Inxalenye yeGraphite egqunywe yiSiClicandelo eliphambili elisetyenziswa kwiinkqubo zokwenziwa kwee-semiconductor, ingakumbi kwizixhobo ze-epitaxial ze-SiC. Sisebenzisa ubuchwepheshe bethu obunelungelo lobunikazi ukwenza inxalenye ye-halfmoon ibe nobunyulu obuphezulu kakhulu, ukufana okuhle kokugquma kunye nobomi benkonzo obuhle kakhulu, kunye nokumelana okuphezulu kweekhemikhali kunye neempawu zozinzo lobushushu.
Izinto ezisisiseko: i-graphite ecocekileyo kakhulu
Iimfuno zococeko:umxholo wekhabhoni ≥99.99%, umxholo wothuthu ≤5ppm, ukuqinisekisa ukuba akukho kungcola kubangelwa kukungcolisa umaleko we-epitaxial kumaqondo obushushu aphezulu.
Iingenelo zokusebenza:
Ukuqhuba okuphezulu kobushushu:Ubushushu obuphezulu bufikelela kwi-150W/(m・K), ekufutshane nenqanaba lobhedu kwaye inokudlulisa ubushushu ngokukhawuleza.
I-coefficient yokwandisa ephantsi:5×10-6/℃ (25-1000℃), ihambelana nesiseko se-silicon carbide (4.2×10-6/℃), kunciphisa ukuqhekeka kwengubo ebangelwa kuxinzelelo lobushushu.
Ukuchaneka kokucubungula:Ukunyamezelana okulinganayo kwe-±0.05mm kufezekiswa ngomatshini we-CNC ukuqinisekisa ukutywinwa kwegumbi.
Ukusetyenziswa okwahlukileyo kwe-CVD SiC kunye ne-CVD TaC
| Ukwaleka | Inkqubo | Uthelekiso | Isicelo esiqhelekileyo |
| I-CVD-SiC | Ubushushu: 1000-1200℃ Uxinzelelo: 10-100 Torr | Ubunzima HV2500, ubukhulu 50-100um, ukumelana okuhle kakhulu kwe-oxidation (izinzile ngaphantsi kwe-1600℃) | Iifurnace ze-epitaxial ze-Universal, ezifanelekileyo kwiindawo ezishushu zendalo ezifana ne-hydrogen kunye ne-silane |
| I-CVD-TaC | Ubushushu: 1600-1800℃ Uxinzelelo: 1-10 Torr | Ukuqina HV3000, ubukhulu obuyi-20-50um, ayimelani nokugqwala kakhulu (iyakwazi ukumelana neegesi ezigqwalisayo ezifana ne-HCl, i-NH₃, njl.njl.) | Iindawo ezinobungozi kakhulu (ezifana ne-GaN epitaxy kunye nezixhobo zokugrumba), okanye iinkqubo ezikhethekileyo ezifuna amaqondo obushushu aphezulu kakhulu angama-2600°C |
Ukuhlolwa komgangatho
Ubukhulu bokugquma: igeyiji yobukhulu be-laser (ukuchaneka ± 1um) okanye uhlalutyo lwe-SEM olunqamlezileyo.
Amandla ebhondi: uvavanyo lokukrwela (umthwalo obalulekileyo > 50N) okanye uvavanyo lwe-ultrasound (isantya sesandi > 5000m/s).
Ukumelana nokugqwala: izinga lokulahleka kobunzima (<0.1 mg/cm²・h) livavanyiwe kwi-HCl atmosphere (5 vol%, 1600℃).
I-VET Energy ngumvelisi ochwephesha ogxile kwi-R&D kunye nemveliso yezinto eziphambili ezifana ne-graphite, i-silicon carbide, i-quartz, kunye nonyango lwezinto ezifana ne-SiC coating, i-TaC coating, i-glassy carbon coating, i-pyrolytic carbon coating, njl. Ezi mveliso zisetyenziswa kakhulu kwi-photovoltaic, i-semiconductor, amandla amatsha, i-metallurgy, njl.
Iqela lethu lobuchwephesha livela kumaziko ophando aphambili asekhaya, linokubonelela ngezisombululo zezinto zobungcali ngakumbi kuwe.
Iingenelo ze-VET Energy ziquka:
• Ilabhoratri yakho yomzi-mveliso kunye neyobungcali;
• Amanqanaba ococeko kunye nomgangatho ophambili kushishino;
• Ixabiso elikhuphisanayo kunye nexesha lokuhambisa elikhawulezayo;
• Ubudlelwane obuninzi kushishino kwihlabathi liphela;
Siyakwamkela ukuba undwendwele ifektri yethu kunye nelebhu nangaliphi na ixesha!
