Zoben Zane Mai Rufaffen TaC

VET Energy yana mai da hankali kan R&D da kuma samar da manyan ayyuka na CVD tantalum carbide (TaC) mai rufaffiyar zoben graphite, kuma ta himmatu wajen samar da mahimman abubuwan da za a iya amfani da su don masana'antar semiconductor, photovoltaic da masana'antu masu zafi. Our da kansa ɓullo da sinadaran tururi shaida (CVD) fasahar Forms wani m da kuma uniform tantalum carbide shafi a saman da graphite substrate ta hanyar daidaici matakai, muhimmanci inganta samfurin ta high zafin jiki juriya (> 3000 ℃), lalata juriya da thermal buga juriya, mika rayuwar sabis fiye da sau 3, da rage abokan ciniki m halin kaka.

Fa'idodin fasahar mu:
1. High zafin jiki oxidation juriya
A cikin wani iska yanayi na 1200 ℃, da hadawan abu da iskar shaka nauyi riba kudi ne ≤0.05mg/cm²/h, wanda shi ne fiye da 3 sau da hadawan abu da iskar shaka juriya rayuwa na talakawa graphite, kuma ya dace da high-mita dumama-sanyi sake zagayowar yanayi.
2. Juriya ga narkakkar silicon/karfe lalata
TaC shafi ne musamman inert zuwa karafa kamar ruwa silicon (1600 ℃), narkakkar aluminum / jan karfe, da dai sauransu, guje wa tsarin gazawar gargajiya zoben shiryarwa saboda karfe shigar azzakari cikin farfesa, musamman dace da ikon semiconductor da uku-ƙarni semiconductor masana'antu.
3. Ultra-low barbashi gurbatawa
Tsarin CVD ya sami nauyin rufewa na> 99.5% da ƙarancin ƙasa na Ra≤0.2μm, yana rage haɗarin zubar da barbashi daga tushe da saduwa da ƙaƙƙarfan ƙa'idodin tsabta na 12-inch wafer manufacturin.
4. Madaidaicin girman iko
Ɗaukar ma'auni na CNC daidaitaccen mashin ɗin, girman juriyar juzu'i na graphite shine ± 0.01mm, kuma gabaɗayan nakasawa bayan shafi shine <± 5μm, wanda ya dace da shigarwa a cikin ɗakunan kayan aiki masu inganci.