Akụkụ SiC kpuchie Graphite Halfmoon Maka ọkụ ọkụ Silicon Carbide Epitaxial

Akụkụ SiC mkpuchi graphite Halfmoon Maka Silicon Carbide Epitaxial Furnace egosipụtara

Nkọwa dị mkpirikpi:

VET Energy bụ ọkachamara na-emepụta ihe na onye na-ebubata ihe ndị bụ isi nke ọkụ ọkụ silicon carbide epitaxial. Akụkụ nke ọkara ọnwa graphite nwere mkpuchi SiC na-eji graphite dị ọcha jikọtara ya na teknụzụ mkpuchi CVD dị elu. Emebere ya maka gburugburu epitaxial na-ekpo ọkụ na nke na-emebi emebi. graphite dị elu na-enye akụrụngwa magburu onwe ya na-eguzogide okpomọkụ dị elu (> 1600 ℃) na nkwụsi ike nke okpomọkụ, na-eme ka ọ bụrụ otu ihe ọkụkụ; mkpuchi CVD na-etolite akwa nchekwa nchekwa dị n'elu site na teknụzụ CVD, na-eme ka ihe mgbochi oxidation na mgbochi etching nke ukwuu na-agbatị ndụ ọrụ karịa ugboro 3.

Ihe:graphite dị elu

Nsacha:5pm

Mkpuchi:CVD-SiC ma ọ bụ CVD-TaC

NhaziBrand oven ma ọ bụ OEM

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Nkọwa ngwaahịa

Mkpado ngwaahịa

Akụkụ SiC mkpuchi graphite Halfmoonbụ isi akụrụngwa eji na usoro nrụpụta semiconductor, ọkachasị maka akụrụngwa epitaxial SiC. Anyị na-eji nkà na ụzụ anyị nwere ikike ime ka ọkara ọnwa na ịdị ọcha dị oke elu, mkpuchi mkpuchi dị mma na ndụ ọrụ magburu onwe ya, yana nnukwu nguzogide kemịkalụ na ihe nkwụsi ike ọkụ.

Ihe ndabere: graphite dị ọcha
Achọrọ ịdị ọcha:carbon ọdịnaya ≥99.99%, ash ọdịnaya ≤5ppm, iji hụ na ọ dịghị adịghị ọcha na-akpalite imerụ epitaxial oyi akwa na elu okpomọkụ.
Uru arụmọrụ:
Nrụpụta ọkụ dị elu:Thermal conductivity na ụlọ okpomọkụ ruru 150W / (m・K), nke dị nso na larịị nke ọla kọpa na ike ngwa ngwa nyefee okpomọkụ.
Ọnụọgụ mgbasawanye dị ala:5×10^-6/ ℃ (25-1000 ℃), dakọtara na silicon carbide mkpụrụ (4.2×10).^-6/ ℃), na-ebelata mgbawa nke mkpuchi nke nrụgide okpomọkụ kpatara.
Nhazi izizi:A na-enweta nnabata akụkụ nke ± 0.05mm site na igwe CNC iji hụ na akara nke ụlọ ahụ.

Ngwa dị iche iche nke CVD SiC na CVD TaC

Mkpuchi	Usoro	Ntụnyere	Ngwa a na-ahụkarị
CVD-SiC	Okpomọkụ: 1000-1200 ℃ Nrụgide: 10-100 Torr	Isi ike HV2500, ọkpụrụkpụ 50-100um, magburu onwe oxidation eguzogide (kwụsi ike n'okpuru 1600 ℃)	Igwe ọkụ epitaxial zuru ụwa ọnụ, dabara maka ikuku ikuku dị ka hydrogen na silane
CVD-TaC	Okpomọkụ: 1600-1800 ℃ Nrụgide: 1-10 Torr	HV3000 siri ike, ọkpụrụkpụ 20-50um, na-eguzogide oke corrosion (nwere ike iguzogide gas na-emebi emebi dịka HCl, NH₃, wdg)	Gburugburu ebe na-emebi emebi (dị ka GaN epitaxy na etching equipment), ma ọ bụ usoro pụrụ iche chọrọ okpomọkụ dị elu nke 2600°C

Nleba anya nke ọma

Ihe mkpuchi mkpuchi: ihe nleba anya laser (nkenke ± 1um) ma ọ bụ nyocha nke akụkụ SEM.
Ike njide: Nnwale ọkọ (ibu dị oke mkpa> 50N) ma ọ bụ nnwale ultrasonic (ụda ụda> 5000m/s).
Nguzogide corrosion: ọnụ ọgụgụ ọnwụ oke (<0.1 mg/cm²・h) nwalere na ikuku HCl (5 vol%, 1600℃).

VET Energy bụ ọkachamara emeputa na-elekwasị anya na R & D na mmepụta nke elu-ọgwụgwụ elu ihe dị ka graphite, silicon carbide, quartz, nakwa dị ka ihe ọgwụgwọ dị ka SiC mkpuchi, TaC mkpuchi, glassy carbon mkpuchi, pyrolytic carbon mkpuchi, wdg The ngwaahịa na-ọtụtụ-eji na fotovoltaic, semiconductor, ọhụrụ ume, metallurgy, wdg.

Anyị oru otu si n'elu ụlọ nnyocha ụlọ ọrụ, nwere ike na-enye ndị ọzọ ọkachamara ihe ngwọta maka gị.

Uru VET Energy gụnyere:
• Ụlọ ọrụ mmepụta ihe na ụlọ nyocha ọkachamara;
• Ụlọ ọrụ na-eduga ọkwa dị ọcha na ịdị mma;
• Ọnụ ahịa asọmpi & oge nnyefe ngwa ngwa;
• Mmekọrịta ọtụtụ ụlọ ọrụ n'ụwa nile;

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