Isakhiwo sangaphakathi semishini yeshubhu yesithando sichazwe ngokuningiliziwe

Njengoba kuboniswe ngenhla, kuyinto evamile

Ingxenye yokuqala:

▪ Isici Sokushisa (ikhoyili yokushisa):

itholakala eduze kwepayipi lesithando, ngokuvamile elenziwe ngezintambo zokumelana, ezisetshenziselwa ukushisa ingaphakathi lepayipi lesithando.

▪ Ishubhu le-Quartz:

Ingaphakathi lesithando esishisayo se-oxidation, esenziwe nge-quartz emsulwa kakhulu engamelana namazinga okushisa aphezulu futhi ihlale ingangeni makhemikhali.

▪ Ukudla Kwegesi:

Itholakala engxenyeni engenhla noma ohlangothini lweshubhu lesithando, isetshenziselwa ukuthutha umoya-mpilo noma amanye amagesi ngaphakathi kweshubhu lesithando.

▪ I-SS Flange:

izingxenye ezixhumanisa amashubhu e-quartz kanye nemigqa yegesi, okuqinisekisa ukuqina nokuqina koxhumano.

▪ Imizila Yokuphakela Igesi:

Amapayipi axhumanisa i-MFC nechweba lokuphakelwa kwegesi ukuze kudluliselwe igesi.

▪ I-MFC (Umlawuli Wokugeleza Okukhulu):

Idivayisi elawula ukugeleza kwegesi ngaphakathi kwepayipi le-quartz ukuze ilawule ngokunembile inani legesi elidingekayo.

▪ Umoya wokungenisa umoya:

Isetshenziselwa ukukhipha igesi yokukhipha umoya ngaphakathi kwepayipi lesithando iye ngaphandle kwemishini.

Ingxenye engezansi:

▪ Ama-Silicon Wafers Asesibambisweni:

Ama-wafer e-silicon afakwa ku-Holder ekhethekile ukuqinisekisa ukushisa okufanayo ngesikhathi sokushiswa kwe-oxidation.

▪ Isibambi Se-Wafer:

Isetshenziselwa ukubamba i-silicon wafer nokuqinisekisa ukuthi i-silicon wafer ihlala izinzile phakathi nenqubo.

▪ Isisekelo:

Isakhiwo esibamba i-silicon wafer Holder, ngokuvamile esenziwe ngezinto ezimelana nokushisa okuphezulu.

▪ Ilifti:

Isetshenziselwa ukuphakamisa izibambo ze-Wafer zingene futhi ziphume kumashubhu e-quartz ukuze zilayishwe futhi zithululwe ngokuzenzakalelayo ama-wafer e-silicon.

▪ Irobhothi Lokudlulisa I-Wafer:

itholakala ohlangothini lwedivayisi yeshubhu lesithando, isetshenziselwa ukususa ngokuzenzakalelayo i-silicon wafer ebhokisini bese ifakwa eshubhu lesithando, noma ukuyisusa ngemva kokucutshungulwa.

▪ I-Carousel Yokugcina Amakhasethi:

I-carousel yokugcina amakhasethi isetshenziselwa ukugcina ibhokisi eliqukethe ama-wafer e-silicon futhi ingajikeleziswa ukuze kufinyelelwe ku-robot.

▪ Ikhasethi Yesitsha Esiyisikwele:

Ikhasethi ye-wafer isetshenziselwa ukugcina nokudlulisa ama-wafer e-silicon ukuze acutshungulwe.