VET Energy inotarisa paR&D uye kugadzirwa kwemaringi e graphite ane CVD tantalum carbide (TaC) ane simba repamusoro, uye yakazvipira kupa mhinduro dzezvinhu zvinodyiwa zve semiconductor, photovoltaic uye maindasitiri ane tembiricha yepamusoro. Tekinoroji yedu yakagadzirwa yakazvimirira ye chemical vapor deposition (CVD) inogadzira tantalum carbide coating yakakora uye yakaenzana pamusoro pe graphite substrate kuburikidza nemaitiro akajeka, zvichivandudza zvakanyanya kuramba kwekupisa kwakanyanya kwechigadzirwa (>3000℃), kuramba ngura uye kuramba kupisa, kuwedzera hupenyu hwebasa nekanopfuura katatu, uye kuderedza mitengo yakazara yevatengi.
Zvakanakira zvedu zvehunyanzvi:
1. Kudzivirira kupisa kwakanyanya kwe oxidation
Mumhepo ine 1200℃, mwero wekuwedzera kwehuremu hweoxidation i ≤0.05mg/cm²/h, inova nguva inodarika katatu yehupenyu hweoxidation resistance yegraphite yakajairika, uye yakakodzera mamiriro ekupisa nekutonhodza kwemhepo.
2. Kuramba ngura yesilicon/simbi yakanyungudutswa
Kuputira TaC hakuna simba zvakanyanya pasimbi dzakadai sesilicon yemvura (1600℃), aruminiyamu/mhangura yakanyungudutswa, nezvimwewo, zvichidzivirira kutadza kwechimiro chemhete dzekutungamira dzechinyakare nekuda kwekupinda kwesimbi, kunyanya yakakodzera ma semiconductor emagetsi uye kugadzirwa kwema semiconductor echizvarwa chechitatu.
3. Kusvibiswa kwezvimedu zvishoma kwazvo
Maitiro eCVD anosvika pakufukidza kwe>99.5% uye kuomarara kwepamusoro kweRa≤0.2μm, zvichideredza njodzi yekudonha kwezvidimbu kubva panobva uye zvichizadzisa zvinodiwa zvekuchena kwakasimba kwe12-inch wafer manufacturin.
4. Kudzora saizi nemazvo
Tichishandisa CNC machining chaiyo, saizi ye graphite substrate inokwana ±0.01mm, uye kushanduka kwese mushure mekuputira i<±5μm, iyo yakakodzera kuiswa mumakamuri emidziyo ane kunyatsonaka.
| 碳化钽涂层物理特性物理特性 Hunhu hwemuviri hwe TaC kuputira | |
| 密度/ Kuwanda kwehuwandu | 14.3 (g/cm³) |
| 比辐射率 / Kuburitsa zvinhu zvakananga | 0.3 |
| 热膨胀系数 / Kuwanda kwekuwedzera kwekupisa | 6.3 10-6/K |
| 努氏硬度/ Kuoma (HK) | 2000 HK |
| 电阻 / Kuramba | 1 × 10-5 Ohm*cm |
| 热稳定性 / Kugadzikana kwekupisa | <2500℃ |
| 石墨尺寸变化 / Kuchinja kwehukuru hweGraphite | -10~-20am |
| 涂层厚度 / Ukobvu hwekuputira | ≥30um kukosha kwakajairika (35um±10um) |
Ningbo VET Energy Technology Co., Ltd ibhizinesi repamusoro-soro rinotarisa pakugadzirwa kwezvinhu zvepamusoro-soro, zvinhu netekinoroji zvinosanganisira graphite, silicon carbide, ceramics, kurapwa kwepamusoro senge SiC coating, TaC coating, girazi carbon coating, pyrolytic carbon coating, nezvimwewo, zvigadzirwa izvi zvinoshandiswa zvakanyanya mu photovoltaic, semiconductor, new energy, metallurgy, nezvimwewo.
Chikwata chedu chehunyanzvi chinobva kumasangano epamusoro ekutsvagisa emuno, uye chakagadzira matekinoroji akawanda ane patent kuti chive nechokwadi chekuti chigadzirwa chinoshanda uye chemhando yepamusoro, chinogonawo kupa vatengi mhinduro dzehunyanzvi.
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