Ikehu VETʻO ka mea lawe graphite hana PECVD kahi mea hoʻopau kiʻekiʻe i hana ʻia no ke kaʻina hana PECVD (plasma enhanced chemical vapor deposition). Hana ʻia kēia mea lawe graphite me ka mea graphite maʻemaʻe kiʻekiʻe, me ke kūpaʻa wela kiʻekiʻe maikaʻi loa, ke kūpaʻa i ka corrosion, ke kūpaʻa dimensional a me nā ʻano ʻē aʻe, hiki ke hāʻawi i kahi kahua lawe paʻa no ke kaʻina hana PECVD, e hōʻoia i ka like a me ka palahalaha o ka waiho ʻana o ka ʻili lahilahi.
ʻO nā mea lawe graphite no ke kaʻina hana PECVD he mau ʻano kēia:
▪ Maʻemaʻe kiʻekiʻe: haʻahaʻa loa ka nui o ka haumia, e pale ana i ka haumia o ke kiʻiʻoniʻoni a me ka hōʻoia ʻana i ka maikaʻi o ke kiʻiʻoniʻoni.
▪ Kiʻekiʻe ka nui: kiʻekiʻe ka nui, ikaika mīkini kiʻekiʻe, hiki ke kū i ke kaiapuni PECVD wela a me ke kaomi kiʻekiʻe.
▪ Paʻa maikaʻi o ke ana: loli liʻiliʻi o ke ana ma ka mahana kiʻekiʻe, e hōʻoiaʻiʻo ana i ke kūpaʻa o ke kaʻina hana.
▪ Hoʻokele wela maikaʻi loa: hoʻoili pono i ka wela e pale aku i ka wela nui ʻana o ka wafer.
▪ Kū'ē ikaika i ka palaho: hiki ke kū'ē i ka ʻānai ʻia e nā kinoea palaho like ʻole a me ka plasma.
▪ Lawelawe i hoʻopilikino ʻia: hiki ke hoʻopilikino ʻia nā mea lawe graphite o nā nui a me nā ʻano like ʻole e like me nā pono o ka mea kūʻai.
Mea graphite mai SGL:
| ʻO ke ana maʻamau: R6510 | |||
| Papa Kuhikuhi | Kūlana hoʻāʻo | Waiwai | ʻĀpana |
| Ka nui o ka palaoa maʻamau | ISO 13320 | 10 | μm |
| Ka nui o ka nui | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Ka porosity hāmama | DIN66133 | 10 | % |
| Ka nui o nā pore waena | DIN66133 | 1.8 | μm |
| Ka hiki ke komo | DIN 51935 | 0.06 | kenimika²/s |
| ʻO ka paʻakikī Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Ke kū'ē uila kiko'ī | DIN IEC 60413/402 | 13 | μΩm |
| Ikaika kūlou | DIN IEC 60413/501 | 60 | MPa |
| Ikaika hoʻopaʻa | DIN 51910 | 130 | MPa |
| Modulus o Young | DIN 51915 | 11.5×10³ | MPa |
| Hoʻonui wela (20-200 ℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Ka hoʻokele wela (20 ℃) | DIN 51908 | 105 | Wm-1K-1 |
Ua hoʻolālā kūikawā ʻia no ka hana ʻana i nā cell solar kiʻekiʻe, e kākoʻo ana i ka hana wafer nui G12. Hoʻonui nui ka hoʻolālā lawe i hoʻomaikaʻi ʻia i ka throughput, e hiki ai ke kiʻekiʻe i nā helu hua a me nā kumukūʻai hana haʻahaʻa.
| Mea | ʻAno | Mea lawe wafer helu |
| Waʻa PEVCD Grephite - Ka moʻo 156 | 156-13 waʻa grephite | 144 |
| 156-19 waʻa grephite | 216 | |
| 156-21 waʻa grephite | 240 | |
| 156-23 waʻa graphite | 308 | |
| Waʻa PEVCD Grephite - Ka moʻo 125 | waʻa grephite 125-15 | 196 |
| 125-19 waʻa grephite | 252 | |
| 125-21 waʻa griphite | 280 |
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