Mphamvu ya VETChonyamulira cha graphite cha PECVD ndi chonyamulira chapamwamba kwambiri chomwe chimapangidwa kuti chigwiritsidwe ntchito poyezera PECVD (plasma enhanced chemical vapor deposition). Chonyamulira cha graphite ichi chimapangidwa ndi zinthu za graphite zoyera kwambiri, zokhuthala kwambiri, zotsutsana ndi kutentha kwambiri, zotsutsana ndi dzimbiri, zokhazikika mu mawonekedwe ndi zina, zimatha kupereka nsanja yokhazikika yonyamulira ya PECVD, kuti zitsimikizire kuti filimu yopyapyala imafanana komanso yosalala.
Zonyamulira za graphite za njira ya PECVD zili ndi makhalidwe awa:
▪ Kuyera kwambiri: kukhala ndi zinthu zochepa kwambiri zodetsa, kupewa kuipitsidwa kwa filimu ndikuonetsetsa kuti filimuyo ndi yabwino.
▪ Kuchulukana kwambiri: kukhuthala kwambiri, mphamvu zambiri zamakanika, kupirira kutentha kwambiri komanso kupanikizika kwakukulu kwa PECVD.
▪ Kukhazikika bwino kwa miyeso: kusintha pang'ono kwa miyeso pa kutentha kwakukulu, kuonetsetsa kuti njira yogwirira ntchitoyo ndi yokhazikika.
▪ Kutentha kwabwino kwambiri: kumasamutsa kutentha bwino kuti chidebe chisatenthe kwambiri.
▪ Kukana dzimbiri mwamphamvu: kutha kukana kukokoloka kwa mpweya wosiyanasiyana wowononga ndi plasma.
▪ Utumiki wopangidwa mwamakonda: zonyamulira za graphite za kukula ndi mawonekedwe osiyanasiyana zitha kusinthidwa malinga ndi zosowa za makasitomala.
Zinthu za graphite kuchokera ku SGL:
| Chizindikiro chachizolowezi: R6510 | |||
| Mndandanda | Muyezo woyeserera | Mtengo | Chigawo |
| Kukula kwa tirigu wapakati | ISO 13320 | 10 | μm |
| Kuchuluka kwa zinthu zambiri | DIN IEC 60413/204 | 1.83 | g/cm3 |
| Ma porosity otseguka | DIN66133 | 10 | % |
| Kukula kwa pore yapakati | DIN66133 | 1.8 | μm |
| Kutha kupirira | DIN 51935 | 0.06 | cm²/s |
| Kulimba kwa Rockwell HR5/100 | DIN IEC60413/303 | 90 | HR |
| Kukana kwamagetsi kwapadera | DIN IEC 60413/402 | 13 | μΩm |
| Mphamvu yopindika | DIN IEC 60413/501 | 60 | MPa |
| Mphamvu yokakamiza | DIN 51910 | 130 | MPa |
| Modulus ya Young | DIN 51915 | 11.5×10³ | MPa |
| Kutentha kwa kutentha (20-200℃) | DIN 51909 | 4.2X10-6 | K-1 |
| Kutentha kwa ma conductivity (20℃) | DIN 51908 | 105 | Wm-1K-1 |
Yapangidwira makamaka kupanga maselo a dzuwa ogwira ntchito bwino kwambiri, kuthandizira kukonza ma wafer akuluakulu a G12. Kapangidwe kabwino ka chonyamulira chimawonjezera kwambiri kuchuluka kwa zokolola, zomwe zimapangitsa kuti pakhale zokolola zambiri komanso ndalama zochepa zopangira.
| Chinthu | Mtundu | Nambala ya wophimba |
| Boti la PEVCD Grephite - Mndandanda wa 156 | 156-13 bwato la grephite | 144 |
| Boti la grephite la 156-19 | 216 | |
| Boti la grephite la 156-21 | 240 | |
| Boti la graphite la 156-23 | 308 | |
| Boti la PEVCD Grephite - Mndandanda wa 125 | Boti la grephite la 125-15 | 196 |
| Boti la grephite la 125-19 | 252 | |
| Boti la 125-21 la grphite | 280 |
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