Silicon Carbide SiC Diffusion Txheej Txheem Raj

Silicon Carbide SiC Diffusion Txheej Txheem Raj

Silicon Carbide Diffusion Rauv Tubesyog cov khoom tseem ceeb siv rau hauv semiconductor, kev kho cua sov kub siab, thiab cov txheej txheem npaj khoom siv. Lawv feem ntau yog siv ua lub chaw txhawb nqa thiab chav tshuaj tiv thaiv rau cov cub tawg lossis cov cub tawg oxidation, ua cov txheej txheem xws li kev tshuaj tiv thaiv huab cua, oxidation, diffusion, thiab annealing hauv qhov kub siab, qhov chaw muaj corrosive heev.
VET Energy tshwj xeeb hauv kev tsim thiab tsim cov raj silicon carbide (SiC) rau cov ntawv thov semiconductor kub thiab corrosive. Nrog cov chaw tsim khoom siab heev thiab cov thev naus laus zis CVD thiab sintering, peb xa cov raj uas muaj kev ruaj khov zoo heev, tiv taus oxidation, thiab lub neej ntev.

Cov txiaj ntsig ntawm VET Energy's SiC raj:

Kev Ntshiab Siab Tshaj Plaws:Tsim los ntawm kev siv cov txheej txheem sintering tshwj xeeb, cov hlau tsis zoo (xws li Na, K, Fe, thiab Al) raug txo kom txog qib ppb.
Kev Tawm Pa Tawm Tsawg Kawg Nkaus:Nyob rau hauv qhov kub thiab txias, qhov chaw nqus tsev siab, qhov tso pa tawm qis dua li ntawm quartz, tiv thaiv kev ua qias tuaj ntawm chav ua haujlwm, ua kom ntseeg tau tias qhov zoo ntawm cov yeeb yaj kiab nyias lossis kev loj hlob ntawm cov siv lead ua, thiab txhim kho cov khoom tsim tau zoo (tshwj xeeb tshaj yog qhov tseem ceeb rau SiC epitaxy, GaN kev loj hlob, thiab kev tsim cov khoom siv silicon siab heev).
Kev Ruaj Ntseg Kub Siab:Qhov kub ua haujlwm ntev tshaj 1600 ° C (siab dua qhov taw tes mos ntawm quartz, kwv yees li 1200 ° C) yog ua tau, thiab qhov kub luv luv tuaj yeem tiv taus qhov kub siab dua (xws li 1800 ° C), ua tau raws li qhov xav tau kub heev ntawm cov khoom siv semiconductor tiam thib peb thiab cov txheej txheem loj hlob siv lead ua.
Kev Tiv Thaiv Kev Tshuaj Lom Zem:Nws tiv taus cov pa roj uas muaj zog heev xws li HCl, Cl₂, thiab HF, nrog rau cov silicon molten thiab cov pa hlau, tswj tau qhov ruaj khov ntawm cov qauv thiab qhov chaw tiav hauv cov huab cua nyuaj xws li CVD, diffusion, oxidation, thiab etching, nrog rau lub neej ntev dua li ntawm cov raj cua sov quartz.
Kev coj ua thermal zoo heev:Nws cov thermal conductivity yog ntau dua li ntawm quartz, ua rau lub cub tawg kub faib sai dua thiab sib npaug thiab txhim kho cov txheej txheem sib xws thiab rov ua dua. Qhov no yog qhov tseem ceeb rau thaj chaw loj, ntau-wafer ua (piv txwv li, photovoltaic diffusion furnaces thiab MOCVD reactors).
Kev Ruaj Ntseg ntawm Qhov Ntev:Nws qhov coefficient qis heev ntawm kev nthuav dav thermal ua kom lub raj cua sov tswj tau qhov geometry ruaj khov txawm tias thaum raug qhov kub hloov pauv ntau zaus thiab hnyav, tiv thaiv kev ua tsis tiav ntawm lub foob lossis kev ntxhov siab los ntawm kev nthuav dav thiab kev cog lus thermal.
Kev ruaj khov:Nws qhov kev tawv thiab lub zog siab ua rau lub raj cua sov zoo heev, ua rau nws tiv taus kev hloov pauv thiab kev puas tsuaj.

Daim Ntawv Thov Ib Txwm Muaj:

Kev Tsim Khoom Siv Semiconductor:Kev loj hlob ntawm SiC/GaN epitaxial (MOCVD, HTCVD), silicon-based epitaxy, high-temperature diffusion/oxidation/annealing (RTP), thiab LPCVD.

Kev Lag Luam Photovoltaic:Kev sib kis kub siab (phosphorus/boron diffusion) thiab annealing ntawm crystalline silicon solar cells.