Igice cya SiC Coated Graphite Halfmoon cya Silicon Carbide Epitaxial Furnace

Ibisobanuro bigufi:

VET Energy ni ikigo cy’umwuga mu gukora no gutanga ibikoresho by’ingenzi by’amatanura ya epitaxial ya silikoni. Igice cyacu cya graphite gikozwe muri SiC gikoresha graphite ifite isuku nyinshi hamwe n’ikoranabuhanga rigezweho ryo gusiga CVD. Yagenewe ibidukikije bya epitaxial bifite ubushyuhe bwinshi kandi byangiza cyane. Grafite ifite isuku nyinshi iha igice ubushobozi bwo kwirinda ubushyuhe bwinshi (>1600℃) no kudahinduka kw’ubushyuhe, bigatuma ubushyuhe bungana; CVD ikora urwego rwo kurinda hejuru binyuze mu ikoranabuhanga rya CVD, irushaho kunoza cyane imiterere yo kurwanya oxidation no kurwanya gutwika, kandi yongera igihe cyo kuyikoresha inshuro zirenga 3.

Ibikoresho:Grafiti ifite isuku nyinshi

Gusukura:＜5ppm

Gupfuka:CVD-SiC cyangwa CVD-TaC

Guhindura:Itanura ry'ikirango cyangwa OEM

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Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

Igice cya SiC gikozwe muri Graphite Half Moonni igice cy'ingenzi gikoreshwa mu gukora ibikoresho bya semiconductor, cyane cyane ku bikoresho bya epitaxial bya SiC. Dukoresha ikoranabuhanga ryacu ryemewe n'amategeko kugira ngo dukore igice cya half moon gifite isuku cyane, gifite irangi ringana neza kandi kikagira ubuzima bwiza, ndetse kikagira ubushobozi bwo kudakoresha imiti myinshi ndetse n'ubushobozi bwo kudahindagurika mu bushyuhe.

Ibikoresho by'ibanze: grafiti ifite isuku nyinshi
Ibisabwa ku isuku:ingano ya karuboni ≥99.99%, ingano y'ivu ≤5ppm, kugira ngo hatagira umwanda uterwa n'amazi ngo wanduze urwego rwa epitaxial ku bushyuhe bwinshi.
Ibyiza by'imikorere:
Ubushobozi bwo gutwara ubushyuhe bwinshi:Ubushyuhe bugera kuri 150W/(m・K), buri hafi y'urugero rw'umuringa kandi bushobora kohereza ubushyuhe vuba.
Igipimo cyo kwaguka kiri hasi:5×10^-6/℃ (25-1000℃), ihuye na substrate ya silicon carbide (4.2×10^-6/℃), bigabanya guturika kw'igitambaro giterwa n'ubushyuhe.
Uburyo bwo gutunganya neza:Ubushobozi bwo kwihanganira ± 0.05mm bugerwaho binyuze mu gutunganya CNC kugira ngo icyumba gifungwe neza.

Uburyo butandukanye bwo gukoresha CVD SiC na CVD TaC

Gupfuka	Inzira	Kugereranya	Uburyo busanzwe bwo gukoresha
CVD-SiC	Ubushyuhe: 1000-1200℃ Umuvuduko: 10-100 Torr	Ubukomere HV2500, ubunini 50-100um, ubudahangarwa bwiza bwo kurwanya okiside (buhamye munsi ya 1600℃)	Amatanura ya epitaxial akoreshwa mu kirere gisanzwe nka hydrogen na silane, akwiriye gukoreshwa mu buryo busanzwe.
CVD-TaC	Ubushyuhe: 1600-1800℃ Umuvuduko: 1-10 Torr	Ubukomere HV3000, ubunini bwa 20-50um, irwanya ingese cyane (ishobora kwihanganira imyuka ihumanya nka HCl, NH₃, nibindi)	Ahantu hangiza cyane (nk'ibikoresho byo gukata bya GaN n'ibikoresho byo gukata), cyangwa ibikorwa byihariye bisaba ubushyuhe buri hejuru cyane bwa 2600°C

Igenzura ry'ubuziranenge

Ubunini bw'igitambaro: igipimo cy'ubunini bwa laser (ubuziranenge ± 1um) cyangwa isesengura rya SEM.
Ingufu z'umugozi: ikizamini cyo gushwanyaguza (umutwaro ukomeye > 50N) cyangwa ikizamini cya ultrasound (umuvuduko w'amajwi > 5000m / s).
Ubudahangarwa bw'ubushyuhe: igipimo cyo gutakaza uburemere (<0.1 mg/cm²・h) cyageragejwe mu kirere cya HCl (5 vol%, 1600℃).

VET Energy ni uruganda rw’umwuga rwibanda ku bushakashatsi n’iterambere no gukora ibikoresho bigezweho nka grafiti, silicon carbide, quartz, ndetse no gutunganya ibikoresho nka SiC coating, TaC coating, ikirahure cya karuboni, pyrolytic carbon coating, nibindi. Ibi bicuruzwa bikoreshwa cyane mu bushyuhe bwa photovoltaic, semiconductor, new energy, metallurgy, nibindi.

Itsinda ryacu rya tekiniki rituruka mu bigo bikomeye by’ubushakashatsi mu gihugu, rishobora kuguha ibisubizo by’ibikoresho by’umwuga.

Ibyiza bya VET Energy birimo:
• Laboratwari yawe bwite y'uruganda n'iy'umwuga;
• Urwego rw'ubuziranenge n'ubwiza bya mbere mu nganda;
• Igiciro gishimishije & Igihe cyo gutanga vuba;
• Ubufatanye bwinshi mu nganda ku isi yose;

Turaguhaye ikaze gusura uruganda rwacu na laboratwari igihe icyo ari cyo cyose!