TaC Coated Graphite Ring

VET Energy focuses on the R&D and production of high-performance CVD tantalum carbide (TaC) coated graphite rings, and is committed to providing core consumable material solutions for semiconductor, photovoltaic and high-temperature industries. Our independently developed chemical vapor deposition (CVD) technology forms a dense and uniform tantalum carbide coating on the surface of the graphite substrate through precision processes, significantly improving the product's high temperature resistance (>3000℃), corrosion resistance and thermal shock resistance, extending the service life by more than 3 times, and reducing customers comprehensive costs.

Our technical advantages:
1. High temperature oxidation resistance
In an air atmosphere of 1200℃, the oxidation weight gain rate is ≤0.05mg/cm²/h, which is more than 3 times the oxidation resistance life of ordinary graphite, and is suitable for high-frequency heating-cooling cycle conditions.
2. Resistance to molten silicon/metal corrosion
TaC coating is extremely inert to metals such as liquid silicon (1600℃), molten aluminum/copper, etc., avoiding structural failure of traditional guide rings due to metal penetration, especially suitable for power semiconductors and third-generation semiconductor manufacturing.
3. Ultra-low particle contamination
The CVD process achieves a coating density of >99.5% and a surface roughness of Ra≤0.2μm, reducing the risk of particle shedding from the source and meeting the stringent cleanliness requirements of 12-inch wafer manufacturin.
4. Precise size control
Adopting CNC precision machining, the size tolerance of graphite substrate is ±0.01mm, and the overall deformation after coating is <±5μm, which is suitable for installation in high-precision equipment chambers.