VET Energy inotarisa paR&D uye kugadzirwa kwepamusoro-inoshanda CVD tantalum carbide (TaC) yakavharwa magirafu mhete, uye yakazvipira kupa core consumable material solutions for semiconductor, photovoltaic and high-temperature maindasitiri. Yedu yakazvimiririra yakagadziridzwa kemikari vapor deposition (CVD) tekinoroji inoumba dense uye yunifomu tantalum carbide coating pamusoro peiyo graphite substrate kuburikidza nemazvo maitiro, inovandudza zvakanyanya chigadzirwa chekudzivirira kwekushisa kwechigadzirwa (> 3000 ℃), kuramba kwecorrosion uye kupisa kwekuvhunduka, kuwedzera hupenyu hwesevhisi nekanopfuura katatu, uye kuderedza vatengi mari yakazara.
Zvedu zvehunyanzvi zvakanakira:
1. High tembiricha oxidation kuramba
Mumhepo yemhepo ye1200 ℃, iyo oxidation huremu hwekuwedzera ≤0.05mg/cm²/h, iyo inodarika ka3 nguva yehupenyu hwekudzivirira oxidation yeyakajairwa graphite, uye inokodzera yakakwirira-frequency yekudziya-kutonhora kutenderera mamiriro.
2. Kupokana nesilicon yakanyungudutswa/metal corrosion
TaC coating yakanyanyisa inert kune simbi senge liquid silicon (1600 ℃), yakanyungudutswa aruminiyamu / mhangura, nezvimwewo, kudzivirira kutadza kwemaitiro echinyakare gidhi mhete nekuda kwekupinda kwesimbi, kunyanya yakakodzera kune simba semiconductors uye yechitatu-chizvarwa semiconductor kugadzira.
3. Ultra-low particle kusvibiswa
Iyo CVD maitiro anozadzisa coating density ye> 99.5% uye kushata kwepamusoro kweRa≤0.2μm, kuderedza njodzi yekudurura chidimbu kubva kutsime uye kusangana nekuomesera kwehutsanana zvinodiwa zve12-inch wafer manufacturin.
4. Kunyatso kudzora ukuru
Kutora CNC chaiyo machining, saizi yekushivirira kwegraphite substrate ndeye ± 0.01mm, uye deformation yese mushure mekupotera ndeye <± 5μm, iyo yakakodzera kuisirwa mumakamuri emidziyo-yakanyanya.
| 碳化钽涂层物理特性物理特性 Zvenyama zve TaC coating | |
| 密度/ Density | 14.3 (g/cm³) |
| 比辐射率 / Chaiyo emssivity | 0.3 |
| 热膨胀系数 / Thermal yekuwedzera coefficient | 6.3 10-6/K |
| 努氏硬度/ Kuoma (HK) | 2000 HK |
| 电阻 / Kupikisa | 1×10-5 Om*cm |
| 热稳定性 / Thermal kugadzikana | <2500℃ |
| 石墨尺寸变化 / Graphite saizi shanduko | -10 ~ -20um |
| 涂层厚度 / Coating ukobvu | ≥30um yakajairika kukosha (35um±10um) |
Ningbo VET Energy Technology Co., Ltd ibhizimusi repamusoro-soro rinotarisa mukusimudzira nekugadzirwa kwezvinhu zvepamusoro-soro, zvekushandisa uye tekinoroji zvinosanganisira graphite, silicon carbide, ceramics, kurapwa kwepamusoro seSiC coating, TaC coating, girazi kabhoni coating, pyrolytic kabhoni coating, nezvimwewo, zvigadzirwa izvi zvinoshandiswa zvakanyanya muphotovoltaic, semiconductor itsva, semicondurgy.
Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa edzimba, uye akagadzira akawanda ematekinoroji matekinoroji ekuona kuita kwechigadzirwa uye mhando, anogona zvakare kupa vatengi mhinduro dzehunyanzvi.
