Silicon Carbide SiC Diffusion Process Tube

Silicon Carbide SiC Diffusion Process Tube

Machubhu eSilicon Carbide Diffusion Furnacezvinhu zvikuru zvinoshandiswa mu semiconductor, kurapwa kwekupisa kwakanyanya, uye maitiro ekugadzirira zvinhu. Zvinonyanya kushandiswa senzvimbo yekutsigira uye yekuita maovheni ekupararira kana maovheni ekuoxidation, zvichiita maitiro akadai seatmospheric reaction, oxidation, diffusion, uye annealing munzvimbo dzine tembiricha yakakwira, ine ngura yakawanda.
VET Energy inonyanya kugadzira uye kugadzira machubhu esilicon carbide (SiC) ekushandisa semiconductor inodziya zvakanyanya uye inoparadza. Tine zvivakwa zvepamusoro zvekugadzira uye matekinoroji eCVD neekunhuhwirira, tinounza machubhu ane kugadzikana kwakanaka kwekupisa, kuramba oxidation, uye hupenyu hurefu hwebasa.

Mabhenefiti eVET Energy's SiC chubhu:

Kuchena Kwakanyanya:Yakagadzirwa uchishandisa nzira yakakosha yekupisa, tsvina yesimbi inokuvadza (yakadai seNa, K, Fe, uye Al) inoderedzwa kusvika padanho reppb.
Kupisa Kwakaderera Zvikuru:Munzvimbo dzine tembiricha yakakwira uye dzine vacuum yakawanda, kuburitswa kwegasi kwakaderera zvikuru pane kwequartz, zvichidzivirira zvinobudirira kusvibiswa kwemukamuri, zvichiita kuti mafirimu matete anowanikwa kana kukura kwekristaro kuve nani, uye zvichivandudza zvakanyanya goho rezvigadzirwa (kunyanya zvakakosha pakugadzira SiC epitaxy, kukura kweGaN, uye kugadzirwa kwesilicon imwe chete yekristaro yepamusoro).
Kugadzikana Kwekupisa Kwakakwirira:Kupisa kwenguva refu kunoshanda kunodarika 1600°C (pamusoro penzvimbo yekunyorovesa yequartz, inenge 1200°C) kunogoneka, uye tembiricha dzenguva pfupi dzinogona kutsungirira tembiricha dzakanyanya kukwira (dzakadai se1800°C), zvichisangana nezvinodiwa zvemhando yepamusoro-soro zvema semiconductors echizvarwa chechitatu uye maitiro ekukura kwekristaro.
Kuramba Kuora Kwemakemikari:Inodzivirira zvakanyanya magasi anoparadza zvakanyanya akadai seHCl, Cl₂, uye HF, pamwe chete nesilicon yakanyungudutswa nesimbi, ichichengetedza kusimba kwechimiro uye kupedzisa kwepamusoro munzvimbo dzakaoma dzakadai seCVD, diffusion, oxidation, uye etching, ine hupenyu hunopfuura kure hwemachubhu e quartz furnace.
Kufambisa Kwekupisa Kwakanaka Kwazvo:Kufambiswa kwayo kwekupisa kwakakura kakapetwa kakawanda kupfuura kwequartz, zvichiita kuti kupararira kwekushisa kwechoto kukurumidze uye kwakafanana uye kunatsiridza kufanana uye kudzokorora kwemaitiro acho. Izvi zvakakosha zvikuru pakugadzira mawafer akawanda munzvimbo yakakura (semuenzaniso, maovheni e photovoltaic diffusion uye MOCVD reactors).
Kugadzikana kweDimensional:Kuwanda kwayo kwakanyanya kwekuwedzera kwekupisa kunoita kuti chubhu yechoto irambe yakagadzikana kunyangwe kana ichinge yachinja-chinja zvakanyanya uye zvakanyanya, zvichidzivirira kutadza kwechisimbiso kana kushushikana kunokonzerwa nekuwedzera kwekupisa uye kudzikira.
Kugara kwenguva refu:Kuoma kwayo kukuru uye simba rayo zvinopa chubhu yechoto hunhu hwakanaka hwemakanika, zvichiita kuti isakanganiswe nekukanganisika kana kukuvara.

Kushandiswa Kwakajairika:

Kugadzira Semiconductor:Kukura kweSiC/GaN epitaxial (MOCVD, HTCVD), epitaxy yakavakirwa pasilicon, kupararira kwekushisa kwakanyanya/kuoxidation/annealing (RTP), uye LPCVD.

Indasitiri yePhotovoltaic:Kupararira kwekupisa kwakanyanya (kupararira kwephosphorus/boron) uye kuunganidzwa kwemasero ezuva ecrystalline silicon.