inogona kutenderedzwa kuti robhoti rikwanise kupinda.

▪ Kaseti yeWafer:

Kaseti yewafer inoshandiswa kuchengeta nekutamisa mawafer esilicon kuti agadzirwe.