Qaadaha Garaafiga ee habka PECVD

Sharaxaad Gaaban:

Tamarta VETDoonta Garaafiga ee PECVD ee loogu talagalay Guddiyada Qorraxda waa qayb horumarsan oo si gaar ah loogu talagalay soo saarista muraayadaha qorraxda ee waxqabadka sare leh. Iyada oo loo adeegsanayo hababka Kala-soocidda Uumiga Kiimikada ee Balaasma (PECVD), doontan garaafiga ah waxay hubisaa maaraynta ugu wanaagsan ee walxaha iyo dhigista isku midka ah ee filimada khafiifka ah ee unugyada qorraxda. Iyada oo loo sameeyay saxnaanta iyo cimri dhererka, waxay bixisaa kuleyl heer sare ah, iska caabinta daxalka sare, iyo wasakhowga ugu yar, kuwaas oo lagama maarmaan u ah soo saarista muraayadaha qorraxda ee hufan oo tayo sare leh.

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Faahfaahinta Badeecada

Calaamadaha Alaabta

Tamarta VETQalabka side-ka ee habka PECVD waa qalab tayo sare leh oo loo habeeyey habka PECVD (oo lagu kaydiyo uumiga kiimikada ee plasma-ga lagu xoojiyay). Qalabkan side-ka ah ee garaafiga ah waxa uu ka samaysan yahay walxo graphite ah oo saafi ah, cufnaan sare leh, oo leh iska caabin heerkul sare oo aad u fiican, iska caabin daxaleed, xasillooni cabbir iyo astaamo kale, waxa uu bixin karaa goob side oo deggan oo loogu talagalay habka PECVD, si loo hubiyo isku mid ahaanshaha iyo fidsanaanta kaydka filimka khafiifka ah.

Sideyaasha garaafka ee habka PECVD waxay leeyihiin astaamaha soo socda:

▪ Nadiifnimo sare: wasakh aad u yar, ka fogaanshaha wasakheynta filimka iyo hubinta tayada filimka.

▪ Cufnaanta sare: cufnaanta sare, xoogga farsamada sare, awood u leh inay u adkeysato heerkulka sare iyo jawiga PECVD ee cadaadiska sare leh.

▪ Xasillooni cabbir wanaagsan: isbeddel cabbir yar oo heerkul sare ah, taasoo hubinaysa xasilloonida habka.

▪ Hab-dhaqan kuleyl oo aad u fiican: si wax ku ool ah u wareeji kulaylka si looga hortago kulaylka xad-dhaafka ah ee wafer-ka.

▪ Iska caabin xooggan oo daxalka ah: awood u leh inuu iska caabiyo nabaad-guurka ka dhasha gaasaska daxalka iyo balaasmaha kala duwan.

▪ Adeeg gaar ah: sideyaasha garaafka ee cabbirro iyo qaabab kala duwan leh ayaa loo habeyn karaa iyadoo loo eegayo baahiyaha macaamiisha.

Walxaha garaafiga ee laga soo qaatay SGL:

Halbeegga caadiga ah: R6510
Tusmada	Heerka tijaabada	Qiimaha	Cutubka
Cabbirka celceliska hadhuudhka	ISO 13320	10	μm
Cufnaanta badan	DIN IEC 60413/204	1.83	g/cm³
Daloolada furan	DIN66133	10	%
Cabbirka daloolka dhexe	DIN66133	1.8	μm
Joogto ah	DIN 51935	0.06	cm²/s
Adkaanshaha Rockwell HR5/100	DIN IEC60413/303	90	HR
Iska caabin koronto oo gaar ah	DIN IEC 60413/402	13	μΩm
Xoogga dabacsanaanta	DIN IEC 60413/501	60	MPA
Xoogga cadaadiska	DIN 51910	130	MPA
Modulus-ka Young	DIN 51915	11.5 × 10³	MPA
Ballaarinta kulaylka (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Gudbinta kulaylka (20℃)	DIN 51908	105	Wm^-1K^-1

Waxaa si gaar ah loogu talagalay soo saarista unugyada qorraxda ee waxtarka sare leh, iyadoo taageerta habaynta wafer-ka cabbirka weyn ee G12. Naqshadeynta side-qaadaha ee la hagaajiyay ayaa si weyn u kordhisa wax-soo-saarka, taasoo suurtogalinaysa heerarka wax-soo-saarka oo sarreeya iyo kharashyada wax-soo-saarka oo hooseeya.

Shay	Nooca	Lambarka side-ka wafer-ka
Doonta Grephite ee PEVCD - Taxanaha 156	Doonta grephite ee 156-13	144
	Doonta grephite ee 156-19	216
	Doonta grephite ee 156-21	240
	Doonta garaafitka 156-23	308
Doonta Grephite ee PEVCD - Taxanaha 125	Doon grephite ah oo 125-15 ah	196
	Doonta grephite ee 125-19	252
	Doon 125-21 grphite ah	280