Imashini itwara icyuma gikoresha grafiti mu gutunganya PECVD

Imashini itwara grafiti yo gukoresha PECVD Ishusho yagaragaye

Ibisobanuro bigufi:

VET EnergyUbwato bwa PECVD Graphite bwagenewe imirasire y'izuba ni igice kigezweho cyagenewe gukora imirasire y'izuba ifite imikorere myiza. Ikoreshwa mu gutunganya umwuka wa Plasma Enhanced Chemical Vapor (PECVD), ubu bwato bwa graphite butuma ibikoresho bifatwa neza kandi bugashyirwa ku turemangingo tw'izuba mu buryo bumwe. Bwakozwe kugira ngo bube bwiza kandi burambe, butanga ubushobozi bwo gutwara ubushyuhe bwinshi, burwanya ingese nyinshi, kandi bugatuma umwanda ugabanuka, ibyo bikaba ari ingenzi mu gukora imirasire y'izuba ifite imikorere myiza kandi myiza.

Ohereza imeri kuri twe Kuramo nka PDF

Ibisobanuro birambuye ku gicuruzwa

Ibirango by'ibicuruzwa

VET EnergyImodoka ya graphite yo mu buryo bwa PECVD ni imashini ikoreshwa mu buryo bwiza cyane yagenewe PECVD (plasma enhanced chemical vapor deposition). Iyi mashini ikoreshwa mu buryo bwa graphite ikozwe mu bikoresho bya graphite bifite ubuziranenge bwinshi, bifite ubushyuhe bwinshi, birwanya ingese, bidashobora kwangirika n'ibindi bintu, ishobora gutanga urubuga ruhamye rwo gutwara PECVD, kugira ngo irebe ko filime ntoya ikomeza kuba nziza kandi ihamye.

Ibikoresho byo gutwara grafiti byo gukoresha PECVD bifite ibi bikurikira:

▪ Ubuziranenge bwinshi: ubuziranenge buke cyane, kwirinda kwanduza firime no kwemeza ko firime ifite ubuziranenge.

▪ Ubucucike bwinshi: ubucucike bwinshi, imbaraga nyinshi za mekanike, zishobora kwihanganira ubushyuhe bwinshi n'umuvuduko mwinshi wa PECVD.

▪ Ubudahangarwa bwiza mu bipimo: impinduka nto mu bipimo ku bushyuhe bwinshi, bishimangira ko inzira ihamye.

▪ Uburyo bwiza bwo gutwara ubushyuhe: kohereza ubushyuhe neza kugira ngo hirindwe ubushyuhe bwinshi bwa wafer.

▪ Ubudahangarwa bukomeye bwo kwangirika: bushobora kurwanya isuri iterwa n'imyuka yangiza n'amaraso.

▪ Serivisi yihariye: ibikoresho bya grafiti bifite ingano n'imiterere bitandukanye bishobora guhindurwa hakurikijwe ibyo abakiriya bakeneye.

Ibikoresho bya grafiti bivuye muri SGL:

Ibipimo bisanzwe: R6510
Urutonde	Igipimo ngenderwaho cy'ibizamini	Agaciro	Ishami
Ingano mpuzandengo y'ingano	ISO 13320	10	μm
Ubucucike bw'umubyimba	DIN IEC 60413/204	1.83	g/cm³
Ubwinshi bw'imyenge ifunguye	DIN66133	10	%
Ingano y'umwobo uringaniye	DIN66133	1.8	μm
Ubushobozi bwo kwihanganira	DIN 51935	0.06	cm²/s
Ubukomere bwa Rockwell HR5/100	DIN IEC60413/303	90	HR
Ubushobozi bwihariye bwo guhangana n'amashanyarazi	DIN IEC 60413/402	13	μΩm
Imbaraga zo koroha	DIN IEC 60413/501	60	MPa
Imbaraga zo gukanda	DIN 51910	130	MPa
Uburyo Young's modulus	DIN 51915	11.5×10³	MPa
Kwaguka k'ubushyuhe (20-200℃)	DIN 51909	4.2X10^-6	K^-1
Ubushobozi bwo gutwara ubushyuhe (20℃)	DIN 51908	105	Wm^-1K^-1

Yagenewe by'umwihariko gukora uturemangingo tw'izuba dukora neza cyane, ishyigikira gutunganya wafer nini za G12. Imiterere myiza y'imodoka itwara imizigo yongera cyane umusaruro, bigatuma umusaruro wiyongera kandi ikiguzi cy'umusaruro kikagabanuka.

Ikintu	Ubwoko	Imodoka itwara wafer ifite nimero
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 156	Ubwato bwa grephite 156-13	144
	Ubwato bwa grephite 156-19	216
	Ubwato bwa grephite 156-21	240
	Ubwato bwa grafiti 156-23	308
Ubwato bwa PEVCD Grephite - Urukurikirane rwa 125	Ubwato bwa grephite 125-15	196
	Ubwato bwa grephite 125-19	252
	Ubwato bwa grphite 125-21	280