SiC Coated Graphite Halfmoon Part For Silicon Carbide Epitaxial Furnace

iSiC Coated Graphite Halfmoon Part yeSilicon Carbide Epitaxial Furnace oFanelweyo

Inkcazelo emfutshane:

I-VET Energy ngumvelisi oqeqeshiweyo kunye nomthengisi wamacandelo angundoqo e-silicon carbide epitaxial furnaces. Inxalenye yethu ye-SiC efakwe kwi-graphite halfmoon isebenzisa igraphite ecocekileyo edityaniswe neteknoloji yokwaleka yeCVD. Yenzelwe ubushushu obuphezulu kunye nemekobume ye-epitaxial eyonakalisa kakhulu. Igraphite ecocekileyo inika icandelo elibalaseleyo lokumelana nobushushu obuphezulu (> 1600 ℃) kunye nokuzinza kwe-thermal, ukuqinisekisa ukufana kwentsimi ye-thermal; I-coating ye-CVD yenza umaleko okhuselweyo okhuselweyo phezu komhlaba ngokusebenzisa iteknoloji ye-CVD, iphucula kakhulu i-anti-oxidation kunye ne-anti-etching properties, kunye nokwandisa ubomi benkonzo ngamaxesha angaphezu kwe-3.

Izinto:Igraphite ecocekileyo ephezulu

Ukucoca:＜5ppm

Ukwaleka:I-CVD-SiC okanye i-CVD-TaC

Ukulungiselela:Isithando somlilo okanye i-OEM

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Iinkcukacha zeMveliso

Iithegi zeMveliso

ISiC Coated Graphite Halfmoon Partyinxalenye ephambili esetyenziswa kwiinkqubo zokwenziwa kwe-semiconductor, ngakumbi kwizixhobo ze-SiC epitaxial. Sisebenzisa itekhnoloji yethu enelungelo elilodwa lomenzi wechiza ukwenza inxalenye yesiqingatha senyanga ibe nobunyulu obuphezulu kakhulu, ukufana okuhle kokwambathisa kunye nobomi benkonzo obugqwesileyo, kunye nokumelana neekhemikhali eziphezulu kunye neempawu zokuzinza kwe-thermal.

Izinto ezisisiseko: igraphite ecocekileyo
Iimfuno zokucoceka:umxholo wekhabhoni ≥99.99%, umxholo womlotha ≤5ppm, ukuze kuqinisekiswe ukuba akukho nkunkuma iyancipha ukungcolisa i-epitaxial layer kumaqondo aphezulu okushisa.
Iinzuzo zokusebenza:
Ukuhanjiswa kwe-thermal ephezulu:I-thermal conductivity kwiqondo lokushisa legumbi lifikelela kwi-150W / (m · K), esondele kwinqanaba lobhedu kwaye inokudlulisa ubushushu ngokukhawuleza.
I-coefficient yokwandisa okuphantsi:5×10^-6/℃ (25-1000℃), ehambelana ne-silicon carbide substrate (4.2×10)^-6/℃), ukunciphisa ukuqhekeka kwengubo ebangelwa luxinzelelo lwe-thermal.
Ukulungiswa kokuchaneka:Ukunyamezela kwe-dimensional ± 0.05mm kuphunyezwa ngomatshini we-CNC ukuqinisekisa ukutywinwa kwegumbi.

Usetyenziso olwahlukileyo lwe-CVD SiC kunye ne-CVD TaC

Ukwaleka	Inkqubo	Ukuthelekisa	Usetyenziso oluqhelekileyo
CVD-SiC	Ubushushu: 1000-1200℃Uxinzelelo: 10-100 Torr	Ukuqina kwe-HV2500, ubukhulu be-50-100um, ukuxhathisa okugqwesileyo kwe-oxidation (izinzile ngaphantsi kwe-1600 ℃)	I-Universal epitaxial furnaces, ifanelekile kwi-atmospheres eqhelekileyo njenge-hydrogen kunye ne-silane
I-CVD-TaC	Ubushushu: 1600-1800℃Uxinzelelo: 1-10 Torr	Ukuqina kwe-HV3000, ubukhulu obuyi-20-50um, bumelana nomhlwa ngokugqithisileyo (bunokumelana neegesi ezityiwayo ezifana ne-HCl, NH₃, njl.)	Iindawo ezinobungozi kakhulu (ezifana ne-GaN epitaxy kunye ne-etching equipment), okanye iinkqubo ezikhethekileyo ezifuna amaqondo obushushu aphezulu angama-2600 ° C.

Ukuhlolwa komgangatho

Ubukhulu bokugquma: igeyiji yobukhulu belaser (ukuchaneka ±1um) okanye uhlalutyo lwe-SEM olunqamlezayo.
Amandla ebhondi: uvavanyo lokukrala (umthwalo obalulekileyo> 50N) okanye uvavanyo lwe-ultrasonic (isantya somsindo> 5000m/s).
Ukumelana nokubola: izinga lokulahlekelwa ubunzima (<0.1 mg/cm²・h) livavanywe kwi-HCl atmosphere (5 vol%, 1600℃).

I-VET Energy ngumvelisi oqeqeshiweyo ogxile kwi-R & D kunye nokuveliswa kwezinto eziphezulu eziphezulu ezifana negraphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto eziphathekayo ezifana ne-SiC yokugqoka, i-TaC yokugqoka, i-glassy carbon coating, i-pyrolytic ye-carbon coating, njl.

Iqela lethu lobuchwephesha livela kumaziko aphezulu ophando lwasekhaya, linokubonelela ngezisombululo zemathiriyeli yobuchwephesha.

Izibonelelo zamandla e-VET ziquka:
• Umzi-mveliso ongowakho kunye nelebhu yobungcali;
• Amanqanaba okucoceka ahamba phambili kushishino kunye nomgangatho;
• Ixabiso elikhuphisanayo kunye nexesha lokuhanjiswa ngokukhawuleza;
• Intsebenziswano yamashishini amaninzi kwihlabathi jikelele;

Siyakwamkela ukuba ujonge umzi-mveliso wethu kunye nelabhoratri nangaliphi na ixesha!